Vacuum Filter AFJ Series

rating: 40 m Large flow type Nominal filtration rating: 40 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 80 m 80 m AFJ20-02-80-S/AFJ30-03-80-S/AFJ40-04-80-S AFJ20-02-80-T/AFJ30-03-80-T/AFJ40-04-80-T 12 12 AFJ20-02-80-T AFJ30-03-80-T AFJ20-02-80-S AFJ30-03-80-S AFJ40-04-80-S 10 10 Pressure drop [kPa] Pressure

CLS

2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-9-7 8 Cylinder with Lock Double Acting, Single Rod Series CLS 125, 140, 160, 180, 200, 250 How to Order M9B CLS L 125 125 100 100 Without

MGP

MGPS50 50 11 12 A 13 B 14 1 2 3 4 5 50 80 7 8 9 A 10 B 15 16 6 17 NBR 18 NBR 19 A NBR 20 B NBR / (mm) 50 MGP50-PS 19 18 17 80 MG80-PS 20 17 20 GR-S-010(10g 18 18. 18-1.

3 Port Solenoid Valve Metal Seal Series VZ200 1

exhaust: VV3Z2-S50 (Built-in One-touch fittings manifold) (G) (L) (M) (D) With light/surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor 2-M5 x 0.8 4-Rc 1/8 31.4 17.3 4 PE Max.10 80 7 2-4.3 mounting hole 15.4 18 Manual override 26 (Lead wire length) 300 300 74.9 (Non-locking) (Lead wire length) 82.5 Stations n: Stations Formula L1 = 16n + 11 L2

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

Vacuum System Peripherals:

mA Max. applied voltage: 30 VDC (With NPN output) Residual voltage: 1 V or less (With 80 mA load current) Switch output For details, refer to Best Pneumatics Vol. 16.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt D 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 Model C D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 Model C Model C D 65 70 75 80 85 90 95 100 105 130 155 70 75 80 85 90 95 100 105 110 135 160 80 85 90 95 100 105 110 115 120 145 170 Bolt CDQ2WB32-5D -10D

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller

VQC

310.5 17 223.5 280.5 300 310.5 18 234 291 312.5 323 19 244.5 301.5 325 335.5 20 255 312 337.5 348 21 265.5 322.5 350 360.5 22 276 333 362.5 373 23 286.5 343.5 375 385.5 24 297 354 375 385.5 VV5QC21 (L3) (L4) L2 L1 47 76.5 38.5 P = 16 34.5 (12) 13 1 1 Manual override Indicator light Approx. 5.5 Approx. 10.5 (5.5) 127 Approx. 3.5 105.5 80 (35) (46.5) 50.5 Applicable connector: Flat ribbon

Digital Flow Switch

Max. load current 80 mA Max. applied voltage (NPN only) 28 VDC Internal voltage drop (Residual voltage) NPN output type: 1 V or less (at load current of 80 mA) PNP output type: 2 V or less (at load current of 80 mA) Response time*5 Select from 1 s, 2 s, or 5 s.

CJ2X/CUX/CQSX/CQ2X/CM2X

Nil C M 40 50 63 80 100 40 mm 50 mm 63 mm 80 mm 100 mm Standard stroke Refer to Standard Stroke on page 10-3-13. D Double acting Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CJ2X/CUX/CQSX/CQ2X/CM2X

Nil C M 40 50 63 80 100 40 mm 50 mm 63 mm 80 mm 100 mm Standard stroke Refer to Standard Stroke on page 10-3-13. D Double acting Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

IR1000/2000/3000

Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate (l/min

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Technical Data 1207 Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series 25, 32, 40 RoHS How to Order M9BW 25 300 MY1H Z Linear guide type Linear guide type Made to Order Refer to page 1209 for details

Air Slide Table Series MXQ

0 20 40 60 80 100 20 40 60 80 100 Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) 5 Air Slide Table Series MXQ Table displacement due to pitch moment load Table displacement due to roll moment load Table displacement due to yaw moment load Displacement at the section indicated by the arrow when a load is applied to this section with the slide

5 Port Solenoid Valve, Series VQC

310.5 17 223.5 280.5 300 310.5 18 234 291 312.5 323 19 244.5 301.5 325 335.5 20 255 312 337.5 348 21 265.5 322.5 350 360.5 22 276 333 362.5 373 23 286.5 343.5 375 385.5 24 297 354 375 385.5 VV5QC21 (L3) (L4) L2 L1 47 76.5 38.5 P = 16 34.5 (12) 13 1 1 Manual override Indicator light Approx. 5.5 Approx. 10.5 (5.5) 127 Approx. 3.5 105.5 80 (35) (46.5) 50.5 Applicable connector: Flat ribbon

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

empty weight deflection 2 2 Lateral empty weight deflection Lateral empty weight deflection 1 1 0.5 0.5 0.2 0.2 0.1 0.1 200 300 500 1000 100 Load point distance mm 200 300 500 1000 100 Load point distance mm 146

Cylinder with Lock Series MNB

2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

Series VQ Base Mounted Metal Seal/Rubber Seal

CJ2 Pressure 0.5MPa Load factor 25% Piping length 2m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm Fitting (One-touch fitting) Effective area (mm2) (Cv factor) Cylinder speed (mm/s) Model 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 3.6 (0.2) VQ1000 (Metal seal) 6 5.4 (0.3) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CA1

Compressed Air Preparation Filter

Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.