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YLINDER SIZING Y L I N D E R F O R C E heoretlcel Force Linear cylinders have the following standard diameters as rcommended in ISO: 8, 10, 12, 16,20,25,32,40, 50, 63, 80, 100, 125, 140, 160, 200, 250, 320 mm The force developed by a cylinder is a function of the piston diameter, the operating air pressure and the resistance.

CHKD/CHKG

140 175 165 200 190 225 215 250 240 50 156 145 181 170 206 195 231 220 256 245 63 165 152 190 177 215 202 240 227 265 252 80 180 163 205 188 230 213 255 238 280 263 B 100 207 181 232 206 257 231 282 256 307 281 A Note) Dimensions other than those highlighted above are standard.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Double acting, Single rod 25, 50, 75, 100, 125, 150 1/8 25, 50, 75, 100, 125, 150, 200 1/4 25, 50, 75, 100, 125, 150, 200, 250, 300 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing

MLGC

13 70 94 11 35 32 50 6.8 11 depth 8 28 16.5 M6 X 1depth12 135 73.5 26.5 118 16 75 15 40 37 50 8.6 14 depth 10 29 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 75, 100, 125, 150, 200, 250, 300 MXP 16 75 15 40 37 50 8.6 14 depth 10 30 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 19 18 45 42 80 17 depth 12 35 142 22 M10 X 1.5 depth20 194 170 110 95 37 10.5 MG Bore size (mm) H GR GQ GL O GK J N

Stability of suction position,

Pad diameter [mm] 32 40 50 63 80 100 125 S: Pad area [cm2] 8.04 12.56 19.63 31.16 50.24 78.50 122.66 XT661 85 68.3 107 167 265 427 667 1043 80 64.3 100 157 249 402 628 981 75 60.3 94.2 147 234 377 589 920 70 56.3 87.9 137 218 352 550 859 65 52.2 81.6 128 203 327 510 797 60 48.2 75.4 118 187 301 471 736 55 44.2 69.1 108 171 276 432 675 50 40.2 62.8 98.1 156 251 393 613 45 36.2 56.5 88.3 140

Fluoropolymer Piping Equipment

160 180 200 0 0 20 40 60 80 100 120 140 160 180 200 Temperature (C) Temperature (C) 942 LQ1/LQ3/LVN/LQHB Series Applicable Fluids Material and fluid compatibility check list for high purity fluoropolymer fittings Chemical Compatibility LVC Acetic acid 100% LVA Acetone 100% Note 1,2) LVH Ammonium fluoride 40% Ammonium hydroxide 30% LVD Butyl acetate 100% LVQ Methylne chloride 100% LVP

VNB

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Valve type Port size Rated voltage Valve size 3 2 1 100 VAC 50/60 Hz Symbol Nil: Non-locking push type Orifice size (mm) Symbol Port size Rc 1 2 3 Note) 4 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Symbol N.C. 1 MPa N.C. 0.5 MPa N.O. C.O.

VNC

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Valve type Port size Rated voltage Valve size A: Non-locking extended type Nil Air operated Symbol Orifice size (mm) Symbol Port size Rc Valve size 1 1 2 4 1 2 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Symbol N.C. 0.5 MPa N.O

Table of Contents

Series CQ2 Compact Cylinder: Large Bore Size Type Double Acting, Single Rod 125, 140, 160, 180, 200. How to Order . Precautions. Specifications. Construction. Dimensions . Series CQ2W Compact Cylinder: Large Bore Size Type Double Acting, Double Rod 125, 140, 160, 180, 200 . How to Order . Precautions. Specifications. Construction. Dimensions .

VQC

Bore size Series CJ2 Pressure 0.5 MPa Load ratio 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm Series MB, CA Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load ratio 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQC1000

Compact Cylinder with Lock Series CLQ

165 85 90 95 100 105 110 115 120 125 150 175 90 95 100 105 110 115 120 125 130 155 180 100 105 110 115 120 125 130 135 140 165 190 110 115 120 125 130 135 140 145 150 175 200 125 130 135 140 145 150 155 160 165 190 215 CDLQB20-5D CDLQB32-10D CDLQB50-10D CDLQB80-10D -10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D -30D -30D -30D 10.5 -30D -35D -35D -35D 12.5 17 7 -35D -40D

MLGP

, 175, 200, 250, 300, 350 167.5 66 76.5 111.5 19 64.2 55.5 WA Bore size (mm) JB L ML T U VA VB OA OB PA PB PW R S K Q MM NN st 25 st 50 25 < st 100 50 < st 100 100 < st 200 200 < st 300 300 < st 350 80 100 46 56 54 62 7.5 25 31 10.6 17.5 14.5 25.5 32.5 74 89 52 64 174 210 75 90 198 180 210 140 166 28 50 128 124 200 200 300 300 52 72 156 188 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5

MLGP

, 175, 200, 250, 300, 350 167.5 66 76.5 111.5 19 64.2 55.5 WA Bore size (mm) JB K Q R S L ML T U VA VB OA OB PA PB PW MM NN st 25 st 50 25 < st 100 50 < st 100 100 < st 200 200 < st 300 300 < st 350 80 100 7.5 46 56 54 62 25 31 10.6 17.5 14.5 25.5 32.5 74 89 52 64 174 210 75 90 198 180 210 140 166 28 50 128 124 200 200 300 300 52 72 156 188 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

7 5.5 32 2 14 44 40 Up to 200 7 6.6 38 2 18 53 40 Up to 200 8 6.6 46 2 25 61 50 End boss is machined on the flange for E.

Thermo-chiller/Rack Mount Type

(Pending for UL Standards) 1000/1100 200/200 Watercooled refrigeration Anti-quake bracket4 Single-phase 100 VAC (50/60 Hz)/ 115 VAC (60 Hz) Single-phase 200 to 230 VAC (50/60 Hz) Concentration meter HRR012 1000/1200 400/500 (100 V type) 450/500 (200 V type) Air-cooled refrigeration With electric conductivity control function, Applicable to DI water piping HRR018 1600/1800

Cylinder with Lock

[mm] Bore size Standard stroke Max. stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160

HRX-OM-Q026

HRSH150/200-A: 2 pcs. are used per unit HRS-S0214 Dust-proof filter (Upper) 1 pc. HRSH100/150/200-A: 2 pcs. are used per unit HRS-S0185 Dust-proof filter 1 pc.

SX

100 0 SX3140-01 900 800 700 600 500 400 300 200 100 0 SX5140-02 900 800 700 600 500 400 300 200 100 0 SX7140-03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

Series CQ2

variations A wide range of 15 sizes from 12 to 200 Bore size (mm) Compact cylinder series 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 CQ2 Large bore CQ2 CQS Refer to N320 "CQ2" and CAT.E256-A "CQS" regarding series marked with a "" symbol.

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/