Basic Type/Direct Mount Type

9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

MY1

Stroke range: 2001 to 3000mm MY1 M W XB11 MY1 M W XC67 Bore size Stroke Auto switch type No. of auto switches Bore size Stroke Auto switch type No. of auto switches Series: Bore size Series: Bore size 10 16 20 25 32 40 50 63 80 100 10 16 20 25 32 40 50 63 80 100 Slide bearing guide type Slide bearing guide type M C M C Cam follower guide type Cam follower guide type Contact SMC for marked

Table of Contents - Tubing

(Example) 10-TFU0425B-2 TFU0425-2-50 (100)-X3 TFU0425-3-50 (100)-X3 TFU0604-2-50 (100)-X3 TFU0604-3-50 (100)-X3 TFU0805-2-50 (100)-X3 TFU0805-3-50 (100)-X3 2 3 2 3 2 3 4 2.5 6 4 8 5 50m or 100m roll B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Transparent), YR (Orange) TUB-12 Clean Tubing: Polyolefin Tubing How to Order Designed to be used for blow-off and washing

JA/JAH/JB/JS

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com JAHF40-16-150 JAHF50-20-150 JAHF63-24-150 JAHF80-30-150 JAHF100-39-150 JAHF100-48-150 40 50 63 80 100 100 16 20 24 30 39 48 1.5 1.5 1.5 1.5 1.5 1.5 75 100 100 125 150 150 76 89 106 131 152 159 50 62 72 82 100 100 18 18 24 38 42 49 50 59.5 66 79 96 96 1.25 2 2 2.5 3 3 15 18

JA/JAH/JB/JS

of sphere R Maximum thread depth P Weight (kg) A B C D T J G H Nominal size Pitch CY Standard: Heavy Load Type Hydraulic: Up to 7 MPa MQQ M JAHF40-16-150 JAHF50-20-150 JAHF63-24-150 JAHF80-30-150 JAHF100-39-150 JAHF100-48-150 40 50 63 80 100 100 16 20 24 30 39 48 1.5 1.5 1.5 1.5 1.5 1.5 75 100 100 125 150 150 76 89 106 131 152 159 50 62 72 82 100 100 18 18 24 38 42 49 50 59.5 66 79 96 96

RHC

9, @0, @2, @3, @4, @5 NBR 32 RHC32-PS @4 O-ring NBR 40 RHC40-PS @5 O-ring Stainless steel for 20, 25 Carbon steel for 32, 40 10-6-10 10 High Power Cylinder Series RHC Construction: 50 to 100 u q !2 i e !0 o w !6 !5 !4 !3 y r t !

SX

(g) n: Stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides.

53

Select the thermo-chiller considering the descriptions. q Upper limit of ambient temperature: Use the product in ambient temperature of the described value or lower at each altitude. w Cooling capacity coefficient: The product's cooling capacity will lower to one that multiplied by the described value at each altitude. HRS HRS 090 HRS 100/150 HRSH 090 HRSH 090 HRSH 2.

17

Maximum Allowable Moment MY1B/M1 MY1B/M2 MY1B/M3 200 300 400 500 40 50 100 30 200 20 50 40 30 100 10 20 40 50 3 4 5 30 10 20 Moment Nm Moment Nm Moment Nm 2 5 4 3 10 1 MY1B40 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B40 MY1B40 0.3 0.4 0.5 MY1B32 1 2 MY1B32 MY1B32 MY1B25 0.2 1 0.5 0.4 0.3 MY1B25 MY1B25 0.1 0.4 0.5 0.2 0.3 0.05 0.04 0.03 0.2 0.1 0.02 0.06 0.1 100 200 300 400 500 1000 1500 100 200 300

HRL

W: 13 [kW] w Derive the heat generation amount from the power supply output.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

9 @2 @0 @1 e w !5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !

Table of Contents

, 110, 200, 220 VAC (50/60 Hz) Allowable voltage fluctuation 10% of rated voltage Metal seal Coil insulation type Class B or equivalent 1 W DC (42 mA), 1.5 W DC (63 mA) (3), 0.5 W DC (21 mA) (4) 24 VDC 1 W DC (83 mA), 1.5 W DC (125 mA) (3), 0.5 W DC (42 mA) (4) 12 VDC 100 VAC Inrush 0.75 VA (7.5 mA), Holding 0.75 VA (7.5 mA) Power consumption (Current) Rubber seal 110 VAC Inrush 0.83 VA (

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

16 16 0.2 0.05 0.1 0.2 0.1 0.05 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Title not found

to 50mm/s) i2 to 100 Heal resislant aulo swilch 16 to 63 Hea\./ duty sctaper 20 to 100 Stalnless steelpiston rod and rod nut 12 10 100 AdjuslaLle stroke exlend 12 to 100 Adjustable slroke retract 1 2 l o 1 0 0 DualsLroke, dual rod 1 2 b 1 m DLralstroke s ngle rod 12 to 100 NPI Porr (1) 32 10 160 32 lo 100 Wilh lrcnr gulde boss (1) 12 to lO0 20 to 10O lnch-sizewrcnch flab 12 to 100 (1) Not

•

K I KA l w LH LS 43 15 M14 x 1.5 15 17 15 27 I 19 85 188 15 I' 27 I Hi 100 188 17 I 34 I 19 106 206 43 15 M14 x 1.S ., 15' 1?

CQS

Thus, it can be used in a Class 100 clean room.

VQ7-6/7-8

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

SMC Electronic Switch Series Variations

F.S. = 100[kPa] 0[kPa] = 100[kPa] 3[%F.S.] = 100[kPa] X 0.03 = 3[kPa] Example: Time Failure predict output 1 ON OFF Time The display error induced by the temperature change can be as much as 3[kPa].

Fluoropolymer Piping Equipment

B L1 W M2 B side Inch Size 6 4 Model A side B side B C1 C2 E1 E2 H1 H2 L1 L2 M1 M2 Min. port size W Applicable tubing O.D.

Cylinder with Lock Series MNB

9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.