EXxx-OMN0029CN

PCA-1558823 7/8 6 m PCA-1558836 7/8 2 m PCA-1558849 7/8 6 m PCA-1564927 M12 B code2 mSPEEDCON PCA-1564930 M12 B code6 mSPEEDCON PCA-1564943 M12 B code2 mSPEEDCON PCA-1564969 M12 B code6 mSPEEDCON (9)DeviceNet PCA-1557633 M12 A code5 mSPEEDCON PCA-1557646 M12 A code5 mSPEEDCON (10) PCA-1557769 M12(4 )3 m PCA-1557772 M8(3 )3 m -78No.EX-OMN0029CN-D Revision history A B () C D 4-14-1, Sotokanda

Fieldbus system Ethernet POWERLINK compatible SI unit

6 m PCA-1558836: Cable with 7/8 inch connector, Socket, Right angle 2 m PCA-1558849: Cable with 7/8 inch connector, Socket, Right angle 6 m PCA-1564927: Cable with M12 connector, B code, Socket, Straight 2 m, SPEEDCON compatible PCA-1564930: Cable with M12 connector, B code, Socket, Straight 6 m, SPEEDCON compatible PCA-1564943: Cable with M12 connector, B code, Socket, Right angle 2 m,

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(initial value) Solenoid Specifications Electrical entry L type (for plug-in), M type plug connector (M) Rated coil voltage V Note) 24, 12, 6, 5, 3DC Allowable voltage fluctuation 10% of rated voltage Power consumption W 0.6 (with light: 0.65) Surge voltage suppressor Diode Indicator light LED Note) Only 24VDC and 12VDC are available for plug-in use.

JXCx-OMT0061CN

M No.

EXxx-OMQ0015CN

5 6 7 SI -26No.EX-OMQ0015CN SI ST(M) 8 ST(M) 9 / PWR PWR(V) 10 L/A IN L/A OUT 11 SF/BF 12 13 14 15 -27No.EX-OMQ0015CN EX600No. 1 LED OFF H.T

7ND9071en

RC03 H127093 Cable assembly remote mount sensor cable 30 m, angle connector D3 D3B As D3 but two pressure gauges with connections 1/4 NPT (S, C2).

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red spec i cat on (M), Indrcale separaEly o. a ma.ilo d spe.ilicalion sheel Manifold Circular Connector Series .

C95Series

CleWs J M Circlips : Relel to page 8. Air Cylindlll'/Non-Rotaling Rod (Double Acling: Single Rod) Series C95 Model , Model Type .

Peltier-type Chiller Thermo-con/ Compact Type

Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Air Cylinder NCQ7 Series Compact Cylinder

C Rubber Bumper M Male Rod CM Rubber Bumper & Male Rod Feed Switch B Basic Model A Threaded Mounting Holes.

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C Rubber Bumper M Male Rod CM Rubber Bumper & Male Rod Feed Switch B Basic Model A Threaded Mounting Holes.

NCRAI seies

E* A73L D-A73L Parls M 3 X 0 . 5 X 3 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 tvl3x0.5x5 @ Rotary Actuator Series:NCRAl l n ck and pinion rype ||m 30(17Ie) 50121,63(2 %),80(3 %),1 0o{4) Fluid Air Air o o o o 90' 180' 100" 190" Rotatio 1 ) o r)o Basic o o Shaft Singleend Doubleend o o o Body option With ctshion a Wlthalctqruitph -oand to 200. lrom 180" model.

EXxx-OMN0035CN

4No.EX-OMN0035CN-A () () () () -5No.EX-OMN0035CN-A /, , () * UL UL1310 Class2 0V -6No.EX-OMN0035CN-A * IP67 / *() ,, SI SI SI * IP67 M12M8 () -7No.EX-OMN0035CN-A CE , * 20-23 PLC PLC * -8No.EX-OMN0035CN-A , SI 1 SI 32 10 SI SI ON/OFF PNP NPN PNP NPN PNP NPN EX600 D -9No.EX-OMN0035CN-A (1) 1.51.6 Nm (2) 1 10 SI (3)SI SI -10No.EX-OMN0035CN-A (4) M3X8 EX600-ZMV 0.60.7 Nm SV

Dedicated Controller

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

Rotary Actuator NCRA1 Series Single Rack and Pinion

E* A73L D-A73L Parls M 3 X 0 . 5 X 3 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 tvl3x0.5x5 @ Rotary Actuator Series:NcRAl/n".x and Pinion ryp Symbol \ -D \ l ? / L'.. and lo 200" fiom 1 80' model. Lubrication not required; prelubed at lactory OperatirE tempe"ature 15 PSI (1 kgflcrn'?)

EXxx-OMN0037CN

4No.EX-OMN0037CN-A () () () () -5No.EX-OMN0037CN-A / , () * UL UL1310 Class2 0V -6No.EX-OMN0037CN-A * IP67 / *() ,, SI SI SI * IP67 M12M8 -7No.EX-OMN0037CN-A CE , * 20-23 PLC PLC * -8No.EX-OMN0037CN-A SI 1 SI 32 10 SI SI ON/OFF PNP NPN PNP NPN PNP NPN EX600 D -9No.EX-OMN0037CN-A (1) 1.51.6 Nm (2) 1 10 SI (3)SI SI -10No.EX-OMN0037CN-A (4) (M3X8)(EX600-ZMV) 0.60.7 Nm SV

Air cooled Thermo-con (Compact type)

Length of communication cable for RS-485 shall be limited to around 500[m] in total, and that for RS232C shall be 15[m].

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~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

Air cooled Thermo-con (Compact type)

Length of communication cable for RS-485 shall be limited to around 500[m] in total If communication cable for RS-485 is longer, connect terminating resistance (220,1/2w) to each + and terminal of the host computer and the farthest Thermo-con. 3) Turn on the power switch of Thermo-con. 4) Set the communication method (page 2-1) for all Thermo-con connected.

HRX-OM-R028

SV SV SV SV SEL SEL SEL SEL Compressor accumulated operating time reset Circulating fluid return port temperature Run timer Circulating fluid discharge pressure PV PV PV PV SV SV SV SV SEL SEL SEL SEL Temperature of the compressor inlet.