Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N1 (NPT1/8), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N1 (NPT1/8), Output Specification: L4 (Out 1: IO-Link or NPN/PNP, Out 2: Analog 4 to 20 mA), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N1 (NPT1/8), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

Stations: 07 Stations, Port Size: N1 (w/ø1/8" One-touch Fitting), SI Unit: 0 (w/o SI Unit), End Plate Type: None, SI Unit Common: + COM (or None in the Case of w/o S/I Unit), I/O Unit Stations: None, Option 1: BD (B+D), DIN Rail Length: None, Option 2: S (Built-in Silencer, Direct Exhaust)

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Metal seal Rubber seal (1) Without (1) (1) With Function (1) With (w/o light) Symbol Specification DC (1.0W) AC Note 1) DIN style is applicable to VQ2000, 3000.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

connecter G L LO M MO Y YO YZ YOS (1) Standard (1) High pressure (Metal seal only) (1) (1.0W) K (1) Model Sub-plate part No. (1) (0.5W) Y Low wattage (2) (1) VQZ100-S-01(R) VQZ100 (1.0W) (3) L Latching (2) 01[Rc1/8] 02[Rc1/4] 02 [Rc1/4] 03 [Rc3/8] VQZ200-SVQZ200 Note 1) Option Note 2) When specifying more than one option, please indicate them alphabetically.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

(Inch) N1 N3 N7 N9 N11 M5 02 Symbol M5 thread 1/8" 5/32" 1/4" 5/16" 3/8" thread 1 4 Pressure Specifications VQZ100 2(A) port (2) VQZ100 VQZ200/300 Series VQZ200 Metal seal VQZ300 0.1 to 0.7 MPa (1) External pilot pressure range Note) Metric size of One-touch fittings (C) are also available.

LMU100/200 Series Mist Spray Unit

gauge 10 G46-10-01 1 Pressure gauge 11 G46-4-01-L 1 Pilot valve 12 81022P 1 O-ring 13 NBR KA00078 1 O-ring 14 FKM KA00099 2 Regulator 15 INA-13-717 1 VO307KG1-X328 1 2 5 1 2 5 VO315-00 G Solenoid valve 16 1 Solenoid valve 17 1 O-ring 18 NBR 4 KA00087 1065 A LMU100/200 Series Related Products Mixing Valve: LMV Series Specifications Inlet air pressure Ambient and fluid temperature 0.3 MPa

D-F6N/D-F6P/D-F6B

Auto switch 1 Auto switch 1 Blue Blue Brown Brown Auto switch 2 Auto switch 2 Blue Blue Load voltage at ON = Power supply voltage Residual voltage x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Example: Load impedance is 3 k. Leakage current from auto switch is 1 mA.

Stations: 8 Stations, Port Size: N1 (1/8" One-touch Fitting), SI Unit: QN (Device Net, -COM), Number of Input Blocks: 1 (Input Block 1 pc.), Input Block: 1 (M12, 2 Inputs), Input Block COM: PNP(+) or w/o SI/Input Block, Option 1: D0 (DIN Rail Mount w/o DIN Rail), Option 2: S (Built-in Silencer, Direct Exhaust), US Option: X160US (Preferred US Option)

Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: Q (M12-M12 lead wire with connector (3 m/5 core)), Unit Specification: M (SI units only), Bracket: S (Bracket (mounting position: Stream side))

Stations: 5 Stations, Port Size: N1 (1/8" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: D Side, Cable Length: 1 (1.5m Cable 25 Pin), Option 1: DN (DIN Rail Mount & Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 6 Stations, Port Size: N1 (1/8" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: D Side, Cable Length: 1 (1.5m Cable 25 Pin), Option 1: D (DIN Rail Mounting), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 8 Stations, Port Size: N1 (1/8" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: D Side, Cable Length: 1 (1.5m Cable 25 Pin), Option 1: DN (DIN Rail Mount & Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 12 Stations, Cylinder Port Size: N1 (One-touch Fitting for 1/8"), P, R Port Size: N7 (One-touch Fitting for 1/4"), Kit: SD0 (w/o Serial Unit), SI Unit COM.: +COM. (or w/o SI Unit), Option 1: None, Option 2: S (Built-in Silencer)

Stations: 8 Stations, Cylinder Port Size: N1 (One-touch Fitting for 1/8"), P, R Port Size: N7 (One-touch Fitting for 1/4"), Kit: FD1 (D-sub Connector, 25P, w/1.5m Cable), Option 1: B [Back Pressure Check Valve (All Stations)], Option 2: S (Built-in Silencer)

Stations: 10 Stations, Cylinder Port Size: N1 (One-touch Fitting for 1/8"), P, R Port Size: N7 (One-touch Fitting for 1/4"), Kit: FD1 (D-sub Connector, 25P, w/1.5m Cable), Option 1: B [Back Pressure Check Valve (All Stations)], Option 2: S (Built-in Silencer)

Stations: 6 Stations, Cylinder Port Size: N1 (1/8" One-touch Fitting), P, R Port Size: N7 (1/4" One-touch Fitting), Kit: FD1 (D-sub Connector, 25P, w/1.5m Cable), Option 1: None, Option 2: S (Built-in Silencer)

Stations: 3 Stations, Port Size: N1 (1/8" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: D Side, Cable Length: 1 (1.5m Cable 25 Pin), Option 1: D (DIN Rail Mounting), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 3 Stations, Port Size: N1 (1/8" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: D Side, Cable Length: 1 (1.5m Cable 25 Pin), Option 1: None, Option 2: S (Built-in Silencer, Direct Exhaust)