MY1

@7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 No. q w e r t y u i o !

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

New

suppressor) P H J Q R Q R K N 1 1/8 1/8 1/4 3/8 1/8 1/4 3/8 14 14 19 22 14 19 22 30 30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 27 29.5 29.5 29.5 32 32 32 44 54 52.5 53.5 58 56.5 57.5 30 32.5 32.5 32.5 35 35 35 30.5 40

15

M4 x 12 2.7 9 8 NW M4 x 12 2.7 9 12 NV M4 x 0.7 6 63 40 3.5 6 123 68 M4 x 12 2.7 M4 x 12 2.7 9 8 NU M4 x 12 2.7 11 12 NT M3 x 12 1.5 12 18 63 Component Parts Size: 40 Size: 63 Quantity Motor type NY NX 1 Motor plate 1 Quantity Motor type NY NX NW NV NU NT 1 Motor plate 1 1 1 No.

7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

NCQ8

4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/4 3-1/2 3-3/4 4 4-1/2 5 5-1/2 6 #10-24UNC2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/8 3-3/8 3-5/8 3-7/8 4-1/8 4-5/8 5-1/8 5-5/8 6-1/8 1/4-20UNC2-5/8 2-3/4 2-7/8 3 3-1/8 3-1/4 3-3/8 3-5/8 3-7/8 4-1/8 4-3/8 4-7/8 5-3/8 5-7/8 6-3/8 #4-40UNC1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 #6-32UNC1-7/8 2 2-1/8 2-1/4 2-3/8 2-1

VFS

-1 VVF2000-26-6 AXT625-6 q w e r t y u Steel plate NBR NBR NBR NBR NBR Resin Junction cover assembly AXT625-28-7AStations o VVF2000-26-5AStations AZ738-10AStations AXT333-12 Rubber plug NBR !

VFR

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

Air Fittings & Tubing

KQ2U23 to KQU12 KQ2U16 SKQ19, #1 to #6 SKQ21, #16 Different diameter union Y: KQ2U Effective area (mm2) Tube O.D. (mm) a b (1) (1) Weight (g) D1 D2 L1 L2 P Q M1 M2 Part No.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

•

G ZPR4DD 40 43 29 425 17 53.3 [71.1 1 6 8 Applicable tube (mm) 25 1 0 ZPR250 28 20 45.8 636 5 35 6 8 Applicable tutle 0 .0 .t P Q R "5 .6 6 24.3 16.8 12.8 " 8 8 26.2 18.7 ' 15.2 APpllC<>Qle tube 0 .0 .p Q R , .4 4 23.3 15.8 10.4 Applicable tube (mm) .5 6 ' 6 24.3 16.8 12.8 ,8 8 26.2 18.7 1 5.2 21 Series ZPR/Without Buffer Connection One-Touch Tube Fitting Pad Type Bellows --Vacuum Entry

Table of Contents

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

1 !2 w e !3 !4 r t y u i !5 !6 No.

One-touch Fittings

23.6 28.6 40.5 20.6 13.4 8 4.2 100 58.9 13 29.8 Q Q 2 x O Oval type Round type 4, 6 8 to 16 2 x N M Q L1 L2 Q D D 1: D is maximum diameter.

MXS Series Air Slide Table

Q Q Q Q Q Q Q Q Q Q Q Q Q 41 Q MXS Series 6, 8, 12, 16, 20,25 The MXS series air slide table is ideal when precise load transfer/ assembling is required. Shock absorber type and Symmetric type are now available.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

9 q r !5 y i !8 o !6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Thermo-chiller

0 Union (Size: 1/2 inch) Stainless steel 1 (197) !1 DI sensor piping assembly Stainless steel 1 !2 Mounting bracket 1 !3 DI filter inlet hose PVC 1 !4 DI filter outlet hose PVC 1 !5 Hose clamp 4 !6 Mounting screw (Size: M5) 2 !7 Cable tie holder 5 !8 Binding band 4 !

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

0: L+ ON, 1: L+ OFF 4..7 Reserved 0 -105No.EX-OMX1011 Configuration format (EX600-LAB1 / EX600-LBB1) Byte 6 to 45 EX600-LAB1 / EX600-LBB1 (46 byte) Byte Bit Parameter Setting value PortConfig Port 1 0: Deactivated 1: IOL_Manual 2: IOL_Autostart 3: DI_C/Q 4: DQ_C/Q 6 0..7 PortMode 0: No Device Check 1: Type compatible Device V1.0 2: Type compatible Device V1.1 3: Type compatible Device V1.1

Modular F.R.L. Unit

C 26.5 28 31 36 36 43 46 U 14 16 19 21 21 D 57 55 59 68 68 87 87 V 6 6 7 7 7 E 65 64 66 74 74 84 84 L 44 44 46 54 56 65.8 65.8 F 29.5 28.5 30.5 35 35 44.5 44.5 M 5.4 5.4 6.5 8.5 8.5 11 11 G 2 Note) N 15.4 15.4 8 10.5 10.5 13 13 P 55 55 53 70 70 90 90 Q 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 25 26 31 35.5 37 T 28.5 32.5 38.5 42.5 42.5 AR20K AR25K AR30K AR40K AR40K-06 AR50K AR60K 1/8, 1/4 1

Stopper Cylinder

4 y q r e w @1 @2 !5 !6 t u i o !7 !9 !8 @0 u i !8 !9 !6 @0 o 20 32, 40, 50 w @2 @1 !5 !4 t i i u !8 !9 w @2 u !5 !4 y q !9 @0 @1 t e @0 !6 !6 !8 o y q e o Double acting with spring loaded (B) !0 20, 32, 40, 50 12, 16 !0 Single acting / spring extend (T) !1 !2 !0 12, 16 20, 32, 40, 50 !0 !3 Component Parts No.