CL

Bore e f 1 to 50 68 72 72 77 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 185 185 190 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 301 to 400 100 100 100 100 401 to 500 125 125 125 1 to 50 12.5 12.5 12.5 12.5 20 25 32 40 68 72 72 77 35 35 35

Air Fittings & Tubing

F (mm) Port B min. port size Weight (g) L2 L3 L4 L5 L6 P Q1 Q2 M L1 89 110 99 125 108 139 40 KM12-04-02-6 6 17 65 72 81 91 97 112 1 4 10 18 29.5 19.5 29 10.6 16 6 12 4 61.5 KM12-04-02-10 10 KM12-06-02-6 6 KM12-06-02-10 10 KM12-08-03-6 6 KM12-08-03-10 10 47 1 4 17 10 19.5 31.5 21.5 31 13 17 7.5 13.5 6 73 55 3 8 19 11.5 22.5 35.5 24 34.5 15.5 18.5 9 14.7 8 86 SKM, #7 to #12 KM13 Tube O.D.

VFR

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% System Components Solenoid valve System Silencer Speed controller SPG (Steel pipe) dia. x Length 10A x 1 m Series VFR4000 Rc 3/8 Series VFR4000 Rc 3/8 AS4000-03 (S = 21 mm2) AN300-03 (S = 60 mm2) A AS420-03 (S = 73 mm2) 10A x 1 m AN300-03 (S = 60 mm2) B 15A x 1 m Series VFR4000 Rc 1/2 AN400-04 (S = 90 mm2) AS420-04 (S = 97 mm2) C

VFS

side Direct manual override D side Pilot valve manual override 2n-Rc , 1 2 3 4 R 1 1 2 Stations 250 250 D side U side Exhaust cleaner (Option) D side mounting U side mounting 4-Rc 1 8 n: Stations 2-Rc 3 4 Stations L L1 L2 Formula L1 = 51 x n + 92 L2 = 51 x n + 110 2 194 212 3 245 263 4 296 314 5 347 365 6 398 416 7 449 467 8 500 518 9 551 569 10 602 620 ( ): 2(B)/4(A) port Rc 3/4 3-8-96 97

Table of Contents

VQ1000 (VV5Q17)-Plug Lead Unit, Cassette Type (F, P, T, S kit) . 3 3 4 9 10 10 11 12 12 14 16 18 20 22 28 30 32 32 33 34 34 35 36 61 62 64 65 67 68 70 36 37 38 38 40 44 48 52 56 74 74 75 76 76 78 80 82 84 86 89 92 94 96 97 100 104 104 106 108 110 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-

KJ

(inch) H (Width across flats) Mounting plate thickness 11 mm or less Connection thread Min. port size Connection thread UNF L Mounting hole Weight (g) M Model 2-Applicable tubing KQ2E01-00 KQ2E03-00 KQ2E05-00 KQ2E07-00 KQ2E09-00 KQ2E11-00 KQ2E13-00 1 8 1 2 17.46 32.5 32.5 34 34.5 38 42.5 44.5 13.5 13.5 15 15 20 23 26 26 26 33 33 52 70 97 15.5 16 16.5 17 18.5 21 22 2.5 3 3.5 4.6 6 7 9.6 -20

Rubber seal 5 Port Solenoid Valve Series SYJ5000

A A A A 5.5 37.5 69.5 [71.7] 70.1 [72.3] 35 51 Max. 13.5 B B B B B 68.8 + + + + + 1/8 (P, R port) 4-5.5 (For mounting) Triangle mark (Pitch) P = 17.5 21 (Station 1) (Station n) (Light/surge voltage suppressor) 52.6 [59.6] 7.8 29.1 24 28.5 Applicable connector: 26 pins With strain relief (Conforming to MIL-C-83503) Station n L1 L2 Station 3 77 62 Station 12 234.5 219.5 4 94.5 79.5 5 112 97

Rubber seal 5 Port Solenoid Valve Series SYJ7000

108 L/M plug connector 86 100 DIN terminal 107 142 Grommet Cv C [dm 3/(sbar)] Cv C [dm 3/(sbar)] b b Single 85 98 0.63 0.58 0.36 0.34 2.2 2.4 2 position Double 1/8 1/8 0.49 0.45 0.34 0.37 0.50 0.35 1.8 1.2 3.0 [0.83] 2.0 3.0 [1.3] 1.8 Closed center SYJ720--01 0.35[0.52] 0.37 0.73 [0.39] 0.45 Exhaust center 118 110 152 108 3 position 0.37 [0.50] 0.78 [0.25] Pressure center Single 101 119 97

