Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

A B 54 MXY6 34 59 5 MXY8 MX 39 67 MXY12 MTS 47 MY Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Lead wire entries inside (mm) B B CY Model Mounting Switch operating range A B A B A B 50 MXY6 2 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 38 55 MXY8 2.5 CX

Series AP500

(66.5) 40 0.28 20 0.14 0 0.00 0.69 (17.5) 0 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) A AP1200FC Inlet pressure:150 psig (1.0 MPa) 3/4 inch connections ) B 80 0.55 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) 0.88 (22.4) 70 0.48 Connections A B Delivery pressure (MPa) Delivery pressure (psig) inch (mm) inch (mm) 60 0.41 3.70 4.00 3.46 (94.0) (101.6) (87.9) FV4 MV4 TW4

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

C D Side support B MY-SB 2-J 2-H C D A B (mm) A B C 15 25 35 45 E F G D H J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 Applicable bore size MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16 MY-S20 MY-S25 MY-S32 61 67 81 100 120 142 172 26 38 50 64 4.9 6.4 8 11.7 3 4 5 6 6.5 8 9.5 11 3.4 4.5 5.5 6.6 A B A B A B A B 71.6 79.6 95 118 142 164 202 80 14.8 8.5 14 9 A B 55 MY-S40 M10 x 1.5 A

SQ1000/2000

B SOL. B SOL. B SOL.

SYJ3000/5000/7000

port) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 1 (Pitch) P = 12.5 19.5 5 B B 15 1 A A 5 B B 15 20 A A L1 L2 4 Manual override + + + + 10 10 3.2 63.3 [65.5] 15.3 32 111.5 [115.9] 17 7.5 (4.4) 12.5 1 98.6[103] 16 A A A A A A R P R P 31.2 31.5 64.1 [66.3] 36.5 B B B B B B 65.3 17 50.5 70.3 2-4.5 (For mounting) + + + + + + Triangle mark 1/8 (P, R port) (Pitch) P = 12.5 18.5

0.4

(L4) (L3) (5.25) L2 L1 Top entry port Not machined 27 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

Compact Electric Actuator Series LG1

Description Body cover Bearing cap Damper End cover A End cover B Photomicrosensor Sensor plate Connector A Connector B No.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

67 81 100 120 142 172 26 38 50 64 4.9 6.4 8 11.7 3 4 5 6 6.5 8 9.5 11 3.4 4.5 5.5 6.6 A B A B A B A B 71.6 79.6 95 118 142 164 202 80 14.8 8.5 14 9 A B 55 MY-S40 M10 x 1.5 A B 100 18.3 10.5 17.5 11.5 70 M12 x 1.75 MY-S63 Guide for Side Support Application For long stroke operation, the cylinder tube may be deflected depending on its own weight and the load weight.

VQ7-6/7-8

SMC SMC SMC 23 20 B A VZ 9 PA A B VF B A VFR PA A B VP4 L1 L2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B A A PA VZS A B SMC VFS PA A VS4 B VQ7 PA A L side R side (2n-1/8) EVS 38 D side VFN 3 68.5 (A, B port) 4n-1/4, 3/8 16 120.5 (Single) 44 155 (3 position)

VQZ1000/2000/3000

3 position pressure center Note) (A) 4 (B) 2 5 B C A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.

5 Port Solenoid Valve SY Series

4/25/3 (A/BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 1, 5, 3 4, 2 (A, B) 1, 5, 3 4, 2 (A, B) DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 129 175 (sbar) ) (sbar) ) Single Single 2 position 125 167 2 position 0.23

AC Servo Motor Driver (CC-Link Type)

C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Point table No.1 Initial value Recommended value Home position return acceleration time constant (msec) *5 0 600 300 150 600 300 150 1000 500 250 800 400 200 Different from the initial value. *5.

100

/set 14 ZL1 Series Dimensions ZL112A(N)(-B) Valve (Without supply valve or release valve) 2 x 5.3 Mounting hole ( ) Recommended tightening torque: 1.2 to 1.5 Nm 53.2 114 Vacuum (V) port Applicable tubing O.D. B Air pressure supply (P) port Applicable tubing O.D.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Clean series 10 11 Relief type Vacuum suction type 10 C D B M 2 B 20 100 H N M9BW C 21 C D B M 2 B 20 100 H N M9BW C Nil Built-in magnet Number of auto switches Cylinder stroke (mm) No Nil S n 2 pcs. 1 pc. "n" pcs.

Precision Regulator

Flow Rate Characteristics Relief Characteristics Pressure Characteristics Testing methods conform to JIS B 8372.

AZ1000

(ASME B40.1 Grade B or better) psig/bar 4) (No code) Accuracy Cleanliness No oil ASME B40.1 level IV No oil Brass Polycarbonate Brass Phosphor bronze B Case Window Socket Bourdon tube Material MPa MPA 1.14 (29) 2.28 (58) 2.1 (53.5) 2.12 (54) NPT 1/4 0.42 (10.5) inch (mm) 3) Part number of pressure gauge itself.

LEY-OM007

b. c.

Slider Type/Ball Bushing Bearing

B 4 x Counterbore depth.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGF 2.5(0.5) 7.5 5.5(3.5) 10.5

OMU0023

AREA A position 2 The AREA signal is output commonly for the ranges set for both the AREA A and AREA B. AREA B Set as AREA 1 AREA 2. position 1 AREA B position 2 48 - Data (Saved data) Data is sent as hexadecimal numbers.