SMC offers a variety of digital flow switches. Series PF2A for air, PF2W for water, PF2D for deionized water and chemicals. Flow rate setting and monitoring are possible with the digital display. Integrated and remote type displays are available for different types of application. Water resistant construction is used conforming to IP65 protection. Switching from real-time flow rate to accumulated

SZ3000

L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations L1 L2 L3 L4 L1 L2 L3 L4 98 87.5 70 14 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12 148 137.5 122.5 13 160.5 150 133 14 173 162.5 143.5 15 185.5 175 154 16 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93 1 5 Port Pilot Operated Solenoid Valve Rubber Seal Series VF1000/3000/5000 VK VZ Large flow capacity Yet compact size.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

L4 L1 L2 L3 L4 L n 12 260.5 250 229 16 L n 12 273 262.5 239.5 17 10 235.5 225 208 14 11 248 237.5 218.5 15 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5 300 281.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4 33 3 Station table entries In the case

SZ3000

L4 L1 L2 L3 L4 L n 9 223 212.5 197.5 13 L n 9 235.5 225 208 14 10 235.5 225 208 14 11 248 237.5 218.5 15 12 260.5 250 229 16 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 12 273 262.5 239.5 17 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5 300 281.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[mm] L3 [mm] L3 [mm] L3 [mm] 600 600 L3 25A1000 1000 Z 400 400 500 500 LEC 200 200 0 0 0 0 LEC S 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [kg] Work load [kg] LEC SS-T 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same

Environment

[mm] L3 [mm] L3 [mm] L3 [mm] 600 600 L3 25A1000 1000 Z 400 400 500 500 LEC 200 200 0 0 0 0 LEC S 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [kg] Work load [kg] LEC SS-T 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same

Series KV2 Fittings

Mounting hole dimensions differ for 5/8: ID-6.3, OD=12.0 Male Double Y KV2UD_ _-_ _S P Applicable Tube (x4) M L2 D1 L1 A 4.2 Hex 8 Thread L3 Q D2 D3 L3 L2 M Min. Flow Dia. A* App.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Fittings & Tubing Air Cylinders Rotary Actuators L4 L3 L2 L1 47.8 P=17.5 28.8 5 Indicator light SI unit 58.1 Manual override PWR. L RUN SERIAL UNIT L ERR.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

L1 210.5 223 235.5 235.5 248 260.5 273 285.5 298 310.5 (7.5) (DIN rail dimension) L2 200 212.5 225 225 237.5 250 262.5 275 287.5 300 L3 180.5 191 201.5 212 222.5 233 243.5 254 264.5 275 L4 15 16 17 11.5 12.5 13.5 14.5 15.5 16.5 17.5 Manual override In case of locking type, ( turn after pushing in ) 4-One-touch fitting (ports P, R) Applicable tube O.D.: 8 (L4) L3 8 U side D side 52.9 <53.6

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

on the type of L3 = 30 3 to 6 L2+3 Y 5 20 7 to 13 5 to 20 3 to 5 X 3.5 L1+2 machining required.

Table of Contents

on the type of L3 = 30 3 to 6 L2+3 Y 5 20 7 to 13 5 to 20 3 to 5 X 3.5 L1+2 machining required.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

on the type of L3 = 30 3 to 6 L2+3 Y 5 20 7 to 13 5 to 20 3 to 5 X 3.5 L1+2 machining required.

5 Port Solenoid Valve, Series VQC

supply) 7 7 3 3 3 5 7 8 Shield Blue: 0V (input and control power supply) 4 6 Black: 24VDC 10% (input and control power supply) 4 5 6 6 5 4 Gray: PE 4 3 8 Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Connections Connections 7 Base-Mounted Type Plug-in Unit Series VQC1000/2000 1in = 25.4mm VV5QC11 S Kit (Serial Transmission Kit: EX500) (L3

VQC

solenoid valve power supply) 7 7 3 3 3 5 7 8 Shield Blue: 0V (input and control power supply) 4 6 8 Black: 24VDC 10% (input and control power supply) 4 5 6 6 5 4 Gray: PE 4 3 Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Connections Connections 7 VQC1000/2000 Base-Mounted Type Plug-in Unit VV5QC11 S Kit (Serial Transmission Kit: EX500) (L3

Air Fittings & Tubing

(mm) Thread R(PT) L1 D1 D2 L2 L3 M Part No.

VFR

(MP) L3 (AP) Formula L1 = 28 x n + 47 L2 = 28 x n + 56 L3 = 28 x n + 194 L3 = 28 x n + 235.5 3 131 140 278 319.5 4 159 168 306 347.5 5 187 196 334 375.5 6 215 224 362 403.5 7 243 252 390 431.5 8 271 280 418 459.5 9 299 308 446 487.5 10 327 336 474 515.5 6-Rc 1/4 (P , EA, EB port) 3-5-26 27 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR2000 Plug-in type/Non

VQZ1000/2000/3000

L4 2-7-21 Body Ported 22 22 Series VQZ1000/2000/3000 Dimensions: VQZ3000 (35) VV5QZ32Stations C Grommet (G) 2n-C6, C8, C10, 02 35.5 (12) (5.5) C8: One-touch fitting for 8 C6: One-touch fitting 6 (7.5) 26 (4) 44.5 mounting hole C10: One-touch fitting for 10 02: Rc 1/4 DIN rail clamp screw n Manual override 5 A 2 4 SMC SMC SMC B 4 A (L4) (L3) 2 L2 L1 3 SMC B 4 A 2 2 SMC SMC P = 19 B 4 A 2

Speed Controller with One-touch Fitting

1) Reference dimensions Note 2) Reference dimensions of threads after installation 559 AS Series For R, NPT thread Dimensions/ Elbow type Seal method: Sealant For R, NPT thread D3 Applicable tubing O.D. d D1 A L4 L3 M T L1 H (Width across flats) L2 Metric Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS221F-01-23(S)A 3.2 7.2 12 19.1

Modular F.R.L. Unit

75 L3 57 74 74 95 L3 57 74 74 95 L1 41.5 55 55 72.5 L2 43 57 57 75 L4 43 57 57 75 L1 41.5 55 55 72.5 AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 KSV KTV KSTV ST SV STV TV L2 61 76 76 99 Attachment Model L1 41.5 55 55 72.5 L2 43 57 57 75 L3 57 74 74 95 L4 43 57 57 75 L1 41.5 55 55 72.5 L2 61 76 76 99 L3 43 57 57 75 L4 43 57 57 75 L1 41.5 55 55 72.5 L3 57 74 74 95 L4