42

Note Option mounting diagram Single valve AXT632-25-4 (M4 x 50) 4 Valve 0 Blanking plate (VVQ5000-10A1 5) AXT632-25-8 (M4 x 17) 4 For manifold Blanking plate Valve + Individual SUP spacer (VVQ5000-P1 5 -03 04) q AXT632-25-5 (M4 x 82) 4 For manifold w AXT632-25-10 (M4 x 34) 2 Valve + Individual EXH spacer (VVQ5000-R1 5 03 04) q AXT632-25-5 (M4 x 82) 4 For manifold w AXT632-25-10 (M4 x 34)

Rotary Actuator

Applicable shaft types: S, W CRB1 Y2 = X = X = Y = X = MSU CRJ CRA1 CRA1 CRQ2 Y = Y1 = Y1 = Y2 = [mm] [mm] MSQ [mm] Size Y1 Y2 W Y 30 3 to 8 15 to 25 50 1 to 20 18.5 to 36 63 1 to 22 21 to 41 80 1 to 25 25 to 50 100 1 to 30 32.5 to 60 Size X Y1 Y2 W Y W Y 30 15 to 25 3 to 8 15 to 25 50 18.5 to 36 1 to 20 18.5 to 36 63 21 to 41 1 to 22 21 to 41 80 25 to 50 1 to 25 25 to 50 100 32.5 to 60 1

CLQ

36 40 27 31 M5 x 0.8 M6 x 1.0 47 52 8 10 4.5 5 25.5 28 9.5 10 6.5 7 19 21.5 36 42 39.2 43.2 21.2 23.2 5 to 50 5 to 50 Retraction Locking Rod End Male Thread Bore size (mm) Bore size (mm) VH1 W1 H1 H2 L1 X C1 14 17.5 12 15 20 25 20 25 M8 x 1.25 M10 x 1.25 5 6 18.5 22.5 12 14.5 20.5 23 9-10-14 14 Series CLQ Compact Cylinder with Lock Double Acting, Single Rod Dimensions: 20, 25 Foot style:

CG5-S

Bore size (mm) W P S WA WB WH ZZ 20 30 M5 x 0.8 83 22 16 23 118 25 30 M5 x 0.8 83 22 16 25 123 32 25 1/8 85 22 16 28.5 125 40 20 1/8 93 22 16 33 143 50 20 1/4 109 25 18 40.5 167 63 20 1/4 109 25 18 47.5 167 80 20 3/8 130 30 22 60.5 201 100 20 1/2 131 31 22 71 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS X165US inch rod option dimensional changes S + Stroke H GA GB Width across

Best Pneumatics Vol. 14

245 258 A 25 40 53 70 75 90 95 M 2.3 2.3 2.3 2.3 3.2 3.2 L 40 53 70 70 90 90 K 8.4 8 10.5 10.5 13 13 J 5.4 6.5 8.5 8.5 11 11 H 22 23 26 25 35 35 G 27 40 54 54 66 66 F 30 41 50 50 70 70 E 18 16 17 14 23 23 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 Optional specifications Model With barb fitting B 137 173 177 253 266 Metal bowl B

Modular F.R.L. Unit

40 53 70 70 90 95 C 7 10 14 18 20 24 24 B 67 97 129 165 169 245 258 A 25 40 53 70 75 90 95 M 2.3 2.3 2.3 2.3 3.2 3.2 L 40 53 70 70 90 90 K 8.4 8 10.5 10.5 13 13 J 5.4 6.5 8.5 8.5 11 11 H 22 23 26 25 35 35 G 27 40 54 54 66 66 F 30 41 50 50 70 70 E 18 16 17 14 23 23 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 Optional specifications Model

VXP21/22/23

Series VXP21/22/23 Construction/Principle Parts Material Normally Closed (N.C.) Normally Open (N.O.)

