Body Size: ø40mm, Body Material: Stainless Steel, Mounting Plate: None, Attachment: with Vibration Suppression Cover; Stainless Steel, Pressure Sensor: with Pressure Sensor; Part Number PSE541-M5-X2, Suffix: -

Body Size: ø60mm, Body Material: Aluminum, Mounting Plate: None, Attachment: PN [with Stopper; NBR (Black)], Pressure Sensor: with Pressure Sensor; Part Number PSE541-M5-X2, Suffix: -

Body Size: ø40mm, Body Material: Aluminum, Mounting Plate: None, Attachment: Basic Type, without Attachment, Pressure Sensor: with Pressure Sensor; Part Number PSE541-M5-X2, Suffix: -

Body Size: ø60mm, Body Material: Stainless Steel, Mounting Plate: None, Attachment: Basic Type, without Attachment, Pressure Sensor: with Pressure Sensor; Part Number PSE541-M5-X2, Suffix: -

Body Size: ø60mm, Body Material: Aluminum, Mounting Plate: None, Attachment: Basic Type, without Attachment, Pressure Sensor: with Pressure Sensor; Part Number PSE541-M5-X2, Suffix: -

Body Size: ø20mm, Body Material: Stainless Steel, Mounting Plate: None, Attachment: with Vibration Suppression Cover; Stainless Steel, Pressure Sensor: with Pressure Sensor; Part Number PSE541-M5-X2, Suffix: -

Body Size: ø40mm, Body Material: Aluminum, Mounting Plate: None, Attachment: PN [with Stopper; NBR (Black)], Pressure Sensor: with Pressure Sensor; Part Number PSE541-M5-X2, Suffix: -

Body Size: ø40mm, Body Material: Resin, Mounting Plate: None, Attachment: PN [with Stopper; NBR (Black)], Pressure Sensor: with Pressure Sensor; Part Number PSE541-M5-X2, Suffix: -

Body Size: ø60mm, Body Material: Resin, Mounting Plate: None, Attachment: PN [with Stopper; NBR (Black)], Pressure Sensor: with Pressure Sensor; Part Number PSE541-M5-X2, Suffix: -

Body Size: ø20mm, Body Material: Aluminum, Mounting Plate: With mounting plate - Aluminum, Attachment: PS [with Stopper; Silicone Rubber (White)], Pressure Sensor: with Pressure Sensor; Part Number PSE541-M5-X2, Suffix: -

Body Size: ø20mm, Body Material: Aluminum, Mounting Plate: None, Attachment: PS [with Stopper; Silicone Rubber (White)], Pressure Sensor: with Pressure Sensor; Part Number PSE541-M5-X2, Suffix: X1

Body Size: ø20mm, Body Material: Stainless Steel, Mounting Plate: None, Attachment: w/o Vibration Suppression Cover, Pressure Sensor: with Pressure Sensor; Part Number PSE541-M5-X2

XL

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Electric Actuator

Select D for the vacuum port for suction of 50 L/min (ANR) or more. ( Cable length Note 3) I/O connector 0 Cable type Note 1) Note 2) + Driver type Nil S R Nil 2 5 A Nil H Without connector Without cable Standard cable Robotic cable (Flexible cable) Without cable 2 m 5 m 10 m Power supply voltage (V) Compatible drivers 25 32 Size 40 ) ) ) ) ) ) ) ) ) With connector Nil A1 A2 B1 B2 C1 C2

Mechanically Jointed Rodless Cylinders

Application Application Mounting direction w (to minimize the installation width) Work piece Mounting direction q (to minimize the installation height) Work piece Guide Guide Series MY3 Series MY3 Floating mechanism Bracket Floating mechanism Bracket Mounting Example Mounting Example G G D1 D2 Za2 Za1 Ea Ea Ea Ea C1 C2 K2 (Screw length) B2 F2 B1 F1 K1 (Screw length) Detail drawing of Za2

EX500-GPR1A.eng

To the communication connector ( C2 ) or ( 1 ) of SI unit, connect the branch cable with M12 connector from GW. To the communication connector ( C1 ) or ( 0 ), connect the branch cable with M12 connector from Input unit. To the communication connector of Input unit, connect the branch cable with M12 connector from SI unit.

High Vacuum Angle Valve, XL Series

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

Multi-Axis Step Motor Controller

Controller side PLC side For 4 Axes JXC73/83 L JXC C2 (Terminal no.) (R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.