Vacuum

rib O Deep type B Bellows type List o Pad dia.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

DOC1020530

(b) Positioning operation Positioning operation can be performed without using the upper side. Use this operation with the forced stop reset. This operation may be used independently of whether the servo is on or off and whether the upper side is connected or not. See section 5.3 for the procedure.

Length: RA (10m)

Series: LEFS, Accuracy: Basic Type, Size: 16, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 100mm, Motor Option: B (w/Lock), Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: RA (10m)

Series: LEFS, Accuracy: Basic Type, Size: 16, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 50mm, Motor Option: B (w/Lock), Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: RA (10m)

Series: LEFS, Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 1200mm, Motor Option: B (w/Lock), Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: RA (10m)

Series: LEFS, Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 50mm, Motor Option: B (w/Lock), Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: RA (10m), Controller: C91

Series: LEFS (Ball Screw Drive), Accuracy: Basic, Body Size: 40, Motor Mounting Position: In-line, Motor Type: G (High Performance, Battery-less Absolute), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 1200mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length

: RA (10m), Controller: C9H (JXC9H, EtherNet/IPâ„¢), Mounting: 7 (Screw Mounting)

, Length: RA (10m), Controller: C91 (EtherNet/IPâ„¢ Direct Input Type), Mounting: 8 (DIN Rail)

Series: LEFS, Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 550mm, Motor Option: B (w/Lock), Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: RA (10m), Controller: C91

Series: LEFS (Ball Screw Drive), Accuracy: H (High-precision Type), Body Size: 16, Motor Type: F (High Performance, Step Motor 24 VDC), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 150mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: RA (10m), Controller

Series: LEFS (Ball Screw Drive), Accuracy: H (High-precision Type), Body Size: 32, Motor Mounting Position: In-line, Motor Type: G (High Performance, Battery-less Absolute), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 400mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator

Precision Regulator

Flow Rate Characteristics Relief Characteristics Pressure Characteristics Testing methods conform to JIS B 8372.

Flow Rate Range: 501 (5 to 500 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Output Specifications: E (PNP; Analog 1 to 5 V)

Flow Rate Range: 501 (5 to 500 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Output Specifications: F (PNP; Analog 4 to 20 mA)

Flow Rate Range: 501 (5 to 500 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Output Specifications: D (NPN; Analog 4 to 20 mA), Option 1: W (w/Lead Wire w/Connecter + Connector Cover)

Flow Rate Range: 501 (5 to 500 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Output Specifications: H (PNP; External Input)

Flow Rate Range: 501 (5 to 500 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Output Specifications: D (NPN; Analog 4 to 20 mA)