A

1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44-02 1/4 60 48 36 54 Y41-02 1/4 14 39 24 Y44-03 3/8 60 48 36 54 Y41-03 3/8 14 39 24 Y54-03 3/8 72 62 40 62 Y51-02 1/4 14

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1/8 (P, R port) R P 28 8 14.5 16 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors L plug connector (L): 10-SYJ72M-L-01 (-F) M plug connector (M): 10-SYJ72M-M-01 (-F) DIN terminal (D, Y): 10-SYJ72MD Y-01 (-F) M8 connector (WO): 10-SYJ72M-WO-01 (-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 65 31.5 [38.5] 57.5

I

[VF323O (B) (A) ct c2 #\ilIrb Compact size and lisht weighi 1.04inch wide Large flow capaci$ -CvI.o(%) Shgb !|vF3l3O (B) (A) ' 0 1 c 2 Clo6td C.l49r rd d#{Ft ffi# E I S E 2 {R2XPXB1) Low power consumption -1.8WDc (F2)(P)(F1l NVF3S3O Exh.Bt C.ii.. i{VF3,(3O (B) (A) c1 c2 ryffTfl-TTrl,* Er\llt'lll/'Es) EI SE2 Pr.aqa ConL.

HRX-OM-S004

Table 3-12 Piping port size Name Port size1 Recommended Recommended piping tightening torque specification Circulating fluid outlet port Rc3/4 28 to 30Nm 1.0MPa and more Circulating fluid return port Rc3/4 28 to 30Nm 1.0MPa and more Facility water inlet port*1 Rc3/4 28 to 30Nm 1.0MPa and more.

V

Remove N when ordering F PF* Remove N when ordering T NPTF D I M E N S I O N S (N)ZFA A I R S U C T I O N F I LT E R EJ001H-030N (100 Series) EJ101H-030N (200 Series) E L E M E N T B R A C K E T BP-1H Model Port Size A B (N)ZFA100-01 1/8 8 18 (N)ZFA200-02 1/4 20 28 Courtesy of Steven Engineering, Inc. !

Table of Contents

" M5 x 0.8 18.3 23.1 12 12.7 7 13.5 AS121F-U10/32-07 AS221F-01-04 9.3 27.5 20.4 4 1/4" 10-32UNF 14.3 17 AS221F-01-01 AS221F-01-06 27.5 27.5 6 20.4 11.6 20.4 36.1 32.1 27.1 13.5 31.1 9.3 1/8" 14.2 12 (12.7) 1/8 16 12.7 AS221F-01-03 AS221F-01-08 32.4 8 20.4 15.2 18.5 19 27.5 25.3 17 9.3 5/32" 12 (12.7) AS221F-01-05 AS221F-01-10 14.2 14.3 40.2 10 23.1 18.5 21 15 21 30.2 36.1 31.1 27.1 33.1 17

44

KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

5 Port Air Operated Valve

How to Order Valve VFA 3 1 3 0 01 VFA 3 1 3 0 01 Pilot port direction Series 1 3 5 Nil: Upward P: Lateral VFA1000 VFA3000 VFA5000 Pilot port Type of actuation 1 2 3 4 5 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center Pilot port Only 1 and 2 are available with the VFA1000.

4/5 Port Air Operated Valve Series SYJA3000 1

01 2 position double: SYJA72402-4.3 (For mounting) 63.6 34 8.5 2-M5 x 0.8 1 (Pilot port) 13 3 1 A B B A 2-M5 x 0.8 34 2-3.2 27 17 A B (Pilot port) (For manifold mounting) 1 35 R1 P R2 31.5 2-3.2 18 35 (For mounting) 63.6 Manual override 74.6 28 29 25 21 1.6 14 74.6 Manual override 55 1/8 2-1.8 (Bleed port) With fiflter (80 mesh) 40 25.5 (Piping port) 20 12 11.5 R1 R2 P 18 22 22 1/4 2-1.8

PSxx-OMM0006CN

-1) -64No.PS-OMM0006CN-E A 01/N01 W1/WF1 -65No.PS-OMM0006CN-E B W1/WF1 -66No.PS-OMM0006CN-E D 01/N01 W1/WF1 -67No.PS-OMM0006CN-E 01/N01 W1/WF1/M5/C4/C6 -68No.PS-OMM0006CN-E + 01/N01 W1/WF1/M5/C4/C6 -69No.PS-OMM0006CN-E 36n +4n -1 -70No.PS-OMM0006CN-E 01/N01 (M8(3 )) 5 4 -71No.PS-OMM0006CN-E M8(3 ) V100-49-13 1 4 (L) V100-49-1-1 300 mm V100-49-1-2 500 mm V100-49-1-3 1000

•

Calculation of suction flow rate OCalculation 01 Ejector/ average suction flow rate. 01 = ( ~ ~'3) 0 max.

