Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Confirm that the value is within the operating range of the point of application L = 60 mm. 10 10 RZQ 5 5 MI W S CEP1 1 1 kg 1 CE1 CE2 0.25 kg ML2B 10 20 40 5 10 20 30 C J G5-S 32.5 m/min Transfer speed (m/min) Transfer speed (m/min) 12 m/min CV Procedure 3: Confirmation of allowable lateral load MVGQ MIW12 MIS12 1.

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

IDG

) AFF J AM Thread size: 1/4 Hexagon width across flats 17 Drain Drain Misc.

53

2 2 Circulating fluid outlet 1 User's equipment 2 2 Circulating fluid return port 3 4 8 Automatic fluid fill port (Option J) Fluid supply 9 Overflow port (Option J) Tank drain port To wastewater collection pit 5 No.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

1 !2 !3 !4 !5 !6 !7 !8 !

REA/REB

Nil 1 pc.

Electric Actuator/Slider Type

6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

V

VVQ1000-1-J A&C M VVQ1000-1-J B&D M Nozzle Diameter (mm) 0.7 1 Max Suction Flow Rate (Nl/min) 11 20 Max Vacuum Pressure -630mmHg Max Operating Pressure 0.8MPa / 120PSI Standard Supply Pressure 0.5Mpa / 70PSI Operating Temperature 5~500C / 40~120F T E C H N I C A L SPECIFICATIONS EJECTOR UNITS H O W T O O R D E R Vacuum Ejector Unit Max No of Units No of Valve Stations 6 0-3 5 4-6 4 7-10 3

CNG

301 to 400 20 to 300 7 to 300 45 22 19.5 17 103 1/8 51.5 16.5 10 14 2 25 6.5 10 6 31 301 to 400 96 10 (12) 9 301 to 450 20 to 300 7 to 300 45 22 19.5 17 104 1/8 51.5 20 12 18 2 25 6.5 10 6 38 301 to 450 97 10 (13) 11 301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25 2 26 7 12 8 47 301 to 800 104 (mm) Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) O P AJ AI AH AG AB AA V U T S N M L A K J I B AP AK AL Rc 1/8 20 95 82 125 112 11 12 48 82 12 26 45 25 80 60 55 30 108 99 6.6 25 9 75, 100, 125, 150, 200 M6 x 1 depth 9 Rc 1/8 25 108 92 150 134 13 16 57 100 13 31 54 35 100 70 65 35 130 30 109 9 9 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 Rc 1/8 32 118 102 150 134 16 16 65 114 16 38 60 35 106 80 73 40 135

Cylinder with Lock Series CNG

301 to 400 20 to 300 7 to 300 45 22 19.5 17 103 1/8 51.5 16.5 10 14 2 25 6.5 10 6 31 301 to 400 96 10 (12) 9 301 to 450 20 to 300 7 to 300 45 22 19.5 17 104 1/8 51.5 20 12 18 2 25 6.5 10 6 38 301 to 450 97 10 (13) 11 301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25 2 26 7 12 8 47 301 to 800 104 (mm) Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA

XM, XY

Bonnet assembly Handle assembly Bonnet & Handle assembly/Construction part number: 1 Model Valve size Temperature specifications Indicator 16 25 40 50 63 80 XLA16-30-1 XLA25-30-1 XLA40-30-1 XLA50-30-1 XLA63-30-1 XLA80-30-1 General use XMA XYA XLA16A-30-1 XLA25A-30-1 XLA40A-30-1 XLA50A-30-1 XLA63A-30-1 XLA80A-30-1 XLA16-30-1H XLA25-30-1H XLA40-30-1H XLA50-30-1H XLA63-30-1H XLA80-30-1H High

CNS

Graph (1) 30 20 10 2.

39

300.025 250.03 1500.05 300.05 250.03 1000.05 300.05 3 12.5 4.4 12.5 P Q R P Q 45 R38 M8 x 1.25 120.8 R38 1 1 12.5 R28 M8 x 1.25 8.5 1 12.5 R7 22 1 R28 8.5 22 20 R7 22 20 22 NAAMS code ACA031M ACA032M ACA033M ACA034M ACA035M ACA036M NAAMS code ACA043M ACA044M ACA045M ACA046M ACA047M ACA048M A B C D E F G H I J A B C D E F G H I J Part no.

Proposals for Energy Saving

with M5 thread Flow direction: Right to left With element service indicator Size 1/8 1/4 3/8 1/2 3/4 1 1 1/2 2 01 02 03 04 06 10 14 20 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B, 650 75B, 850 Rc NPT G 1/8 1/4 3/8 1/2 3/4 1 1 1/2 Nil J M R T Nil B C D Option Accessory Size Bore size RT T R JR JRT MR J MRT JT MT M 03 06 04 01 02 20 14 Size 10 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B

Prevents Micro-Bubbles

B 2-P 2-F K Body material: PFA N G A D L K 4-M Non-locking type Locking type 60 C (H1) (H2) A B SMC E J B 2-P (mm) Dimensions A B C D E F G H1 H2 J K L M N P Model Body material LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 Stainless steel 36 47 81 13 19 110.5 112.5 37 26 37 Rc 1/4, 3/8, NPT 1/4, 3/8 M6 x 1

A

4 3 3/8 5 3/4 6 1 8 1 1/2 9 2 02 1/4 03 3/8 04 1/2 06 3/4 10 1 14 1 1/2 20 2 T H R E A D T H R E A D 1 Male 2 Female (Only NAMC220, 320, 520 Special Order Only) R(PT)* Remove (N) when ordering N NPT Courtesy of Steven Engineering, Inc. !

Table of Contents

8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in

Cylinder with Lock Series CNS

B BN BP BQ C CL D E EA F FA G GA GB GL GR J 125 140 160 to 1400 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 16 155 23 25 30 M14 x 1.5 to 1400 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 16 180 28 30 30 M14 x 1.5 to 1400 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 18.5 215 35 35 35 M16 x 1.5 (mm) Bore size (mm) K KA LD LH LS LT LX LY MM N P Q R S T V VA X Y H ZZ 125 140 160 15 31 19 85