LECP6_C

DRIVE ON B1 OUT0 B2 OUT1 B3 OUT2 RESET ON OFF ()OFF B4 OUT3 B5 OUT4 B6 OUT5 B7 BUSY ON () BUSY OFF BUSY 50ms ON B8 AREA 1~2ON B9 SETON SETON()ON OFF B10 INP INP ON (BUSY OFF) INP ON INP ON INP ON ()INP ON (100 80 401 () INP [ON] 100 80 1 40 SV1.00 25 - B10 INP <> SV1.00 ,INP OFF 100 80 401 () INP [OFF] INP [ON] 100 80 1 40 EMGRESET (BUSY OFF) INP ON B11 SVRE

3

Thin shaft Position of rotational axis: Perpendicular to the shaft, and attached near one end CKQ = m1 + m2 a12 3 a22 = m1 + m2 4a12 + b2 4a22 + b2 3 12 12 2. Thin shaft Position of rotational axis: Perpendicular to the shaft, and attached at the center of gravity 5.

CG5-S

WH (E1) D B2 BZ MM AL A K Plug bolt (4 pcs. included) KA 8-J (F1) C 0.1 S + Stroke ZZ + Stroke H NA (mm) Stroke range A Bore size (mm) NA AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM P S 20 29 to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 M5 x 0.8 83 25 29 to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5

CY1F

115.5 D-F9, D-F9V (mm) Mounting patternq Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 B1 A1 Operating range B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 Mounting patternw B2 A2 D-F9W, D-F9WV (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range B1 B2 B3 (mm) 10 15 25

Table of Contents

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

LEC-OM07605CN

B2 B1B2(VAR) (2) (3) (a) R[]:() L[H]:() Vb[V]: DC24V U Vs[V] N () 14.1.2 14 2 14.

Rotary Table/

plate) = m 2 r2 = m 5 2r2 = m 4 r2 = m 12 a2 + b2 !

17

G Za2 D2 Ea Ea Eb Eb 4-MM E1 E1 E2 E2 C2 P Q2 Section Za2 detail (Adjustable range) B2 F2 D G Section Z detail (Adjustable range) F B3 B2 B1 C1 Zb2 JJ B F Z H K2 Counter bore depth H H L Thread length A2 Section Za2 detail (Adjustable range) A A 2 x 2 x LD J C Mounting direction (1) Mounting direction (2) C2 (mm) (mm) Adjustable range Applicable cylinder MY1B25 MY1B32 MY1B40 Mounting direction

F/ISE

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

PSE540/560

PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.

ZSE F/ISE

ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings

Series SGC coolant valve, with both CE and RoHS accreditation, provides the perfect solution for high speed machining.  Due to the SGC's unique scraper, squeeze seal, grease channel and dry bearing construction, the valve's service life will exceed 5 million cycles.  The introduction of a built-in magnet allows auto switches to be fitted, enabling confirmation of whether the valve is open

Compatible Fluid: Coolant, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 15, IP Rating: IP65, Voltage: 24 V DC, Sealing materials

Compatible Fluid: Coolant, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1/2, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 12, IP Rating: IP65, Voltage: 24 V DC, Sealing materials: NBR,

Compatible Fluid: Coolant, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 12, IP Rating: IP65, Voltage: 24 V DC, Sealing materials

Compatible Fluid: Coolant, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/2, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 12, IP Rating: IP65, Voltage: 24 V DC, Sealing materials

Compatible Fluid: Coolant, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 9, IP Rating: IP65, Voltage: 24 V DC, Sealing materials

Compatible Fluid: Coolant, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/2, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 9, IP Rating: IP65, Voltage: 24 V DC, Sealing materials

Model: 2 (SGC200), Valve Type: 1 (Normally Closed), Seal Material: A (NBR), Pressure Range: 10 (0 to 1 MPa), Thread: Rc, Port Size: 10 (3/8), Pilot Valve: Y (0.35 W Type, V116), Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (With Light and Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Bracket Mounting Position: B1 (Bracket on the Left Side