Configuration: 3 (3 Position Closed Center), Sealant: 1 (Rubber Seal), Function: RY (External Pilot, Low Wattage 0.5W), Coil Voltage: 5 (24VDC), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, 1: 1, Porting Specification: B (Bottom Ported), Port Size: 03 (3/8), Thread: N (NPT)

Actuation Type: 3 (3 Position Closed Center), Sealant: 1 (Rubber Seal), Function: RY (External Pilot, Low Wattage 0.5W), Voltage: 5 (24VDC), Lead Wire: H (Grommet Lead Wire 1.5m), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 03 (Rc3/8), Thread: T (NPTF)

Actuation Type: 5 (3 Position Pressure Center), Sealant: 1 (Rubber Seal), Function: RY (External Pilot, Low Wattage 0.5W), Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1

Body Size: 20, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 02 (1/4), Option: w/o Mounting Option, w/o Pressure Gauge, Semi-Standard: RY (R + Y)

Body Size: 30, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: B (Assembly of a Bracket & Set Nuts), Semi-Standard: RY (R + Y)

Body Size: 30, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: w/o Mounting Option, w/o Pressure Gauge, Semi-Standard: RY (R + Y)

Actuation Type: 4 (3 Position Exhaust Center), Sealant: 0 (Metal Seal), Function: RY (External Pilot, Low Wattage 0.5W), Voltage: 5 (24VDC), Lead Wire: H (Grommet Lead Wire 1.5m), Light & Surge Suppressor: E (w/o Light w/Surge Suppressor), Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1

Actuation Type: 4 (3 Position Exhaust Center), Sealant: 0 (Metal Seal), Function: RY (External Pilot, Low Wattage 0.5W), Voltage: 5 (24VDC), Lead Wire: H (Grommet Lead Wire 1.5m), Light & Surge Suppressor: E (w/o Light w/Surge Suppressor), Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 03 (Rc3/8)

ISO Cylinder

45 + 15 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 Band mounting Band mounting (n 2) 2 15 + 40 D-C7l D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6) D-C7l D-C80 10 15 50 50 + 20 (n 2) (n = 2, 4, 6) (n = 2, 4, 6) (n = 2, 4, 6) D-H7l D-H7lW D-H7BA D-H7NF D-H7l D-H7lW D-H7BA D-H7NF (n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) 10 15 60 60 + 22.5 (n 2) (n = 2, 4, 6) (n=2, 4, 6) (n 2) 2 15

SMC Pneumatic Clean Series

WA WC GB F 2-NN Cushion valve (Width across flats 1.5) WB 2-P (Rc, NPT, G) D I B LH 2-LC 4-LD MM Width across flats B2 Z Y X N1 Width across flats NA S + Stroke LS + Stroke N2 X Y LT LX LZ ZZ + Stroke (mm) H H2 H1 S P N1 I GB D A 8 13 AL F K MM NA NN B1B2 Bore size 54 47 47 40 B LH LT LS LX LD N2 Z ZZ 6.8 4 LC LZ X Y 31 26 26 26 GA 16 13 13 13 149 GC WA WB WC 34.5 30 24 33.5 28 7 5.5 5.5

V

/8) 03 (3/8) 04 (1/2) 04 (1/2) Courtesy of Steven Engineering, Inc. !

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10.3 2.8 depth 6.2 19 2-Color Display Digital Flow Switch PF2M7(-L) Series Dimensions PF2M7m-m1/2(-L) 48 A Width across flats B 18 OUT1 OUT2 DC(+) 10.2 DC() 1.4 38.5 (30.9) 13 3 2 x Female thread Port size: 1, 2 2 x 3.4 18 [mm] 28 Model A B P PF2M701/702/705/710/ 725/750-01(-L) 66 14 2.8 depth 8.4 8 PF2M701/702/705/710/ 725/750-N1(-L) 68 14 2.8 depth 8.4 2 x P PF2M701/702/705/710/ 725/750

CM2

2 !3 !4 !5 !6 !

Table of Contents

M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

Modular F.R.L. Units

F G H Symbol Description Nq Body size 20 30 40 50 SUP. 3 1 2 C D E Nw Pipe thread type Nil Rc N1 NPT F1 G + Key can be mounted when residual pressure is released. 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size SUP 2 A B IN OUT a Flow direction Nil Flow direction: Left to right R Flow direction: Right to left + Semi-standard 2 x P1 (Port size) Nr b Pressure unit Nil Name plate in SI

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

MHZ

M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

outputs + Analog voltage output*1 S NPN open collector 2 outputs + Analog current output*1 T PNP open collector 2 outputs + Analog voltage output*1 V PNP open collector 2 outputs + Analog current output*1 X NPN open collector 2 outputs + Copy function Y PNP open collector 2 outputs + Copy function Symbol Description Nil Units selection function*1 M SI unit only*2 P Units selection function

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

MHZ2/MHZJ2

N1 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 Specifications and dimensions other than the above are the same as the basic type (including narrow type).