CV/MVGQ

For Safety Instructions and Actuator Precautions, refer to pages 10-24-3 to 10-24-6.

CV/MVGQ

For Safety Instructions and Actuator Precautions, refer to pages 10-24-3 to 10-24-6.

Table of Contents

Burst Pressure Characteristics Curve and Operating Pressure Specifications 10-TCU 10-TFU 10-TFU 10-TCU 0425B-2 0425B-3 0604B-2 0604B-3 0805B-2 0805B-3 3 cores 2 cores 3 cores 2 cores 3 cores 10-TFU 10-TFU Model Tubing O.D. (mm) No. of cores 2 cores 4 6 4 8 5 2.5 Tubing I.D.

New

10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 1.

Rotary Actuator/Vane Type

Size: 40 Size: 10, 15 Size: 20, 30 A port B port q e t e !2 q o !0 !0 !2 !3 o r !3 w !4 r w !5 !4 !1 !1 y u i D-M9m !6 Component Parts No. Description Material No.

Table of Contents

3 !4 !5 !6 !7 No. q w e r t y u i o !

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

3 !4 !5 !6 !7 No. q w e r t y u i o !

SY

Series 3 SY3000 5 SY5000 SUP/EXH block assembly mounting position Type of actuation Symbol Applicable stations Mounting position D side U side B 2 to 16 stations 2 to 10 stations 2 to 10 stations D U 2 2 position double 3 3 position closed center Both sides M Special specifications 4 3 position exhaust center 5 3 position pressure center For special specifications, order separately on a

Hydraulic

kN) Load (kN) Bore size 80 B-rod C-rod 4 8 3 7 2000 6 1 5 2 4 8 3 7 5 6 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 1 5 10 20 50 Load (kN) Load (kN) Bore size 100 B-rod C-rod 4 8 8 3 3 7 7 5 4 5 2000 6 6 1 2 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 100 1 5 10 20 50 100 Load (kN) Load (kN) 127 Hydraulic Cylinders Technical Data 3 Relationship Between Load Weight and Speed Load weight

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

One-touch Fittings Series KQ2

8 / 3 S 3 0 7 0 T 2 Q K 7 1 5 . 9 2 0 3 5 3 8 / 1 S 1 0 9 0 T 2 Q K 2 1 2 . 5 1 2 1 3 2 5 . 4 2 8 2 5 . 8 1 6 6 1 6 1 / 5 4 / 1 S 2 0 9 0 T 2 Q K 4 1 5 . 8 2 0 3 4 2 8 / 3 S 3 0 9 0 T 2 Q K 7 1 5 . 0 3 5 . 1 3 6 3 4 / 1 S 2 0 1 1 T 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 5 . 9 2 5 . 2 3 1 2 7 9 2 8 / 3 8 / 3 S 3 0 1 1 T 2 Q K 5 . 1 3 5 . 4 3 8 3 2 / 1 S 4 0 1 1 T 2 Q K 2 2 5 . 5 3 5 . 6 3 4 6 4 /

Electric Actuator/Slider Type

9 q r !5 y i !8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Air Slide Table

ZZ MXQ 20-mm2 With end lock (20) Pilot port 2 x M5 x 0.8 Q 5 J 10 0.5 9.5 3 72 16.2 Dimensions [mm] 53 3 Model J Q MXQ20-10Zm2 91.5 10 MXQ20-20Zm2 MXQ20-30Zm2 101.5 MXQ20-40Zm2 111.5 MXQ20-50Zm2 127.5 MXQ20-75Zm2 161.5 MXQ20-100Zm2 234.5 MXQ20-10Z2 3 38 10 5 J 61 MXQ20-125Zm2 259.5 MXQ20-150Zm2 284.5 * Dimensions other than those listed above are the same as those for the standard type.

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

3 Port Solenoid Valve Base Mounted and Body Ported VQZ Series Choice of Rubber or Metal Seal Compact Design With Large Flow Long Life Interchangeable One-Touch Fittings P R O D U C T S Q Q Q Table of Contents Q Q Q Product Features .pages 4-5 Preferred Options Guide.page 7 Q Q Base Mounted Valves and Manifolds.page 9 Specifications.pages 10-11 How To Order .pages 12-15 Options

Stability of suction position,

to 125)(UM/BM)lJB (10/30/50) q Stopper Form/Diameter Part no.