q"s

@-@En-@ rvoo!@-@En-m a Reverse type Flaled pressure E =*E = o a DeviceNet comoliant Note 1) E in part number is the same model no tor lhs slandard products. Note 2)The pressue is not indicated. 0.005lVPa 0 ; 100 Inpul sisnal (o/"F.S.) Inpuuoulpul characterlatlce chan Note 1) ! in parl number is the same modelnofor the standard products. Note 2) Except for presel input type.

-fl Seies

EXH block di6c Blank plate: WFS40O0-1OA EXH Relocation spacer lnterface sped control wl-En disassembling valve for maintenance purposes or when spare manifold stations are required, install Blank plate on the manifold block. %% % % Needle valve on the manifold block can controlcylinder speed by ihrottling exhaust.

Vacuum

lUnstady AdsorPtion lNon lAdsotDti,on pressure. 27 tux senies I Ejector Type Use Manitold/Standard Combination Common O: Fitting Installatlon a: Plugged l\: Open toAlmosphere ' When using PV direct SUP, combining common SUP slations requires dummy spacers 1,ts indiceles port lo port @mmon connctions. ' lr emal Yacuum gonaration When using individual air supply (or combination) Manifold En

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N7 (1/4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N7 (1/4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: M (SI Unit Only)

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: 1/4, Output Specification: Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V, Lead Wire: w/o Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/Flow Adjustment Valve, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: L (No Flow Adjustment Valve, Rear Ported), Port Size: N7 (1/4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: T (Panel Mount Adapter, w/o Flow Adjustment Valve)

Body Size: 60, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: N (NPT), Port Size: 10 (1), Normally Open, Closed: D (N.O., Normally Open, Protocol: EN [EtherNet/IPâ„¢, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: E (Push-turn Locking Type, Manual), Made to Order Option: X102 (Hub and Relief Valve only)

Body Size: 30, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: N (NPT), Port Size: 02 (1/4), Normally Open, Closed: D (N.O., Normally Open, Protocol: EN [EtherNet/IPâ„¢, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: E (Push-turn Locking Type, Manual)

Body Size: 60, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: D (N.O., Normally Open, Protocol: EN [EtherNet/IPâ„¢, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: E (Push-turn Locking Type, Manual), Made to Order Option

Type: S (Wired), Protocol: EN (EtherNet/IPâ„¢), Output Polarity: 7 (PNP, -Com; EtherNet/IPâ„¢, IO-Link Unit)

Model: 5 (VP500), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: YZ (EN 175301-803C terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: M (M12 connector, made by OMRON), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: S (Single), Soft Start-up: S (with

Body Size: 40, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: F (G), Port Size: 03 (3/8), Normally Open, Closed: C (N.C., Normally Closed), Protocol: EN [EtherNet/IPâ„¢, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: G (Non-locking Push Type), Made to Order Option: X102 (Hub and Relief Valve only)

Body Size: 40, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: C (N.C., Normally Closed), Protocol: EN [EtherNet/IPâ„¢, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: G (Non-locking Push Type), Made to Order Option: X102

Body Size: 40, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: N (NPT), Port Size: 03 (3/8), Normally Open, Closed: D (N.O., Normally Open, Protocol: EN [EtherNet/IPâ„¢, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: M (EXA1/ITV: SI Unit Only), Manual Override: E (Push-turn Locking Type, Manual)

Body Size: 40, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: D (N.O., Normally Open, Protocol: EN [EtherNet/IPâ„¢, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: M (EXA1/ITV: SI Unit Only), Manual Override: E (Push-turn Locking Type, Manual)

Body Size: 30, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: F (G), Port Size: 03 (3/8), Normally Open, Closed: C (N.C., Normally Closed), Protocol: EN [EtherNet/IPâ„¢, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: E (Push-turn Locking Type, Manual)

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

pin hole Positioning pin hole 5 5 Adjustment bolt A d nd Adjustment bolt A (For counterclockwise rotation end adjustment) Adjustment bolt B (For clockwise rotation end adjustment) (For counterclockwise rotation end adjustment) n n e e 5 22 n . 2 atio io .5 2 Adjustment bolt B at ot ot (For clockwise rotation end adjustment) 5 5 r r 9 se 9 e e is e wi g w g n n k k ra oc c a o t r cl cl en

MY1

Height 27mm ew w 27 40 High precision guide type MY1H10 Basic type MY1B10 30 Strok can be 20 10 00 The stroke adjusting unit (H unit) does not protrude above the table height. en when equipped h a floating cket, the height is y 28.5mm. 10 28.5 Centr type (s 20 New ries variations ries variations Air cushion Floating bracket Stroke adjusting unit Bore size (mm) Side support 10

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Varistor Varistor 1(+, ) 3(+, ) DIN (EN 175301-803) Terminal SOL. SOL. This DIN terminal corresponds to the Form C DIN connector with an 8 mm terminal pitch. This DIN terminal corresponds to the Form A DIN connector with an 18 mm terminal pitch. 2(, +) 4(, +) 18 Light 8 With light/surge voltage suppressor With surge voltage suppressor 2.