CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) D-M9 D-M9W D-A9 Hs Hs Auto switch Auto switch 16.5 16.5 A 22 B A 24.5 B A and B are the dimensions from the end of the head cover/ rod cover to the end of the auto switch. A and B are the dimensions from the end of the head cover/ rod cover to the end of the auto switch.

SV

12.5) L1 58.4 60.9 3/5 3/5 E E 4 A 4 A 4 A 4 A 85.4 101.2 105.7 MAX.21 98.7 2 B 2 B 2 B 2 B (Station n) (Station 1) P 1 P 1 5 3 E 1 P Light/Surge voltage suppressor 1 1 Individual SUP spacer SV3000-00Interface regulator 82.7 Individual EXH spacer 63.8 75 SV3000-M1Interface regulator 12 (10) (For DIN rail mounting) B B B B 157.9 14.7 139.9 A A A A B A B A B A B A L Dimension n: Stations L

Compact Cylinder with Solenoid Valve/

W A A A B (mm) D-A9V D-A9 D-M9 D-M9W D-M9V D-M9WV A B A B Bore size (mm) W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 42 10 <15> 10.5 8.5 (6) 10 <15> 10.5 36.5 16.5 17.5 7.5 16.5 17.5 42 12.5 13.5 11.5 (9) 12.5 13.5 40 [ ]: Values for 5 mm stroke with 32 < >: Values for

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Duty ratio: 75% 0 0 0 5 10 20 30 15 25 0 5 10 15 Work load [kg] Work load [kg] LEJS40A LEJS63A 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] The value of 50% or less is the same as duty ratio 50% Duty ratio: 50% 15000 15000 Duty ratio: 50% Duty ratio: 25% 10 10 Duty ratio: 100% 5000 5000 Duty ratio: 100% Duty ratio: 75% Duty ratio: 75% 0 0 0 10 20 30 0 10 20 30

CXT

Long stroke (mm) Slide bearing Standard stroke Long stroke Ball bushing bearing Standard stroke Long stroke X Y Z Bore size (mm) Stroke range (mm) SCXT Tube bore size A, #1(#1+#3) SCXT Tube bore size B, #1(#1+#3) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 SCXT Tube bore size A, #2(#2+#3) SCXT Tube bore size B, #2(#2+#3) 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150,

Vacuum Unit

C A B C A B C A B C A Black For supply valve (,+) + + + ZK2-ZSmBmm-A (PNP 2 outputs) + Pilot valve for supply + B C A LED (Red) White White White White Pilot valve for supply + Pilot valve for release Pilot valve for release + Pilot valve for release Pilot valve for release + B C A + + White White Connector cord assembly (ZK2-LWA20-A) Connector cord assembly (ZK2-LWB20-A) Brown

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

60 79 99 6.6 8 42 52 FV 25 10 to 50,75,100 84.5 106.5 5.5 8 48 56 30 10 to 50,75,100 104 126 5.5 8 54 62 FT FX 40 L B + Stroke 10 to 50,75,100 104 126 6.6 9 67 76 FZ A + Stroke 2-FD Bore size (mm) FZ L M 25, 30, 40 10 55 18 16 60 20 20 64 20 FV 25 65 22 34 30 72 22 40 FT FX 40 89 22 50 (mm) L B + Stroke FZ A + Stroke Bore size (mm) Stroke range (mm) 4-FD A L 10 10 to 40 8 75 Rear flange

REC

258-9200-www.stevenengineering.com Standard port RHC (mm) MK(2) 2-7 A AL B B1 B2 D F FT FX FY FZ G H E Bore (mm) Stroke range Mounting hole 0 0.033 0 0.033 0 0.033 0 0.039 20 Up to 700 18 15.5 34 13 26 8 13 4 60 75 10 41 20 RS Q G FX 25 Up to 700 22 19.5 40 17 32 10 13 4 60 75 10 45 26 32 Up to 1000 22 19.5 40 17 32 12 13 4 60 75 11 45 26 20, 25, 32 RS H A 40 Up to 1000 24 21 52 22 41

