Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection (Mounting hole) Model A 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12

ZP

ZPT100HB-A16 ZPT125HB-A16 Model ZPT63HB-A16 ZPT80HB-A16 ZPT H-B (Female thread) 40 50 ZPT H-B (Female thread) 63 80 Width across flat 24 C 28 E Width across flat 37 3 x M3 x 8 4 x M4 x 8 10 D C Y A 6 A B B 18 34 Dimensions Dimensions B 65 65 65 65 82 82 82 82 Model A 63 63 63 63 80 80 80 80 C 14.5 14.5 14.5 14.5 16.5 16.5 16.5 16.5 D 26 26 26 26 28 28 28 28 E M8 x 1.25 M10 x 1.5 M12 x 1.75

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

Modular F.R.L. Unit

-20 IS1000M-30 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS40-06 02 03 04 E600VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) 06 10 06 10 E60006 10 E600E100-M5 02 03 04

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

2/3 Port Valve

-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360-03 VX2260-04 VX2360-04 2.0 1.5 2.0 1.5 1.5 1.5 1.0 1/8 (6A) 0.9 0.5 1.1 0.6 0.5 0.5 1.0 Construction/Components 260 0.4 0.2 0.45 0.2 0.2 0.15 0.45 2.0 1.5 2.0 1.5 1.5 1.5 1.0 Water oil air 3.0 Steam 1.0 VX21/22/23 (Orifice

Speed Controller with Indicator

-04 (S) 4 7.2 9.6 12 1/8 13 (12.7) 24 AS231FS1-02-06 (S) 6 11.2 19 33.8 21.4 43.9 14.2 26 AS231FS1-02-08 (S) 8 13.2 34.9 23.5 46 15.6 27 AS231FS1-02-10 (S) 10 15.9 20.9 38.1 24.7 47.3 17 28 AS331FS1-02-06 (S) 6 8.2 16.5 29.9 17.5 40.1 13.3 1/4 17 (17.5) 12.9 13 49.7 48.3 44.2 42.8 21.5 16.2 49 AS331FS1-02-08 (S) 8 13.2 37.1 23.5 59.9 14.2 50 AS331FS1-02-10 (S) 10 15.9 17.4 23 41.2 26.1 62.5

VQZ1000/2000/3000

PE port 18 18 5-Rc 1/8, 1/4 1(P), 2(B), 3(R2), 4(A), 5(R1) port 2.1 28 M5 x 0.8 external pilot port (Only external pilot type (R)) L plug connector (L): VQZ2150 1(R)-L-01 02 DIN terminal (Y): VQZ2150 1(R)-Y-01 02 Indicator light 300 98 (Lead wire length) 68 Pg.7 51.5 <56.5> Applicable cable O.D. 3.5 to 7 101.5 Max. 10 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 82.5

Free Mount Cylinder

ZPT U N 02 B4 ZP U N 04 X11 Dia. (mm) Vacuum entry (Mounting thread diameter) Dia. (mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Table of Contents

Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

•

ZP'f40 28 30 28 30 30 32 28 30 ' (26) (2S) (231 (26) (25) (16) (28) (26) (20) (26) (25) (23) ZP'[SIl 30 32 32 34 -1 30 32 How To Order ZPT(02~~5) Symbd Thread dja I 1 Mate,ial Pad type' AS M5xO.8 N NBR (Application: Refer to liS10) 066 .!1:,'j '" M6xl A6 S Silic on rubber .. ~ U Flattype Pad dia.(mm) Vacuum entry (also mounting thread dia) 088 :!

LEC-OM02704CN

C 1. ##0064 ## 00 01 1 02 2 03 3 62 62 63 63 64 64 2. $$$0255 3. ** 4.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Number of pages has been increased from 20 to 28. YU A flow adjustment valve (0.05 to 5 L/min) has been added. A 2 to 200 L/min flow range option has been added. A rear ported type has been added. Number of pages has been increased from 28 to 32.

Hydraulic

17 17 13 M10 x 1.5 20 35 22 M16 x 1.5 30 26 3/8 43 18 112 50 63 16H9 28 8 80 60 28 21 22.4 30 17 17 13 M10 x 1.5 22 40 25 M18 x 1.5 30 26 3/8 47 20 116 55 80 18H9 32 8 100 75 32 26 28 32 22 20 15 M12 x 1.75 26 45 29 M22 x 1.5 35 30 1/2 57 22 127 65 100 20H9 38 6.5 118 90 36 34 35.5 35 27 19 16 M12 x 1.75 27 50 34 M27 x 2 35 32 1/2 66 24 137 80 125 22H9 38 6.5 140 112 42 34 35.5 35 27 19

Stainless Steel One-touch Fittings Series KG

Mounting hole T(M) L1 L2 Nylon Urethane 1 8 KGE04-01 16 35 25 40 29 14 16 27.5 31 28 31.5 33.5 27.5 33 11 15 11 15 17 7.5 13 4 M12 1 13 5.6 5.6 14 1 4 KGE04-02 17 1 8 1 4 3 8 1 8 KGE06-01 KGE06-02 KGE06-03 KGE08-01 17 6 M14 1 13.1 13.1 17 15 17 19 26.1 18.0 28 27 48 17 1 4 KGE08-02 M16 1 8 18.5 17 19 3 8 KGE08-03 15 19 35 1 4 KGE10-02 34.5 36.5 41.5 29.5 53 67 12.5 14 10 21 M20 1 21 22 24

Series KG Stainless Steel One-touch Fittings

Mounting hole T(M) L1 L2 Nylon Urethane 1 8 KGE04-01 16 35 25 40 29 14 16 27.5 31 28 31.5 33.5 27.5 33 11 15 11 15 17 7.5 13 4 M12 1 13 5.6 5.6 14 1 4 KGE04-02 17 1 8 1 4 3 8 1 8 KGE06-01 KGE06-02 KGE06-03 KGE08-01 17 6 M14 1 13.1 13.1 17 15 17 19 26.1 18.0 28 27 48 17 1 4 KGE08-02 M16 1 8 18.5 17 19 3 8 KGE08-03 19 15 35 1 4 KGE10-02 34.5 36.5 12.5 14 41.5 29.5 53 67 10 21 21 M20 1 22 24

ZP

ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

28 28 Pg7 28 Applicable cable O.D. 3.5 to 7 Refer to the page 91 for dimentions with connector cable. 54 Series SYJ7000 2 Position Single [ ]: AC G H 01 02 Grommet (G), (H): SYJ714022 27 12 34 8.5 2-4.3 (For mounting) Manual override B A A B With interface regulator R1 R2 P 59.8 3.2 G: Approx. 300 H: Approx. 600 (Lead wire length) 85.2 [87.4] 128.8 [131] (Light/surge voltage suppressor)

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

28 28 30 36 46 Head side trunnion style: CG1TQ Bracket mounting range 2-TD8 (Pin O.D.)

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC L plug connector (L): SYJ3l2-lLll-M3 M plug connector (M): SYJ3l2-lMll-M3 44.9 28 12.7 28 12.7 A 8.2 2 A 8.2 2 2-1.8 7.4 7.1 (Mounting holes for manifold) 2-1.8 7.4 7.1 (Mounting holes for manifold) (Lead wire length) 300 300 (Lead wire length) 28 [34.5] 39.1 [45.6] 28 [34.5] 20 15.6 13.5 15 20 9 13.5 15 9 58.5 48.9 [50.2] [ ] for AC Other dimensions are the same as the grommet