Modular Type Regulator Series AR

Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 5000 10 0 0 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) 37 Regulator AR10 to 60 Conditions: Inlet pressure 0.7MPa Outlet pressure 0.2MPa Flow rate 20L/min (ANR) Pressure Characteristics (Representative values) AR10 AR40 0.3 0.25 Set point 0.25 Set point Outlet pressure MPa Outlet pressure MPa 0.2 0.2

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Positioning distance (mm) 1500 750 100 10 1 10 151.1 76.1 11.1 2.1 0.5 100 16.1 8.6 2.1 1.2 1.1 Speed (mm/s) The value is a guide when SMC's series LCI controller is used and may vary depending on the driver capacity. 250 7.2 4.2 1.6 1.2 1.1 500 4.3 2.8 1.5 1.2 1.1 Values will vary slightly depending on the operating conditions.

Mechanically Jointed Rodless Cylinder Series MY1

100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Features 6

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM Pressure

Table of Contents

N Nil Rc 3 1 0 14 to 60 l/min 20 to 1500 l/min 36 to 2600 l/min NPT Specifications Water/Non corrosive liquid Copper alloy Fluid Stainless steel 304 Liquid, which do not corrode stainless steel 304. Max. pressure 1 MPa 1.75 MPa Water resistance Insulation resistance 100 M (500 DC by megameter) 1500 VAC for one min.

Table of Contents

Lead wire length Nil 6 10 15 20 25 30 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) ZR120S1-K15MZ-EC . 1 pc.

VQ5000

1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM Pressure

q"s

Flow characteristics sJppy pressL,e 1.0vea Reliel flow chatacteristics suppry pressu 1 0 Mpa Pressure chalacteristics setpressure: 04 [4pa 0.9 0.8 P o.z 3 o.o 3 o.s P 0.4 0.8 G n 7 g 0.6 3 o.s E 0.4 -o 0.3 t o.z 0.1 0.0 500 1000 1500 2000 Flow te (l/min IANR)) I E E .9 .9 6 " " a o.2 0 . 1 o 0.0 500 1000 1500 2000 Flow raie (rmin (aNB)) 0.4 0.6 0.8 1.0 1.2 Supply pressure (MPa) series ITV

Speed Controller with Indicator

AS301FS, AS311FS AS401FS, AS411FS Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10, 11, 12 10, 11, 12 12, 13, 16 12, 13, 16 1500 1000 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 08, 09 06, 07 1000 500 500 0 0 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Note) The numbers above the flow rate characteristic curves in the charts show the applicable tubing

Sine Cylinder Series REC

st: JIS Symbol Standard Stroke Maximum manufacturable stroke (mm) Minimum stroke (1) Bore size (mm) Standard stroke (2) (Recommended) (mm) 20 150 Up to 700 25 150 Up to 700 1500 32 150 Up to 1000 40 200 Up to 1000 Note 1) The cylinder performance may not as expected when stroke is longer than recommended stroke even they are available.

C76

High Speed Actuation Low friction and the standard elastomer cushion seals allow piston speeds up to 1500 mm/s. Either rubber bumper or air cushions are available. Replaceable Rod Seal Strong, Corrosion-proof Barrel Rod seal can be quickly replaced, greatly extending the cylinder life.

C95Series

With aUla switch 14_140F {~10 + 60 C} (No freezing) , Lubrication Not required (Non-lube) Operating piston speed 2-40 lochls {SOl000mmls} Allowable stroke tolerance -2SO :+1 0, 251-1000 :~104, 1001-1500 .< 1.8 , . Cushion . Both ends (Air cushion) Note 1) Standard Stroke . Thread tolecance J IS class 2 . ~. ~. ' .

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

acting Air 1.5 MPa 1.0 MPa 0.05 MPa Action Fluid Proof pressure Max. operating pressure Min. operating pressure Without auto switch: 20 to 70C (No freezing) With auto switch : 10 to 60C (No freezing) Ambient and fluid temperature Not required (Non-lube) Lubrication Operating piston speed 50 to 1000 mm/s 50 to 700 mm/s Allowable stroke tolerance Up to 250 st: , 251 to 1000 st: , 1001 to 1500

Brake mechanism added

The maximum response speed of the sensor for the stroke reading cylinder with brake is at a maximum cylinder speed of 1500 mm/s (15 kcps). The connection of the input/output signals of the position detection sensor of the stroke reading cylinder is effected through the connector that extends from the cylinder.

NAAMS Standards Compliant

X2742A -X2568 Cylinder Specifications Bore size 50 63 Action Double acting Fluid Air Proof pressure 1.2 MPa Max. operating pressure 0.8 MPa Min. operating pressure 0.3 MPa Ambient and fluid temperatures 10 to 60C (No freezing) Cushion Clamping side: None Unclamping side: Rubber bumper Operating time Clamping: 1 sec. or more, Unclamping: 1 sec. or more Max. allowable clamping moment*1 800 Nm 1500

Sine Cylinder Series REC

st: JIS Symbol Standard Stroke Maximum manufacturable stroke (mm) Minimum stroke (1) Bore size (mm) Standard stroke (2) (Recommended) (mm) 20 150 Up to 700 25 150 Up to 700 1500 32 150 Up to 1000 40 200 Up to 1000 Note 1) The cylinder performance may not as expected when stroke is longer than recommended stroke even they are available.

CP95

32 700 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500

15

Outside of cylinder tube with hard chrome plated 32 Non-lubricated exterior (with dust seal) 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 1500 40 Switch rails on both sides (with 2 pcs.)

Air Cooled Aftercooler Series HAA 1

Fan motor Outlet thermometer Model Selection (Flow Capacity l/min (ANR)) HAA7 HAA15 HAA22 HAA37 Model Outlet side air (COOL AIR) 50C 70C 100C 1000 1500 700 2200 4000 1500 3300 6000 2200 5700 13000 Inlet air temperature 4300 Cooling side air Cooler Conditions: Outlet temperature 40C, Ambient temperature 32C, Air pressure 0.7 MPa Drain 14-15-1 2 Series HAA How to Order Precautions 15 10 D 1