Air Fittings & Tubing

Hexagon socket head male connector 1 4 KQS 3 8 1 2 1 8 45 Male elbow 1 4 KQK 3 8 1 2 1 8 Universal male elbow 1 4 KQV 3 8 1 2 2.5-6

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VR VH Body ported single solenoid Foot bracket VFA3122 F 02 VHS Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size For 50 type manifold VFA3 1 50 W/o sub-plate (Pilot port: Rc) Nil W/o sub-plate (Pilot port: Other than Rc) Thread type for pilot port 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil 00F 00N 00T Rc G NPT NPTF

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

ZP

64.5 77 50 151.5 74.5 N S U F GN GS 20 25 23 J K ZP T U 10 58 35 23 20 96 45 51 30 106 55 40 142 65 77 50 152 75 32 23.5 10 B5 B01 N01 T01 06 08 N6 U6 94.5 44.5 20 104.5 54.5 30 114.5 64.5 50 159.5 84.5 75 50 40 32 A14 4 M14 x 1 19 4 12 M8 x 1.25 10 95.5 45.5 33 50 20 105.5 55.5 30 115.5 65.5 50 160.5 85.5 75 50 Dimensions Per Vacuum Inlet: Female Thread Model L M N P Vacuum inlet direction

MQQ

FD FT FV FX 10 to 40 79.5 61.5 4.5 5.5 30 45 10 FV 10 to 60 90.5 70.5 6.6 8 39 48 16 10 to 60 99 79 6.6 8 42 52 20 FX FT 10 to 50, 75, 100 106.5 84.5 5.5 8 48 56 25 B + Stroke L FZ 10 to 50, 75, 100 126 104 5.5 8 54 62 28 2-FD A + Stroke 25, 28 Bore size (mm) FZ L M 55 18 10 60 20 16 FV 64 20 20 65 22 34 25 72 22 FT 40 28 FX B + Stroke L FZ A + Stroke 4-FD Rear flange type/MQQLG 10, 16

ZP

(mm) 2 to 8 0.8 N 1.2 N 1.0 N 3.0 N 2.0 N Refer to 2 to 8 for Thin flat, Thin flat with ribs and Elipse type. 0 stroke Stroke end 5.0 N 10 to 32 40, 50 Weight (g) Stroke (mm) Model Pad form Flat/ Flat with ribs Deep Bellows ZPY2004 ZPY3507 ZPY4010 ZPY02 to 08 ZPY10 to 16 (Thin section series) 33 6 33 ZPY 10 to 16 10 45 45 46 10 ZPY 20 25 50 51 53 ZPY 32 40 50 ZPY ZPY 52 115 58 127 134

Thermo-chiller/Rack Mount Type

/60 Hz)3 [W] 5000/5900 Heating capacity (50/60 Hz)3 [W] 1000/1200 Temperature stability4 [C] 0.1 Pump capacity (50/60 Hz)5 [MPa] 0.34 (at 15 L/min)/0.34 (at 23 L/min) Rated flow (50/60 Hz)6 [L/min] 15/23 Flow display range20 [L/min] 5 to 40 Electric conductivity display range [S/cm] 0.1 to 48 (Only for Option DM) Electric conductivity setting range [S/cm] 0.5 to 45 (Only for Option DM) Particle

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

60 50 100V AC Hz 110V AC Hz 200V AC Hz 220V AC Hz Closed center Exhaust center Pressure center 60 50 60 M5 X 0.8: 1.8(0.1) 50 60 (1) AC Push-turnlocking slotted style With light and surge voltage suppressor SYJ5000 Rc(PT)1/8: 4.5(0.25) SYJ7000 Rc(PT)1/8, 1/4: 12.6(0.7) Note 1) All AC voltage models have built-in surge voltage suppressor. 1.2-2 Series SYJ3000/5000/7000 Manifold Variations

CJ2X/CUX/CQSX/CQ2X/CM2X

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both

CJ2X/CUX/CQSX/CQ2X/CM2X

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both

CLQ

CLQ 157 245 402 629 982 1559 2513 3927 M5 x 0.8 Rc 1/8 Rc 1/4 MLGP Symbol Specifications Equivalent to 0.5 MPa -XA Change of rod end shape RLQ Standard Stroke MLU Bore size (mm) Standard stroke (mm) 20, 25 32, 40, 50, 63, 80, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 ML1C DManufacture of Intermediate Stroke -X Description Part no.

