Series AP500

80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) AP1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 70 0.48 60 0.41 Delivery pressure (MPa) Delivery pressure (psig) 50 0.34 Connections A 40 0.28 (mm) inch FV4 MV4 TW4 FV6 MV6 TW6 (94.0) 3.70 30 0.21 2.96 (75.2) 20 0.14 4.70 (119.4) 10 0.07 2.96 (75.2) 0 0.00 0 20 40 60 80 100 120 140 160

Compact Type

22 11 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 0.8 with depth 7.5 25 2-M6 1.0 73 29 87 71 27 13.5 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 0.8 with depth 7.5 32 2-M6 1.0 94 37 100.5 92 35 17.5 75 45 8 16 4 30 16 18.5 56 80.5 10 Symbol Z Stroke 10.20 30.40.50 Bore size (mm) 75 100 15 20 25 32 25 35 45 55 30 40 60 60 30 40 60 60 40 50 70 70 13 Compact Type Dual-Rod Cylinder Series CXSJ Proper

Compact Type Dual-Rod Cylinder Series CXSJ

22 11 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 0.8 with depth 7.5 25 2-M6 1.0 73 29 87 71 27 13.5 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 0.8 with depth 7.5 32 2-M6 1.0 94 37 100.5 92 35 17.5 75 45 8 16 4 30 16 18.5 56 80.5 10 Symbol Z Stroke 10.20 30.40.50 Bore size (mm) 75 100 15 20 25 32 25 35 45 55 30 40 60 60 30 40 60 60 40 50 70 70 13 Compact Type Dual-Rod Cylinder Series CXSJ

VZ100/300/500

(V) 24, 6, 12, 48 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Body ported Allowable voltage fluctuation (%) Power consumption (W) [Current mA] DC Note) 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC Holding 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

GE H Size 10 20 30 50 55.4 50 9.5 34.5 27.8 60 4.5 28.5 45 46 20H9 5 15H9 52.9 44.3 33.5 14 97.2 80 8 4 3 4.5 20 15.6 11 7.5 45.2 13 70.8 65 12 46 30 76 6 30.5 60 61 28H9 9 17H9 61.8 55.3 43 18 117.1 100 10 6 2.5 6.5 25 19.5 14 9.5 56.4 17 75.4 70 12 50 32 84 6.5 33.5 65 67 32H9 9 22H9 63.1 60.3 46 19.5 123.4 110 10 4.5 3 6.5 27 21.5 14 9.5 61.5 17 85.4 80 15.5 63 37.5 100 10 37.5 75 77

Rotary Table/

61 60 28 40 22 6 65 67 65 32 48 19.5 30 6 76 13.5 67 65 32 48 22 6 68 77 75 35 54 21.5 34 7 87 15.5 77 75 35 54 24 7 77 Dimensions other than above are identical to the high precision type.

Shock Absorbers and Rate Controls

UN .75 1.98 5.50 |,l/A 1.50 1.15 N/A N/A Pn?r 00rt t2.9 rI.) 2.48tln ?Yr-l? ul .75 L98 2.257.50 [/A 1.503.75NlA r{/A Pl 2t 50tt t, -2, .3 t7.9i18.62 2.48{ln 2Y2'12 UN .75 2.38 2.38 9.50 N/A t.50 4.15 N/A N/A All dimensions in nches. Sh*ck Absorbens Non-Adjustable Hydraulic Series qigfE.

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Series SV

How to Order Relay output module SV 000 60 A 5 1A Light window Number of outputs Series A B 1 output 2 outputs 1 2 3 SV1000 SV2000 SV3000 Rated voltage 5 6 24VDC 12VDC Note that serial wiring manifolds (EX500, EX250 and EX120) are available with 24VDC only.

C76

15 60 + 45(n 2) 6-10-21 22 Series C76 Construction [First angle projection] Single acting, Single rod C7632/40-50S Spring return 50 mm stroke or less !

