Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

KJ

How to Order KQ2 H 05 S 02 With thread seal One-touch fittings Nil Without seal S With thread seal Applicable tubing O.D.

VCS

25.5 30 66 57 VV2CS4 94 103 70 58.5 47.5 68 26 41.5 5.5 20.8 28.5 42 25.5 30 74 57 17-2-47

VCW

Series VC 2 3 4 Class 2 Class 3 Class 4 OUT port size VDW Port size 1/8 (6A) Symbol 01 02 Stations Uside D side 1/4 (8A) Material VQ Stations 1 2 3 4 5 n 02 2 stations All IN ports are 3/8.

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

PFA/PFW

6 17 1.6 48.2 34 54 44 24 2-Piping port size 4-4.5 40 50 (43.5) 42 2 1 4 3 4 Connector pin numbers 43 2-3.4 Pin name Pin No.

7ND9071en

When ordering spare parts, always include the following information: Valve controller type designation and serial number from the ID plate The code of this manual, the part number, the part name and quantity required 42 7 ND90 71 en 12 DRAWINGS AND PARTS LISTS 12.1 Exploded view ND9100, ND9400, ND7100 100 107 110 109 228 39 223 217 219 42 218 215 220 210 44 19 43 18 139 11 120 47 49 222

Valve Mounting: Pilot Valve Opposite of A Port, Stations: 06, A Port Size: One-touch Fitting for ø4, P, R Port Thread: -

Valve Mounting: Pilot Valve Opposite of A Port, Stations: 06, A Port Size: C4 (One-touch Fitting for ø4)

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

5 1 1 Option 08 Series Option None Exhaust cleaner for Rc1: D side exhaust Exhaust cleaner for Rc1 1/2: D side exhaust Exhaust cleaner for Rc1: U side exhaust Exhaust cleaner for Rc1 1/2: U side exhaust Symbol 5 VQ5000 Nil CD1 CD2 CU1 CU2 K Note3) Cable length Manifold type 0 1 2 3 Without cable Cable length 1.5m Cable length 3m Cable length 5m 1 Plug-in unit Stations Cylinder port size 02

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ1000 VQ2000 Symbol C3 Note 1) C4 Note 1) C6 Note 1) C8 Note 1) M5 CM Note 2) Note 3) MM Note 4) Manifold Plug-in unit 1 Stations 02 2 stations 16 Note) 16 stations Mixed size for different types of piping, option installed Note) Refer to page 562 for details. Note 1) Insert L (Top ported) or B (Bottom ported) for elbow type.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ1000 VQ2000 Symbol C3 Note 1) C4 Note 1) C6 Note 1) C8 Note 1) M5 CM Note 2) Note 3) MM Note 4) Manifold Plug-in unit 1 Stations 02 2 stations 16 Note) 16 stations Mixed size for different types of piping, option installed Note) Refer to page 562 for details. Note 1) Insert L (Top ported) or B (Bottom ported) for elbow type.

Vacuum Unit

The unit for the type without the unit selection function is fixed as kPa. i Option3 (For details on the Function/Application, refer to page 42.)

REA/REB

AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 Adjustment of Cushion Effect (Smooth Start-up, Soft Stop) Caution Since the external slider and piston slider are directional for size 10, refer to the drawings below when performing disassembly or maintenance.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

38.5 41.5 37.5 30.5 32.5 30 44 40 41 42 48 44.5 47.5 43.5 36.5 38.5 36 50 50 47.5 48.5 54.5 51 54 50 40 42 39.5 56.5 63 57.5 58.5 64.5 61 64 60 50 52 49.5 66.5 80 67.5 68.5 74.5 71 74 70 60 62 59.5 76.5 100 7-6-137 138 (In the case of auto switches, A and B dimensions will be only changed.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360

HRX-OM-X037

Table 9.7-1 Standards Standard CE Mark EMC Directive Machinery Directive 2014/30/EU 2006/42/EC NRTL *1 E112803(UL61010-1) *1: Except option-T2 and T3,water-cooled type.

25

) Silicon (Emitter cartridge color: Gray) Power supply cable full length IZS CP X13 Type 40 41 For IZS40 For IZS41/42 Symbol 01 02 Cable full length 1 m 2 m Model with Made-to-order power supply cable Available in 1 m increments from 1 m to 20 m.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64