REA/REB

Bore size (mm) Model Elbow type Straight type In-line type 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214

JXCx-OMT0005CN

DRV C RESET <> 66 - <>12 1 [] A [a ] (01-103) [] C RESET 2 [SW] A [a ] <> <> (01-144) D RESET SVON <> <> <>(M24V) (01-145) D RESET SVON <> <> <> (01-146) D RESET SVON <> 67 - <> <>(DC24V) D RESET SVON (01-147) <> <> <> (01-148) D RESET SVON <> <> (01-149) D RESET SVON <> <> Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVON ON)

Intrinsically Safe Valve

Thread type Nil F N T Rc A, B port size Thread piping G Symbol 01 Port size Applicable series NPT 1/8 53-SY5000 NPTF EB P EA One-touch fitting (Metric size) Symbol C6 C8 Port size Applicable series A B 6 One-touch fitting 53-SY5000 A, B port size 53-SS5Y5-41-05-01 Manifold base (5 stations) 01: 1/8 8 One-touch fitting One-touch fitting (Inch size) Symbol N7 N9 Port size Applicable series

0.4

F 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) None Nil DIN rail mounting (For manifold) IN side port size OUT side port size D 01 02 C6 C8 N7 N9 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting F

HRX-OM-R005

Piping port size Table 3-5 Piping port size Name Port size1 Recommended Recommended proof tightening torque pressure for piping Circulating fluid supply Rc1/2 28 to 30Nm 0.8MPa more Circulating fluid return Rc1/2 28 to 30Nm 0.8MPa more Faiclity water inlet3 Rc1/2 28 to 30Nm 1.0MPa more (Facility water pressure 0.3 to 0.5 MPa) Faiclity water outlet3 Rc1/2 28 to 30Nm 1.0MPa more Automatic water-fill

HRX-OM-Q026

(Supply puressure: 0.3 to 0.5 MPa) Facility water outlet port *1 Rc1 36 to 38Nm 1.0 MPa or more Automatic fluid fill port Rc3/8 28 to 30Nm (Automatic fluid fill pressure: 0.2 to 0.5 MPa Overflow port Rc1 36 to 38Nm ID 25 mm or more Length 5m or less Tank drain port Rc3/4 28 to 30Nm ID 19 mm or more *1: Water cooled type only.

LEC-OM07605CN

PB26](_ _ _ 1) 5 28 5. [] PB45 CNHF _ _ x x 5.5 00h _ x _ _ 5.6 0h x _ _ _ 0h 5.5 [Hz] [Hz] [Hz] 00 20 70 40 17.6 01 2250 21 66 41 16.5 02 1125 22 62 42 15.6 03 750 23 59 43 14.8 04 562 24 56 44 14.1 05 450 25 53 45 13.4 06 375 26 51 46 12.8 07 321 27 48 47 12.2 08 281 28 46 48 11.7 09 250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

16 SMC 9 9 9 VP7 2-PE port M5 X 0.8 (Not applicable to standard.) 18 18 2.1 5-Rc(PT)1/8,1/4 (P, A, B, R1, R2 port) 2.1 VP4 28 M5 X 0.8 External pilot port (Only external pilot style(R)) VQ 0 1 01 02 L plug connector (L): VQZ225 (R)lLl 0 1 01 02 DIN connector (Y): VQZ225 (R)lYl VQ4 Indicator light VQZ 300 135<137> (Lead wire length) 67.5<68.5> VQD VZS Applicable cord O.D.

CLA

i.\4 L, Material: Free cutting sulfer sleel Malenal: Cast lion -NX A 1 ~ 1-05 50-63 74 27 28 60 M18X 1.5 15.5 2Q 121'0711 1 ~ Y-04d 40 22 24 55 M1 4X 1.S 13 25 12171) 1 6'j-~ 38 p .OS 80 91 37 36 71 M22Xl.5 225 26 18,&070 281l V. SO-63 27 28 60 M' 8Xl .5 15 27 12'870 1 6 ~f 38 ~10 100 105 37 40 83 M26Xl .S 24.5 28 20-8-08< 3():gJ Y-08d 80 37 36 71 M22Xl .S 19 28 181. 010 28!