Model Selection 1

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + t Q : Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are also allowed to described by l (liter). 1 dm3 = 1 l .

Series VQ Base Mounted Metal Seal/Rubber Seal

Load factor 25% Piping length 2m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm Fitting (One-touch fitting) Effective area (mm2) (Cv factor) Cylinder speed (mm/s) Model 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 3.6 (0.2) VQ1000 (Metal seal) 6 5.4 (0.3) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CA1 Pressure 0.5MPa Load

7

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + T When P2 + 0.1 > b, subsonic flow P1 + 0.1 VXH VXF VX3 VXA 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + T 157 VXD Series Q : Air flow rate [L/min (ANR)] C : Sonic conductance [dm3/(sbar)], dm3 (Cubic decimeter) of SI = L (liter). b : Critical pressure ratio [] P1 : Upstream pressure [MPa

1

for 16, 20) Data MY2H/HT 16, 25, 40 50 to 600 601 to 1500 (Up to 1000 for 16) 10 10 to 75 80, 90, 100, 110, 120, 125, 150 CXSM CXSL 10 to 100 15 110, 120, 125, 150 110, 120, 125, 150, 175, 200 20, 25, 32 10 to 100 225, 250, 275, 300 (CXWM16 to 25) 225, 250 (CXWM32) 225, 250, 275 (CXWL16 to 25) 225 (CXWL32) CXWM 16, 20, 25, 32 25 to 200 CXWL 16, 20, 25, 32 225, 250, 275 25 to 200 ML1 25,

MTS

Refer to graph (16) based on horizontal mounting, the maximum speed of 600 mm/s, and 125 stroke.

5

1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 Unit: MPa Bore size (mm) 32 40 50 63 80 100 Min. operating pressure 0.02 0.01 Note 1) Intermediate strokes not listed above are

Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X226 100 IZN10-G-200-X226 200 IZN10-G-300-X226 300 IZN10-G-400-X226 400 IZN10-G-500-X226 500 IZN10-G-600-X226 600 Part no.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

Description Material Note ALF400, 400-06 ALF500, 600 ALF800, 900 Platinum silver painted Body Housing Aluminum die-casted Aluminum casted Aluminum die-casted 1 2 Platinum silver painted Replacement Parts No. Description Material Part no. Qty.

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Sine Rodless Cylinder Series REBR Direct Mount Type

, 800 25 1200 25 200, 300, 400, 500, 600, 800, 1000 2 axes 1500 32 Note 1) Strokes exceeding the standard strokes are available as a special order.

AC Servo Motor Driver (CC-Link Type)

300 150 600 300 150 1000 500 250 800 400 200 Different from the initial value. *5.

IDX-OM-W029

mm 600 mm 600 mm 600 mm 600 mm ( ) IDU Series 2-1 2 1 IDX-OM-W029 2 2 2 2 6 6-3 IDF-AB501 14 1 IDU22E,IDU37E,IDU55E,IDU75E 2 2 3 80 80 OUT IN (IN) IDU-BP336 1 IDU22E (OUT) IDU-BP337 1 IDU37E 1 IDU55E IDU-BP338 1 IDU75E 2 2 4 10mm IDU Series 2-2 2 2 IDX-OM-W029 2 2 2 5 6-1 IEC AC230V [30mA 10AIDU75E 20A] AC200V [30mA 10AIDU75E 15A] 216AWG 812 3 () 1.25 0.2m 30m

IDX-OM-W032

mm 600 mm 600 mm 600 mm 600 mm ( ) IDFA Series 2-1 2 1 IDX-OM-W032 2 2 2 2 6 6-3 2 2 3 50 50 OUT IN (IN) (OUT) 2 2 4 10mm IDFA Series 2-2 2 2 IDX-OM-W032 2 2 2 5 6-1 IEC AC230V [30mA 10AIDFA75E 20A] 216AWG 812mm 3 () 1.25mm 0.2m 30m M3 1.25-3 6.5mm M3 0.631Nm IDFA Series 2-2 2 3 IDX-OM-W032 2 2-3 () 2 () IDFA Series 2-3 2 4 IDX-OM-W032 3 / 3 / 3-1 INOUT

Process Pump

First, mark the intersection point for a discharge rate of 600 mL/min and a discharge pressure of 0.15 MPa. 2. Find the pilot air pressure for the marked point.

25

Since 45% of the clear water discharge is equivalent to 270 mL/min in the required specifications, 270 mL/min 0.45 = approximately 600 mL/min, indicating that a discharge rate of 600 mL/min is required for clear water. 3. Finally, find the pilot air pressure and pilot air consumption based on the flow rate characteristic graphs.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Output impedance: 1 k L4: Analog output: 4 to 20 mA Load impedance: 50 to 600 Max. load current: 80 mA, Internal voltage drop: 1.5 V or less L3: Analog output: 1 to 5 V or 0 to 10 V can be selected.

Vacuum System Peripherals:

B Electrical entry 1 Symbol 2 3 4 5 6 7 8 9 10 Order of manifold (Station) G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) 05 07 10 13 H M Common Individual J K A B P5 Q5 None E14 E15 E16 E17 E18 E19 M15 M21 Nil L C CL CN Nil L Nozzle diameter L L type plug connector LN LO With lead wire Without lead wire Without connector For AC, only L or LO is available.