Modular F.R.L. Unit

A A A A IN OUT IN OUT Bracket L3 L2 L1 L4 L1 KS K S T V KT KV KST L3 43 57 57 75 80 96 Attachment Model L2 61 76 76 99 L1 41.5 55 55 72.5 L2 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 L3 43 57 57 75 L2 43 57 57 75 80 96 L1 41.5 55 55 72.5 L2 43 57 57 75 L3 57 74 74 95 L2 61 76 76 99 L3 43 57 57 75 L1 41.5 55 55 72.5 L3 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 98 98 L2 43 57

MXS

San=a1+a2+a31 3.11-10 Air Slide Table Series MXS Allowable load: W (N) Fig.1 Overhang: Ln (mm), Correction value for moment center distance An (mm) Fig.2 Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Dynamic moment L1 A1 L3 A5 L2 A3 CL W Mp Mr My W W MLGC L3 A6 W L1 A2 L2 A4 CNA W Mey Mep CB L2 A4 CV/MVG A2 L3 Work mounting coefficient: K Fig.3 CXW Table mounting CXS

15

Series Variations Series Size Page 25 32 40 63 Slider Type Ball Screw Drive LEFS Series 784 100 W 200 W 400 W Slider Type Belt Drive LEFB Series 805 100 W 200 W 400 W High Rigidity Slider Type Ball Screw Drive LEJS Series 824 100 W 200 W Rod Type LEY Series 848 100 W 200 W 400 W Guide Rod Type LEYG Series 864 100 W 200 W The values in shows the equivalent motor capacity. 780 LE Series Compatible

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

High Vacuum Angle Valve

e w e XSA Seal material Compound No. 1349-80 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Air Slide Table

75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type MXQ 10 10 10 10 10 10 20 20 20 20 20 20

ZP

Form w 1 Material e Buffer spec.

Table of Contents

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

CQS

CQ2 Mounting Bolt for CDQSK MU Mounting bolt Mounting bolt C' D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 Model C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 Special long bolt for through hole mounting is available as an option. How to Order: Specify the required bolts.

CA2

side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 90 + 50(n 2) n = 2, 4, 6, 8 55 + 50(n 2) n = 2, 3, 4 75 + 50(n 2) n = 2, 4, 6, 8 80 + 50(n 2) n = 2, 4, 6, 8 Different sides With n D-A44 Same side 10 20 100 75 80 90 75 80 90 100 100 100 1 Different sides

Cylinder with Lock

[mm] Bore size Standard stroke Max. manufacturable stroke Stroke range q Stroke range w 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Up to 1000 Ordering Example of Cylinder Assembly 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Up to 1800 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175

MNB

75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 151 to 200 ZZ Bore size (mm) 1 to 50 244 259 289 303 363 383 51 to 100 256 271 301 315 375 395 101 to 150 269 284 314 328 388 408 201 to 300 319 334 364 378 438 458 301 to 400 344 359 389 403 463 483 401 to 500 414 428 488 508 501 to 600 513 533 601 to 700 525 545 701 to 750 32 40 50 63 80 100 231 246 276 290 350 370

MNB

75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 151 to 200 ZZ Bore size (mm) 1 to 50 244 259 289 303 363 383 51 to 100 256 271 301 315 375 395 101 to 150 269 284 314 328 388 408 201 to 300 319 334 364 378 438 458 301 to 400 344 359 389 403 463 483 401 to 500 414 428 488 508 501 to 600 513 533 601 to 700 525 545 701 to 750 32 40 50 63 80 100 231 246 276 290 350 370

ISO Cylinder

Single foot: Cl85WEl lL (With mounting bracket) (W) LT NH LT (XS) 2 x AB Double foot: Cl85WEl lM (With mounting bracket) (W) LT UR 4 x AB NH LT (XL + Stroke) LS + Stroke AV US TR AO [mm] Bore size AB AO AV LS LT NH TRJS14 UR US (W) (XL) (XS) 8 4.5 5 11 70 {76} 3.2 16 25 26 35 12.8 75 {81} 23.8 10 4.5 5 11 70 (75) 3.2 16 25 26 35 12.8 75 (80) 23.8 12 5.5 6 14 80 (82) 4 20 32 33 42 18 88 (

TABLE OF CONTENTS

CONTROL CONDUIT SERIES 70MODEL 75 VALVE NUMBER MAX.

CJ2

Component Parts No. q w e r t y No. u i o !0 !

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 80 75 15 85 75 90 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-A9 75 + 40 90 + 40 15 + 40 75 + 40 80 + 40 85 + 40 "n" pcs. (same surface) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) 1 or 2 pcs.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

90 50 50 16 20 16 210 110 120 75 71 16 6.5 14.5 220 230 75 150 14 120 178 35 16 205 110 60 60 20 25 20 230 140 Max. 157 90 90 Max. 25 8 16 250 270 90 180 16 Max.157 Max. 224 45 20 245 130 70 70 25 Min. 30 Max. 26 275 Max. 157 49 ISO Standards Air Cylinder: Standard Type Double Acting, Single/Double Rod Series C96 32, 40, 50, 63, 80, 100, 125 How to Order C96S B W 32 100 J C96SD B S W 32 100