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

6.3 5 2.1 2-M4 x 0.7 (through) M4 x 0.7 x 14.5l and M4 x 0.7 (hexagon bolt) (hexagon nut) 7.5 2-M3 x 0.5 (through) 20 (Z) 4-M3 x 0.5 thread depth 4.5 (same on reverse side) 4-M5 x 0.8 thread depth 4.5 (piping port) (same on reverse side) 7 3 8.5 30 8 Model S ZZ Z SS CXS10-10-XB19 10 82 65 CXS10-15-XB19 15 87 70 30 (20) (Z) 2-M4 x 0.7 Thread depth 7 CXS10-20-XB19 20 92 75 CXS10-25-XB19 25 97

Air Cylinder NCJP Series Pin Cylinder

D-97.D-93A (|& @D D-93A il ! @ D-90 : lnch D-97 Caution. 1) The abovo dimensions may vary in areas whre magnetic Inlerlerence is present. 2) Fo. 14 stroke cylinder, only one aulo switch may be mounted eithgr on the rod end or the cap end. 3) There are two ways to mounl lhe auto swilches as shown in the above ligure.

AC Servo Motor Driver (SSCNET /H Type)

Setting value of [Pr.97] SSCNET setting Driver Setting value of [Pr.100] Servo series 0 SSCNET LECSS-S 1MR-J3-B 1 SSCNET/H LECSS2-T 32MR-J4-B Pr.100 Servo series Be sure to set up servo driver. Communication with servo driver is not started by the initial value 0 in default value.

OMR0032

Controller and Peripheral Devices Specific Precautions 94 17.1 Design and selection . 94 17.2 Handling Precautions . 94 17.3 Installation . 96 17.4 Power supply . 96 17.5 Grounding . 96 4 - 17.6 Wiring . 97 17.7 Operating environment . 97 17.8 Maintenance . 98 18.

Model Selection 1

Reducing insert bushing Reducing type 17-5-92 21 Series LQ 1 2, LVN, TL/TIL High Purity Fluoropolymer Fittings/Needle Valve/Tubing Series LQ1 Variations P. 17-5-97 Port size Tubing O.D.

VXD21/22/23

97 62 64 64 160 170 180 135 140 155 67.5 70 77.5 168 (185) 182 (197) 194 (209) 51.5 54.5 59 100 105 120 36 42 53 23 25.5 25.5 35 40 40 12 14 14 41.5 44.5 44.5 ( ): N.O. 17-3-41

Series VQ Metal Seal/Rubber Seal Body Ported

Ambient and fluid temperature Effective area (Cv) Max. operating frequency (1) Note 1) As per JISB83751981 (Supply pressure: 0.5MPa) Dimensions Single unit Manifold Dimensions Equation L1=11n+20 n: Station (Max. 24 stations) n L 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 L1 L2 L3 31 50 60.5 86 112.5 123 108 125 135.5 119 137.5 148 141 162.5 173 97 125 135.5 130 150 160.5 152 175 185.5 53 75 85.5

The compact design of series NCJP double acting pin cylinder minimizes mounting space. The NCJP is available in five mounting options to accommodate many design styles. Bore sizes include 6, 10 and 15mm with strokes ranging from 5 to 30mm. Other features include brass panel mounting nuts, stainless steel piston rod and brass bodies. The NCJP series is also available in an auto switch capable

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 4.41 LPM , 4.41 LPM, Max Pressure: 1.4 PSIG / 97 mbar , 1.4 PSIG / 97 mbar, Max Vacuum: 7.4 in HgV / -250 mbar , 7.4 in HgV / -250 mbar, Voltage (DC): 12, DC Motor Type: Standard, Item Dimensions: Length: 3.07 in / 78 mm Width: 1.02 in / 26 mm Height: 1.14 in / 29 mm , Length: 3.07

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 3.5 LPM , 3.5 LPM, Max Pressure: 1.4 PSIG / 97 mbar , 1.4 PSIG / 97 mbar, Max Vacuum: 9.2 in HgV / -310 mbar , 9.2 in HgV / -310 mbar, Voltage (DC): 12, DC Motor Type: Standard, Item Dimensions: Length: 2.17 in / 55 mm Width: 1.02 in / 26 mm Height: 1.14 in / 29 mm , Length: 2.17

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 3.6 LPM , 3.6 LPM, Max Pressure: 1.4 PSIG / 97 mbar , 1.4 PSIG / 97 mbar, Max Vacuum: 5.6 in HgV / -190 mbar , 5.6 in HgV / -190 mbar, Voltage (DC): 24, DC Motor Type: Standard, Item Dimensions: Length: 2.17 in / 55 mm Width: 1.02 in / 26 mm Height: 1.14 in / 29 mm , Length: 2.17

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 1.4 LPM , 1.4 LPM, Max Pressure: 1.4 PSIG / 97 mbar , 1.4 PSIG / 97 mbar, Max Vacuum: 8.6 in HgV / -290 mbar , 8.6 in HgV / -290 mbar, Voltage (DC): 12, DC Motor Type: Standard, Item Dimensions: Length: 2.17 in / 55 mm Width: 1.02 in / 26 mm Height: 1.14 in / 29 mm , Length: 2.17