RSH/RS1H

8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 Port size NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 ML2B G 1/8 G 1/8 G 1/4 G 1/4 Moantable Auto switch C J G5-S Bore Size/Standard Stroke (mm) CV MVGQ Standard stroke Bore size (mm) Model 20 15 CC RSH RS1H 32 20 50 30 RB RS1H 63 30 J 80 40 Weight D(kg) -X Bore size (mm) Action Weight Rod end configuration 2020 0.41 Data Double acting, 32 0.75 Lever type with built-in

RSH/RS1H

8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 Port size NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 ML2B G 1/8 G 1/8 G 1/4 G 1/4 Moantable Auto switch C J G5-S Bore Size/Standard Stroke (mm) CV MVGQ Standard stroke Bore size (mm) Model 20 15 CC RSH RS1H 32 20 50 30 RB RS1H 63 30 J 80 40 Weight D(kg) -X Bore size (mm) Action Rod end configuration Weight 2020 0.41 Data Double acting, 32 0.75 Lever type with built-in

Modular F.R.L. Unit

66 74 74 K 12 14 14 18 18 L 5.5 7 7 9 9 M 3.2 4 4 4 4.6 N B 132 184 187 222 224 J 33 L 5.5 7 7 9 9 F 43 57 57 75 80 G 30 41 41 50 50 H 24 35 35 40 40 E 41.5 55 55 72.5 77.5 AC20C AC25C AC30C AC40C 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 2 Note 1) 50 71 71 88 88 45 50 50 75 75 126 167 167 220 235 114 143 146 183 185 26.5 28 31 36 36 0 3.5 3.5 3 AC40C-06 Note 1) For AC20 only, the position

10

1 !4 !0 !3!8 !6 !5 12-2 12-1 7-2 7-1 1-2 1-1 1-1 Width across flats Rod view 32 (2:1) Component Parts No.

CM2

auto switch DM2 C H L 40 F A J H7BW 150 Number of auto switches Bore size Rod boot 2 pcs. 1 pc. n pcs.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Confirm that the value is within the operating range of the point of application L = 60 mm. 10 10 RZQ 5 5 MI W S CEP1 1 1 kg 1 CE1 CE2 0.25 kg ML2B 10 20 40 5 10 20 30 C J G5-S 32.5 m/min Transfer speed (m/min) Transfer speed (m/min) 12 m/min CV Procedure 3: Confirmation of allowable lateral load MVGQ MIW12 MIS12 1.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Confirm that the value is within the operating range of the point of application L = 60 mm. 10 10 RZQ 5 5 MI W S CEP1 1 1 kg 1 CE1 CE2 0.25 kg ML2B 10 20 40 5 10 20 30 C J G5-S 32.5 m/min Transfer speed (m/min) Transfer speed (m/min) 12 m/min CV Procedure 3: Confirmation of allowable lateral load MVGQ MIW12 MIS12 1.

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

IDG

) AFF J AM Thread size: 1/4 Hexagon width across flats 17 Drain Drain Misc.

53

2 2 Circulating fluid outlet 1 User's equipment 2 2 Circulating fluid return port 3 4 8 Automatic fluid fill port (Option J) Fluid supply 9 Overflow port (Option J) Tank drain port To wastewater collection pit 5 No.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

1 !2 !3 !4 !5 !6 !7 !8 !

REA/REB

Nil 1 pc.

Electric Actuator/Slider Type

6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

V

VVQ1000-1-J A&C M VVQ1000-1-J B&D M Nozzle Diameter (mm) 0.7 1 Max Suction Flow Rate (Nl/min) 11 20 Max Vacuum Pressure -630mmHg Max Operating Pressure 0.8MPa / 120PSI Standard Supply Pressure 0.5Mpa / 70PSI Operating Temperature 5~500C / 40~120F T E C H N I C A L SPECIFICATIONS EJECTOR UNITS H O W T O O R D E R Vacuum Ejector Unit Max No of Units No of Valve Stations 6 0-3 5 4-6 4 7-10 3

CNG

301 to 400 20 to 300 7 to 300 45 22 19.5 17 103 1/8 51.5 16.5 10 14 2 25 6.5 10 6 31 301 to 400 96 10 (12) 9 301 to 450 20 to 300 7 to 300 45 22 19.5 17 104 1/8 51.5 20 12 18 2 25 6.5 10 6 38 301 to 450 97 10 (13) 11 301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25 2 26 7 12 8 47 301 to 800 104 (mm) Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) O P AJ AI AH AG AB AA V U T S N M L A K J I B AP AK AL Rc 1/8 20 95 82 125 112 11 12 48 82 12 26 45 25 80 60 55 30 108 99 6.6 25 9 75, 100, 125, 150, 200 M6 x 1 depth 9 Rc 1/8 25 108 92 150 134 13 16 57 100 13 31 54 35 100 70 65 35 130 30 109 9 9 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 Rc 1/8 32 118 102 150 134 16 16 65 114 16 38 60 35 106 80 73 40 135

Cylinder with Lock Series CNG

301 to 400 20 to 300 7 to 300 45 22 19.5 17 103 1/8 51.5 16.5 10 14 2 25 6.5 10 6 31 301 to 400 96 10 (12) 9 301 to 450 20 to 300 7 to 300 45 22 19.5 17 104 1/8 51.5 20 12 18 2 25 6.5 10 6 38 301 to 450 97 10 (13) 11 301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25 2 26 7 12 8 47 301 to 800 104 (mm) Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA

XM, XY

Bonnet assembly Handle assembly Bonnet & Handle assembly/Construction part number: 1 Model Valve size Temperature specifications Indicator 16 25 40 50 63 80 XLA16-30-1 XLA25-30-1 XLA40-30-1 XLA50-30-1 XLA63-30-1 XLA80-30-1 General use XMA XYA XLA16A-30-1 XLA25A-30-1 XLA40A-30-1 XLA50A-30-1 XLA63A-30-1 XLA80A-30-1 XLA16-30-1H XLA25-30-1H XLA40-30-1H XLA50-30-1H XLA63-30-1H XLA80-30-1H High

CNS

Graph (1) 30 20 10 2.