Compact Cylinder

Bore size CDQS JCDQ Weight 29 g 33% weight reduction 23 Weight 43 g 25 12 23 + Stroke 23 25.5 + Stroke 25 24% volume reduction Weight 37 g 35% weight reduction 26.5 Weight 57 g 29 16 24 + Stroke 26 23% volume reduction 25.5 + Stroke 29 Weight 61 g 42% weight reduction 32 Weight 106 g 36 20 40% volume reduction 30 27.5 + Stroke 34 + Stroke 36 Weight 82 g 45% weight reduction 36 Weight 150

Series VQ Metal Seal/Rubber Seal Body Ported

L=12.5 X n+10.5 L dimension 1 2 3 4 5 6 7 8 9 10 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 No. L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

JXCx-OMT0005CN

. 23 5.2 MOTENC . 23 5.3 SII/O . 23 1 . 23 2 . 24 5.4 DeviceNet . 24 6CN1: . 25 6.1 . 25 6.2 . 25 6.3 . 26 1(C24V,M24V,0V) . 26 2(EMG) . 26 3LK RLS . 26 1 - 6.4 . 27 1 . 27 21 . 28 32 . 29 7DeviceNet 30 8LED . 31 8.1 LED . 31 8.2 LED . 31 9 . 32 9.1. . 32 9.2 No. . 32 9.3 / . 32 9.4 . 32 10 . 33 10.1 . 33 11 . 42 11.1 . 42 11.2 . 45 11.3 . 47 12 . 48 12.1 . 48 12.2 .

reduces flow setting time

, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Table of Contents

L dimension L kit: 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. VV5Q13 L 08 N N 1 D L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

CE

70 1.5 5 Width across flats 13 7 5 10 22f8 10f7 6 53 35.6 23 36 23 SR6 40 18 3 23 M8 x 1.25 70 36 18 7 2-M5 x 0.8 (Port size) 4-M5 x 0.8 Thread depth 10 74 20 114 + Stroke 31 145 + Stroke 2 10-12-14 14 High Precision Stroke Reading Cylinder Non-rotating Piston Type Series CEP1 Foot style: 4-5.5 CEP1L20 Stroke (Positioning pin hole) 40 6 13.5 25 6 +0.05 +0.02 4 RE A B REC 68 85 CX CY MQQ

CL

CLS CLQ Bore (mm) Z Y ZZ M8 x 1.25 PH P PG PL S PW X 21 N NA LZ MM NN K LH LC LD LS LX LT 55 1/8 1/8 1/8 1/4 M20 x 1.5 196 8 20 38 127 20 22 19.5 3.2 40 167 6.8 24 15 4 25 5 20 MLGP M26 x 1.5 M10 x 1.25 210 8 25 20 41 137 24 27 24 55 3.2 40 177 6.8 30 15 4 28 5.5 25 M26 x 1.5 M10 x 1.25 212 8 25 20 41 139 24 27 24 55 3.2 40 179 6.8 34.5 15 4 28 5.5 32 RLQ M32 x 2 M14 x 1.5 250 10 27 23 41

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 8.5 11 12 15 18 23 28 23 23 30 30 42 42 50 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 8-25-24

LEF-OM002xx

Please refer to basic parameter on page 25 for changing of Origin offset. Initial input value: Origin offset=0.

Auto Switch Guide

(Red Green Red) D-B59W D-A79W D-A59W D-H7NW/H7PW/H7BW D-G59W/G5PW/K59W D-F79W/F7PW/J79W D-F7NWV/F7BWV D-F59W/F5PW/J59W D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV D-Y7NW/Y7PW/Y7BW Band Grommet 10-20-23 Solid state switch Reed switch Rail Grommet 10-20-24 Tie-rod Grommet 10-20-25 2-color indication 10-20-42 Band Grommet RE A B 10-20-43 10-20-44 Rail Grommet REC 10-20-45 Tie-rod Grommet 10-20-46

Auto Switch Guide

(Red Green Red) D-B59W D-A79W D-A59W D-H7NW/H7PW/H7BW D-G59W/G5PW/K59W D-F79W/F7PW/J79W D-F7NWV/F7BWV D-F59W/F5PW/J59W D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV D-Y7NW/Y7PW/Y7BW Band Grommet 9-15-23 Solid state switch Reed switch Rail Grommet 9-15-24 Tie-rod Grommet 9-15-25 2-color indication 9-15-42 Band Grommet CL 9-15-43 9-15-44 Rail Grommet CL1 9-15-45 Tie-rod Grommet 9-15-46 MLGC 9-15-47

MHZ

0.7 MPa 16 to 25: 0.25 to 0.7 MPa 10 to 60C 0.01 mm 180 c.p.m.