3.2

Series Pressure range 0~-101kPa PSE541 Vacuum pressure -101kPa 0Pa For air -100~100kPa PSE543 Compound pressure 100kPa -100kPa 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Compact pressure sensor for pneumatics, Proof pressure: 500kPa, Accuracy (ambient temp. of 25C): 2%F.S. or less, Repeatability: 0.2%F.S. or less, Enclosure: IP40, SENSOR, GENERAL AIR, VACUUM, VACUUM SERIES, PSE531/PSE541/PSE561, 1X, PSE5*1 VAC SW OTHER SIZE(MISC), .16671 lb

0.2%F.S. or less, Enclosure: IP65, SENSOR, GENERAL FLUID, VACUUM, VACUUM SERIES, PSE531/PSE541/PSE561, JD, PSE5*1 VAC SWITCH 1/8PORT NPT, .66138 lb

Please contact us for the latest version.sales@ocaire.com, SENSOR, GENERAL FLUID, VACUUM, VACUUM SERIES, PSE531/PSE541/PSE561, KC, PSE5*1 VAC SWITCH 1/4 PORT PT, 4.62970 lb

Please contact us for the latest version.sales@ocaire.com, SENSOR, GENERAL AIR, VACUUM, VACUUM SERIES, PSE531/PSE541/PSE561, 1C, PSE5*1 VAC SW OTHER SIZE PT, .16534 lb

0.2%F.S. or less, Enclosure: IP65, SENSOR, GENERAL FLUID, VACUUM, VACUUM SERIES, PSE531/PSE541/PSE561, JD, PSE5*1 VAC SWITCH 1/8PORT NPT, .66138 lb

0.2%F.S. or less, Enclosure: IP65, SENSOR, GENERAL FLUID, VACUUM, VACUUM SERIES, PSE531/PSE541/PSE561, JC, PSE5*1 VAC SWITCH 1/8 PORT PT, .57487 lb

Body Size: 20 (ø20mm), Body Material: Aluminum, Mounting Plate: None, Attachment: Basic Type, without Attachment, Pressure Sensor: S (with Pressure Sensor; Part Number PSE541-M5-X2)

Body Size: 20 (ø20mm), Body Material: Aluminum, Mounting Plate: T (Aluminum), Attachment: w/o Vibration Suppression Cover, Pressure Sensor: S (with Pressure Sensor; Part Number PSE541-M5-X2)

Body Size: 80 (ø80mm), Body Material: S (Stainless Steel), Mounting Plate: None, Attachment: Basic Type, without Attachment, Pressure Sensor: S (with Pressure Sensor; Part Number PSE541-M5-X2)

Body Size: 20 (ø20mm), Body Material: Aluminum, Mounting Plate: T (With mounting plate - Aluminum), Attachment: PN [with Stopper; NBR (Black)], Pressure Sensor: S (with Pressure Sensor; Part Number PSE541-M5-X2)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 L2 max Y 2 Y Y Y Y D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7

Rotary Actuator

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = Y = C2 J axis X axis K axis T axis D2 = C2 = C L2 = [mm] [mm] [mm] Size Y L2max D2 30 3 to 25 Y-2 5 to 7.9 50 1 to 36 Y 5 to 14.9 63 1 to 41 Y 5 to 16.9 80 1 to 50 Y 8 to 19.9 100 1 to 60 Y 8 to 24.9 Size d1 30 2.5 50 4 to 7.5 63 4 to 8 80 6.8 to 11 100 6.8 to 13 Size d1 30 2.5 50 4 to 7.5 63 4 to 8 80 6.8 to 11 100 6.8 to 13 218

Aluminum High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 L2 max Y 2 Y Y Y Y Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7

Multi-Axis Step Motor Controller

Controller side PLC side For 4 Axes JXC73/83 L JXC C2 (Terminal no.) (R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

Fluoropolymer Piping Equipment

B L1 W M2 B side Inch Size 6 4 Model A side B side B C1 C2 E1 E2 H1 H2 L1 L2 M1 M2 Min. port size W Applicable tubing O.D.

Environment

1 I/O cable length [m]*3 Compatible driver Power supply voltage [V] Size 25 32 40 Nil Without driver A1 LECSA1-S100 to 120 A2 LECSA2-S200 to 230 B1 LECSB1-S100 to 120 B2 LECSB2-S200 to 230 C1 LECSC1-S100 to 120 C2 LECSC2-S200 to 230 S1 LECSS1-S100 to 120 S2 LECSS2-S200 to 230 *3 When Without driver is selected for driver type, only Nil: Without cable can be selected.

High Vacuum Angle Valve, XL Series

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage