Slider Type Ball Screw Drive/11-LEFS Series

6.5 79 20 30 60 46.8 Motor cable (2 x 5) 14.9 Vacuum port Rc1/8 7.5 M4 x 0.7 thread depth 8 (F.G. terminal) Motor option: With lock Step motor Cable length 250 (194) 15 65 20 20 Lock cable (3.5) 20 ( ) 5H9 depth 5 +0.030 0 n x 5.5 6 60 150 D x 150 (= E) B 15 15 Note 1) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be

Compact

(1100), (1200), (1300), (1400), (1500) Page 170 2000 20 32 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) Page 170 2000 25 10 LEMHT Linear guide double axis type 48 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000), (1100), (1200), (1300), (1400), (1500) Page 170 32 2000 20 Strokes shown in ( ) are produced upon

240

7 to 10 25 to 50 12.5 to 25 Compact 24 to 40 12 to 20 Horizontal Basic 2.0 1.0 6.0 3.0 Compact 4.0 2.0 Work load [kg] Note 2) Note 3) Note 6) Vertical Basic 0.5 0.25 1.5 1.0 Compact 1.5 1.0 Actuator specifications Horizontal Basic 10 to 150 20 to 300 Note 4) 10 to 200 20 to 350 Note 4) Compact 10 to 200 20 to 350 Note 4) Speed [mm/s] Note 3) Note 6) Vertical Basic 10 to 150 20 to

C95

See page 6-12-9 for dimensions. 20Mounting Accessory, Rod Data Rod clevis ISO 8140 Piston rod ball joint ISO 8139 Floating joint GKM KJ JA Bore size (mm) Supplied with bolts and safety devices 32 GKM10-20 KJ10D JA30-10-125 40 GKM12-24 KJ12D JA40-12-125 50 GKM16-32 KJ16D JA50-16-150 63 GKM16-32 KJ16D JA50-16-150 80 GKM20-40 KJ20D JAH50-20-150 100 GKM20-40 KJ20D JAH50-20-150 See page 6-12-11

Hydraulic

D-A5, D-A6 10 110 110 115 125 135 145 Same side 10 1 pc. 20 Different sides 2 pcs. D-A59W 20 115 115 125 130 140 150 Same side 1 pc. 15 10 Different sides 2 pcs. D-F5, D-J5 10 115 115 120 130 140 150 Same side 1 pc. 10 10 Different sides D-F5W, D-J5W D-F5BAL 2 pcs. 10 120 120 120 135 140 150 Same side 1 pc. 10 10 Different sides 2 pcs.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

16 (20) 16 (20) 26 31 38 47 58 72 89 110 M4 x 0.7 depth 7 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 0 0 0 23 23 20 20 20 114 (122) 119 (127) 121 (129) 130 (139) 150 (162) 150 (162) 182 (196) 182 (196) Up to 200 201 to 1500 6 8 10 14 18 18 22 26 8 10 12 16 20 20 25 30 18 22 22 30 35 35 40 40 5 6 6 8 11 11 13 16 77 (85

ZP

8 14 40 33 20 52 7 17 150 250 155 40 4 x 14 4 x 9 88 4 x 16 4 x 10 34 Symbol/Type HB: Heavy-duty (Bellows) Heavy-duty Pad 32, 150 Pad diameter For heavy or large work pieces How to Order ZP2 32 HB N Pad unit Pad diameter Pad material Symbol Pad diameter 32 150 Symbol Material NBR Silicone rubber FKM CR 32 150 N S F C Note) Silicone rubber is only applicable to the 32 pad.

Series AP500

0.14 30 0.21 20 0.14 10 0.07 0 10 0.00 0.07 0 0.00 0 100 200 300 400 500 600 Flow rate (slpm, N2) 0 50 100 150 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

JIS Standard Hydraulic Cylinder

x 1.5 C B-series M6 x 1.0 M8 x 1.25 40 145 115 75 60 E 31.5 30 20 24 M30 x 1.5 dH10 L L M6 x 1.0 M8 x 1.25 40 145 115 75 60 31.5 30 20 24 M39 x 1.5 M8 x 1.25 M10 x 1.5 50 185 145 95 80 40 40 25 26 M48 x 1.5 H +0.4 +0.1 D M5 x 0.8 M6 x 1.0 25 76 60 41 32 16 16 12.5 20 M16 x 1.5 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 20 16 20 M20 x 1.5 B J M6 x 1.0 M8 x 1.25 40 145 115 75 60 31.5 30 20 24 C-series

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

40 40 34 17 17 13 60 60 60 40 32 25 20 20-0.033 FX 26-0.033 0 82 36 75 75 26-0.033 0 20, 25 and 32 22 200 to 1000 32-0.039 0 66 21 52 247 217 204 200 191 P S H2 H1 Bore size MM 8 6 6 5 N I K ZZ Z NN NA Stroke range 40 32 25 20 26.5 22 20 20 51 42.5 34.5 30 236 181 159 146 146 7 200 to 1000 150 to 1000 150 to 700 150 to 700 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 M32 x 2 M26 x 1.5 M26 x

SZ3000

(up to 24 solenoids possible) 20 20 20 stations 20 stations Connector mounting position Mounting position Symbol D PG: Flat cable connector (20 pins) PH: Flat cable connector (10 pins) D Side Note Symbol 02 Note Symbol 02 Stations Stations 2 stations 2 stations ... ... ... ...

Table of Contents

20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

2 Phase Stepper Motor/Without Motor Brake Series LXP

(A contact) 50mm 75mm 100mm 125mm 150mm 170mm 200mm 50 75 100 125 150 170 200 N.O. (A contact) Use a driver with CE marking.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

, 30, 40, 50 Long stroke CX CXSW 6 CXSW10 CXSW15 CXSW20 CXSW25 CXWS32 D10, 20, 30, 40, 50 75, 100, 125, 150 -X 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200 For long strokes, it will be made-to-order.

CHKD/CHKG

) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100

7

20 15 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 35 15 18 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 20 20 20 20 57 40 17 17 A 19.5 0.2 0.5 25 15 45 45 60 60 Material: Cast iron Unit: mm Material: Cast iron Part no.

SZ3000

137.5 118 15 160.5 150 128.5 16 173 162.5 139 17 173 162.5 149.5 12 185.5 175 160 13 123 112.5 97 13 135.5 125 107.5 14 External Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 L3 L4 135.5 125 107.5 14 148 137.5 118 15 160.5 150 128.5 16 173 162.5 139 17 173 162.5 149.5 12 185.5 175 160 13 198 187.5 170.5 14 210.5 200 181 15 223

Series VQ Metal Seal/Rubber Seal Body Ported

Load factor 50% Piping length 5m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 4.5 (0.25) VQ1000 (Metal seal) 6 6.3 (0.35) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore

Lightweight and Compact

min 30 s 20 s Max.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(up to 24 solenoids possible) D side 20 20 20 stations 20 stations Connector entry direction PG: Flat cable connector (20 pins) PH: Flat cable connector (10 pins) 1: Perpendicular connector 2: Lateral connector Note Symbol 02 Note Symbol 02 Stations Stations 2 stations 2 stations Double wiring specification Double wiring specification ... ... ... ... 09 10 04 05 9 stations 4 stations 10 stations