CXT

state switch HS A B D-F7V D-J79C D-F7WV D-F7BAVL D-A7 D-A80 D-A73C D-A80C D-A79W 32, 40 D-A7 D-A80 D-A73C D-A80C D-A79W D-F7V D-F7BAVL D-F7WV D-J79C Auto switch model A B Hs A B Hs A B Hs A B Hs A B Hs Symbol Standard Stroke Bore size (mm) 32 40 38.5 42 38 41.5 6.5 9 6.5 9 6 (6.5) 9.5 13.5 3.5 6 34 37.5 9.5 13.5 6.5 9 35 38.5 9 (9.5) 31.5 35 6.5 10.5 9.5 13.5 8.5 (9) 13 (13.5) Long Stroke

240

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

Series SV

One-touch fitting [X: External pilot port] Applicable tubing O.D.: 6 N7 One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.: 6 N7 Rc 1/4, 3/8 [4(A), 2(B) port] L3 (L4) U side D side L5 47.3 4-6.2 (for mounting) (5.4) [for Rc 1/4, 3/8] DIN rail holding screw (for DIN rail mounting) 13.3 81.7 75 B B B B B 8 164.7 148.2 5.5 35 A A A A A 98.2 A B A B 1 2 3 4 5 6 7 8 9 10 11 12 13 14

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Type S3: Side ported (Lead wire length) 91.7[96.1] Approx. 300 10-SS5YJ3-S31Stations -M3 L1 3.5 L2 2-3.5 (For mounting) Manual override M5 x 0.8 (P, R port) 5.2 29.2 7.5 17.3 30 52.2[54.4] 51.4[53.6] 3 91.7[96.1] 78.8[83.2] 78.8[83.2] A A A A A 13.5 B B B B B P R P R P R 29.2 P R 30 17.3 25 7.5 12 25 51.4[53.6] 52.2[54.4] 13.5 B B B B B A A A A A 3 5.2 2-3.5 (For mounting) Manual override

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

Table of Contents

B 1.8 1.6 Groove position of auto switch A 10.4 12.8 Model MHK2-12 MHK2-16 A B Dimensions A and B of other models are same as standard switch grooves.

MY1

Side support B MY-S B 2-J E A B C D Model A 35 43 53 61 70 87 113 136 170 206 B 43.6 53.6 65.6 75 84 105 131 158 200 236 C 12 15 25 D 21 26 38 E 3.6 4.9 6.4 F 1.8 3 4 G 6.5 6.5 8 H 3.4 3.4 4.5 J M4 x 0.7 M4 x 0.7 M5 x 0.8 Applicable cylinder MY1B 10 MY1B 16 MY1B 20 MY1B 25 MY1B 32 MY1B 40 MY1B 50 MY1B 63 MY1B 80 MY1B100 A B A B A B MY-S10 MY-S16 MY-S20 A B MY-S25 35 50 8 5 9.5 5.5 M6 x 1

Table of Contents

button Body O-ring Seal Stud Port B Port B Port B Port B Seal Guide Chuck Guide Chuck Collet Collet Port A Release button Port A 15-3-6 2 FR One-touch Fittings Manifold Series KRM Dimensions: KRM11 2-FB Applicable tubing O.D.

MY1

MTS Side support B MY-SB MY CY 2-J MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX E A B C D D(mm) -X Model Applicable bore size A B C 12 15 25 D E F G H J M4 x 0.7 M4 x 0.7 M5 x 0.8 A B A B A B MY-S10 MY-S16 MY-S20 43.6 53.6 65.6 75 84 105 131 158 200 236 MY1B10

Compact Cylinder

B (Mounting groove no.) C (Mounting groove no.)

Rotary Cylinder Series MRQ Size: 32, 40 1

Find the moment of inertia IB for the rotation of shaft (B). 2. Next, IB is entered to find IA the moment of inertia for the rotation of shaft (A) as a + b 2 2 A = ( ) b a 2 B = m 12 No. of teeth = b 11-10-3 4 Technical Data 3: Theoretical Output 5.