25

Install the product according to the dimensions shown in the following figure, keeping away from structures or conductive items. 200 200 150 60 150 Unit: mm 435 IZS40/41/42 Series Specific Product Precautions 2 Be sure to read this before handling the products. Mounting Wiring/Piping Caution Warning 11.

LEF-OM006xx

0.35 1 2 5m 5m 10% 3() 452000Hz 1 () 4 5 6 7 8 < -> LEFS40 LEFS40 10 60 60 10 50 50 W(kg) W(kg) W(kg) W(kg) 40 40 30 30 20 20 10 20 20 10 10 10 0 0 0 100 200 300 400 500 V(mm/s) 0 100 200 300 400 500 V(mm/s) -10- (2)DC24V LEFS16A LEFS25A (mm) 1) 100,200,300,(400) 100,200,300,400 500(600) 7 10 11 18 (kg) ) 2 4 2.5 5 (mm/s) 2) 10500 5250 12500 6250 (mm/s 2) 3,000 (mm) 0.02

PF2A/PF2W

Maximum measured Maximum measured Minimum measured Minimum measured Part no. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A510--1 PF2A550--1 PF2A511--1 PF2A521--1 PF2A551--1 PF2A510--2 PF2A550--2 PF2A511--2 PF2A521--2 PF2A551--2 10 50 100 200 500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Switch (When equipped with switch) Internal Pilot Manifold L Dimension n: Stations External Pilot Manifold L Dimension n: Stations L n 4 173 162.5 145 14 L n 4 185.5 175 155.5 15 2 148 137.5 124 12 3 160.5 150 134.5 13 5 185.5 175 155.5 15 6 198 187.5 166 16 7 210.5 200 176.5 17 8 210.5 200 187 12 9 223 212.5 197.5 13 2 160.5 150 134.5 13 3 173 162.5 145 14 5 198 187.5 166 16 6 210.5 200

VQ4000

Seal Metal seal Rubber seal Coil voltage 0 1 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Function 1 2 3 Stations U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) D side (2) Note 1) Applicable to DC specifications. Note 2) Refer to page 2-5-39 for external pilot specification.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

, 30, 35, 40, 45, 50, 60, 70, 75, 80, 90, 100 110 to 200 Refer to Made to Order Specifications for stroke which exceeds the standard stroke length.

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

MXW Series Long Stroke Slide Table

59 165 305 175 245 55 55 MXW25-225 1 590 7 113 84 187 335 200 275 60 67 MXW25-250 1 640 7 138 109 210 360 225 300 65 80 MXW25-275 1 690 7 163 134 232 395 245 320 60 60 52 MXW25-300 2 740 8 188 159 153 MXW Series Long Stroke Slide Table Auto Switch / Suitable Mounting Position at Stroke End Detection Reed switch: D-A90 (V), D-A93 (V), D-A96 (V) Switch operation range Stroke (mm) Model

MXW

195 34 63 6 490 MXW25-200 155 275 142 60 225 59 88 6 540 MXW25-225 175 305 165 55 55 245 84 113 7 590 1 MXW25-250 200 335 187 67 60 275 109 138 7 640 1 MXW25-275 225 360 210 80 65 300 134 163 7 690 1 MXW25-300 245 395 232 52 60 60 320 159 188 8 740 2 8-7-19 20 Series MXW Construction !

Vacuum System Peripherals:

Nil 3 rotations setting 200 setting 3 rotations setting 200 setting 3 rotations setting 200 setting 18 rotations setting 18 rotations setting E14 1 point setting E15 With analog output 2 points setting E16 E17 Electronic (12 to 24 VDC) 1 point setting E18 E19 With analog output With analog output With analog output Switch model 1 point setting M15 Diaphragm solid state switch (10 to 26 VDC

HRX-OM-W002

59/60 59/60 59/60 61/64 61/64 Dimensions 10 mm W483xD550xH310 W483xD550xH399 Accessory20 Power supply connector,Maintenance handle for particle filter20, Operation manual,Particle filter element20 Weight 11 kg 40 41 45 HRR Series 9.1 Specifications 9-3 HRX-OM-W002 Chapter 9 Documents 1: Use the product in conditions where freezing will not occur.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Adaptation for the connector may vary on account of the conductor construction of the electric wire. 60 yPCA-1557617 For CC-Link For DeviceNet 19 17 !1PCA-1557659 A-coded (Normal key) Width across flats 16 M12 60 Applicable Cable !

High Vacuum Angle Valve

0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector

VQ7-6/7-8

Hz 200 VAC, 50/60 Hz 24 VDC 12 VDC Other Nil SB None With 10 10 stations VF Note) When equipped with control unit, 1 or 2 stations are used for mounting.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

50 100V AC Hz 110V AC Hz 200V AC Hz 220V AC Hz Closed center Exhaust center Pressure center 60 50 60 M5 X 0.8: 1.8(0.1) 50 60 (1) AC Push-turnlocking slotted style With light and surge voltage suppressor SYJ5000 Rc(PT)1/8: 4.5(0.25) SYJ7000 Rc(PT)1/8, 1/4: 12.6(0.7) Note 1) All AC voltage models have built-in surge voltage suppressor. 1.2-2 Series SYJ3000/5000/7000 Manifold Variations Manifold

High Power Cylinder Series RHC

to 700 20 6 49.5 56.5 70 44 27 53 9 7 16 18 12 45.5 36 22 19.5 200 to 700 25 6 51.5 55 72 50 33 55 9 7 19 18 12 51.5 44 22 19.5 200 to 1000 32 8 51.5 56 84 60 36 66 9 9 21 20.5 16 61.5 53 24 21 200 to 1000 40 MM S H WH N ZZ P 1/4 I NA JC NB JD NC K NE NF ND NN Bore size (mm) 44 M8 x 1.25 192 22 252 26 26 43 30 30.5 5.5 5 33.5 13 15.0 M22 x 1.5 20 1/4 48 M10 x 1.25 193 27 257 31 32 39 36.9

VDW

Thread type Voltage Rc G NPT Nil F N 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Port size Please consult with SMC regarding other voltages.

MTS

0.1 0 40 60 80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 25 20 0.1 0.1 100 120 140 160 180 200 0 40 60 80 100 120 140 160 180 200 0 40 60 80 20 20 Overhang

SZ3000

8 210.5 200 187 12 2 160.5 150 134.5 13 3 173 162.5 145 14 4 185.5 175 155.5 15 5 198 187.5 166 16 6 210.5 200 176.5 17 7 210.5 200 187 12 8 223 212.5 197.5 13 L1 L2 L3 L4 L1 L2 L3 L4 L n 9 223 212.5 197.5 13 L n 9 235.5 225 208 14 10 235.5 225 208 14 11 248 237.5 218.5 15 12 260.5 250 229 16 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5

LEC-OM07605CN

V JEM-TR225-2007 200 V 7 2 (1) [Pr.