CLQ

Note Holding force N (Maximum static load) Equivalent to 0.5MPa Switch mounting screw (M3 x 0.5 x 10l) 32, 40 50, 63 80, 100 BQ-2 Standard Strokes Switch spacer Switch mounting nut Standard stroke (m) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Bore size (mm) 20, 25 32, 40, 50, 63, 80, 100 Applicable switch Reed switch Solid state switch D-F7/J79 D-F7V

Compact Cylinder with Lock Series CLQ

Note Holding force N (Maximum static load) Equivalent to 0.5MPa Switch mounting screw (M3 x 0.5 x 10l) 32, 40 50, 63 80, 100 BQ-2 Standard Strokes Switch spacer Switch mounting nut Standard stroke (m) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Bore size (mm) 20, 25 32, 40, 50, 63, 80, 100 Applicable switch Reed switch Solid state switch D-F7/J79 D-F7V

Slider Type Ball Screw Drive/11-LEFS Series

to 500 50 to 600 50 to 800 150 to 1000 LECP6/LECP1/LECPMJ 14 15 25 30 45 50 55 65 Horizontal Note 2) Work load [kg] LECPA 9 10 20 20 40 45 50 60 Vertical 2 4 7.5 15 10 20 2 23 Speed [mm/s] Note 2) 10 to 500 5 to 250 12 to 500 6 to 250 16 to 500 8 to 250 20 to 500 10 to 250 Max. acceleration/deceleration [mm/s2] 3000 Actuator specifications Positioning repeatability [mm] Basic type 0.02 High

Vacuum System Peripherals:

5 45 45 45 M5 x 0.8 ZX 1 8 1 4 , , , , 1 4 3 8 1 4 3 8 1 2 ZR 3 4 3 4 , 1 1 ZM Inlet pressure 0.7 MPa, Pressure drop 0.05 MPa ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Modular, Regulator Series AR Flow rate (l/min (ANR)) Set pressure (MPa) Pressure

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Mounting same side MGC D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 50+45(n2) 50 15 10 15+45( n2 ) (n=2, 4, 6) MGF 2 60+45(n2) 60 15 10 CY1 15+50( n2 ) (n=2, 4, 6) MY1 2 65 15 10 65+50(n2) 20+50( n2 ) (n=2, 4, 6) 2 65 20 D-H7LF 10 15+50( n2 ) (n=2, 4, 6) 2 D-B5/B6 D-G5NTL 10 75 15 75+55(n2) 20+50( n2 ) (n=2, 4, 6) 2 15 75 20 D-B59W D-A3A D-G39A D-K39A D-A44A 10 100+100(n2) 35+30

Series PF2W Digital Flow Switch For Water

) and ethylene glycol (50%) 1.7 to 17.0 L/min 1.7 to 17.0 L/min 2 to 16 L/min 0.1 L/min 0.1 L/pulse 0 to 90C (with no cavitation) 5% F.S. 3% F.S. 5% F.S. (0 to 90C, 25C reference) 70 mA or less 710 g 3/8, 1/2 Karman vortex 3-digit, 7-segment LED L/min, gal(US)/min L, gal(US) 0 to 1 MPa 1.5 MPa 0 to 9 L 3.5 to 45 L/min 3.5 to 45 L/min 5 to 40 L/min 0.5 L/min 0.5 L/pulse 0.35 to 4.5 L/min 0.35

SMC Pneumatic Clean Series

117 29 1/8 44 111 27 1/8 38 104 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 5.5, 9.5 counterbore depth 6 6.6, 11 counterbore depth 7 9, 14 counterbore depth 9 11, 17.5 counterbore depth 12 18 18 58 64.5 19 17 155 12 12 27 20 45 11 2 7 114 108 62 39 33 12 12 63 Up to 300 35 32 32 27 20 11 45 2 7 72 76.6 50 Up to 300 35 32 30 M18 x 1.5 M18 x 1.5 44 1/4 46 41 50 1/4 64 161

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 220 VAC 50/60 Hz [230 VAC 50/60 Hz] With surge voltage suppressor (Non-polar type) T With light/surge voltage suppressor (Non-polar type) With surge voltage suppressor (Non-polar type) Power saving circuit is not available for W type.

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ZPRI6Il is_ f8 .16 25 33. 50 5 I 6 '7 , ZPRlOO 1 0 1 2 15 24 32.9 49 5 6 6 51 , 50 51 51 50 48 ZPR25 I 48 51 50 48 Appl/cable tube (mm) .P Applicable tube 0 .0 Q ' R .s ,.4 4 20.6 15.6 16.6 ZPR32 ZPR40 56 54 56 54 57 55 56 54 lOA 12.8 ,.6 6 .21.6 ZI!