Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

D-G

ASR

ASF Pressure Valve: Series ASR Dual Speed Controller: Series ASD Knob Knob F C Knob A Knob G 15-16-7 8 Series ASR/ASQ Construction Pressure Valve: Series ASR Variable type Fixed type @1 @2 @5 @4 @3 @1 @2 @5 @4 @3 ASR430F-02 type ASR530F-03 type ASR630F-04 type ASR430F-02 type ASR530F-03 type ASR630F-04 type u o !3 u o !3 !8 !9 !7 !8 !9 !7 w w q @0 e q @0 e !4 i y !0 !1 !2 !4 i !5 !

SYJ3000/5000/7000

exhaust side (mm2) S at P1 = 0.7 MPa, P2 = 0.5 MPa Effective area at supply side (mm2) S at P1 = 0.7 MPa, P2 = 0.5 MPa Note 3) 5.1 1.9 PA 5.8 2.1 PB Note 3) 12.6 4.5 AEA 12.6 4.5 BEB 1-5-80

VCC

For 3 port (2 stations, one-piece type) 254 g For gate valve 300 g For 2 port 409 g End plate For 3 port 495 g For 2/3 port mixed mounting 452 g 24 g 6 25 g 8 VCKH 33 g 10 36 g 12 25 g 6 26 g 8 VCKK Fittings 32 g 10 37 g 12 29 g 6 30 g 8 VCKL 37 g 10 41 g 12 648 Valve for Water and Chemical Base Fluids VCC Series Dimensions Mounting hole dimensions (When valve is built in to the device.)

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

1 1 1 G Normally Closed (N.C.)

ZP

M8 x 1.25 F 04 4 06 6 08 8 M Width across flats H Model A B C 2 D E F G H J Vacuum inlet direction q Pad dia.

Digital Flow Switches, Series PF2A, Series PF2W

Pin description PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc

Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

, 3 position and 4 position solenoid valves can be used at all of the manifold stations.

Flow Control Equipment

AS43l1F-04 R(PT)1/2 Note 1) Only elbow style.

Series VQ Base Mounted Metal Seal/Rubber Seal

The electrical entry port {VQ1000: G(PF)1/2, VQ2000: G(PF)3/4} permits connection of conduit fittings. Max. 24 stations. Enclosure: dust-resistant/jetproof type (IP65) available.

•

Flal with rib (mm) (mm) Model M ,8 C D E F G H I Flat Flat with rib " . y Y Model 8 D E F H I C G >'A ,. " Flat F)at '!jilh ~ .

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Effective energizing time is over 62 ms at 24 VDC.)

CYP

x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8m/s] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Guide central axis

CYPSeries

x (L + B) x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8m/s] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Guide central axis

CYPSeries

x (L + B) x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8m/s] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Guide central axis

air-filter-e

20C, 0.125 MPa at 80C Pressure resistance Resistivity recovery Note 2) 60 min at 10 L/m 100 L/4000 cm2 Pure water cleaning Others Note 1) Filtration accuracy: tested with ultrapure water, flow rate at P = 0.01 MPa.

Air Preparation Equipment

20C, 0.125 MPa at 80C Pressure resistance Resistivity recovery Note 2) 60 min at 10 L/m 100 L/4000 cm2 Pure water cleaning Others Note 1) Filtration accuracy: tested with ultrapure water, flow rate at P = 0.01 MPa.

REA/REB

AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

REA/REB

MQQ M Table (1) Recommended Speed Controller Bore size (mm) Model Elbow type RHC Straight type In-line type MK(2) AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1001F-04-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.