C76

60 + 45(n 2) 15 6-10-21 22 Series C76 Construction [First angle projection] Single acting, Single rod C7632/40-50S Spring return 50 mm stroke or less !

Vacuum System Peripherals:

Solenoid valve rated voltage 5 12 VDC 24 VDC 6 V S R 1 Slotted locking type Non-locking push type Manual override 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 110 VAC 50/60 Hz 3 Nil Number of stations w-2 Individual specifications (Symbol , , , , ) Indicate X for required station.

Table of Contents

Dimensions . 46 47 48 50 52 52 53 54 54 55 55 56 57 58 60 60 60 61 62 63 65 65 65 66 66 67 67 68 69 69 70 70 71 72 73 75 75 75 77 77 78 78 78 79 80 82 84 84 84 85 86 87 87 88 89 90 Series AS * 2 * 0-D Speed Controller Adjustable by Flat Head Screwdriver: Standard Type Elbow Type \(Metal Body\) . Specifications. How to Order . Construction. Dimensions .

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(When using 10-SS5Y-60-D, block disk is assembled on D side.) sheet. (When using 10-SS5Y-60-D, block disk is assembled on D side.)

ZP

(for Heavy-duty) Adapter assembly model Applicable pad model Series ZP Page ZP40HB ZP50HB ZP40H ZP50H ZPA-T1-B P. 75 ZP63HB ZP80HB ZP63H ZP80H ZPA-T2-B P. 75 ZP100HB ZP125HB ZP100H ZP125H ZPA-T3-B P. 75 ZP40HB ZP50HB ZP40H ZP50H ZPA-T101 P. 75 ZP63HB ZP80HB ZP63H ZP80H ZPA-T201 P. 75 ZP100HB ZP125HB ZP100H ZP125H ZPA-T301 P. 75 ZP40HB ZP50HB ZP40H ZP50H ZPA-X101-B P. 76 ZP63HB ZP80HB ZP63H

3 Port Solenoid Valve Metal Seal Series VZ200 1

5 Pilot valve assembly How to Order Pilot Valve Assembly SCZ2 G 1 1 Rated voltage Series VZ200 1 100 VAC, 50/60 Hz Pilot pressure exhaust Manual override Electrical entry 2 200 VAC, 50/60 Hz 1 Spacer side exhaust (Type 20) 3 110 VAC, 50/60 Hz Nil Push type (Safety style) G H L LN L plug connector With lead wire 600 mm lead wire 300 mm lead wire 4 220 VAC, 50/60 Hz Grommet B Locking type

MGQ

, 40, 50, 75, 100, 125, 150, 175, 200 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 26 64 17 10 19 52 74 2 8.5 4 46 36 72 8 30 10 60 37 13 18 47 8 M5 x 0.8 13 M5 x 0.8 7 M5 x 0.8 Rc 1/8 10.5 32 76 21 10 21 62 88 2 9 2 56 42 86 8 38 12 70 37.5 14 26 47.5 9 M6 x 1.0 15 M6 x 1.0 8 M6 x 1.0 Rc 1/8 11.5 MGQM (Slide bearing) A, DB, E Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E

MGC

Data View A-A Mounting dimensions Bore size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA A 20 25 32 40 50 75, 100, 125, 150, 200 25 38 80 60 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 32 46 95 70 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 75, 100 125, 150 200, 250 300 32 50 105 80 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 38 60 125 95

MTS

Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 35 26 79 59 141 105 220 165 343 251 563 422 879 659 30 22 68 50 121 90 188 141 294 215 482 362 754 565 25 19 57 42 101 75 157 118 245 179 402 302 628 471 20 15 45 34 80 60 126 94 196 143 322 241 502 377 15 11 34 25 60 45 94 71 147 107 241 181

MGC

, 100, 125, 150, 200 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 25 38 80 60 MGP 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 32 46 95 70 75, 100 125, 150 200, 250 300 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 32 50 105 80 MGQ 70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 38 60 125 95 45 194 42 M10 200 95 12 11 135 115 210 190 82.5 19 23 142 50 75 150 115 MGG