LEH_C

(DC24V) () A/B (800 /) (V) DC2410% 11/7 28/15 34/13 36/13 / (W) 8) 8/7 22/12 (W) 9) 14 42 19 51 57 61 1) 1020 150 LEHZ10,16:30(F.S.),LEHZ20,25:25(F.S.),LEHZ32,40:20(F.S.) 2) () 3) 5m 5m 10%(15m 20%) 4) 5) () 6) () 7) () 452000Hz 1 () 8) () 9) 11 - 2.1.2 6N LEHZ 10 K 4 2 1 R 1 2 10 10 D DIN D DIN 16 16 1DIN 2 0 2 0 I/O (m) L ) L ) 25 25 ) 10,16,20,25 32 32 1.5

HRX-OM-X037

Communication setting screen 35.Contact output 1 to 3 34.Contact input signal 33.Analog output 32.Serial communication setting screen detail setting screen setting screen setting screen 11. Temperature waveform 11.

25

Install the product according to the dimensions shown in the following figure, keeping away from structures or conductive items. 200 200 150 60 150 Unit: mm 435 IZS40/41/42 Series Specific Product Precautions 2 Be sure to read this before handling the products. Mounting Wiring/Piping Caution Warning 11.

Modular F.R.L. Unit

Threads for IN and OUT ports are not machined. 40 40 28 11 11 AC20, AC20A AC25, AC25A AC30, AC30A AC40, AC40A Note) 1/8, 1/4 AKM2000 53 48 34 14 13 1/8, 1/4 AKM3000 70 54 42 18 15 AKM4000 1/4, 3/8 How to Order Note) Not applicable to AC40-06.

CJ2

B H B H d C C d 10 8 21 M4 X 0.7 16.2 Y-J010B SNJ-006B 16 11 21 M5 X 0.8 16.6 Y-J016B M6 X 1.0 4 8 9.2 6 NTJ-006A 2.4 M3 X 0.5 6.4 5.5 6 SNJ-010B M8 X 1.0 4 11 12.7 10 NTJ-010A 3.2 M4 X 0.7 8.1 7 10 Part No.

Speed Controller with One-touch Fitting

31.1 29.5 13.3 19 (20) AS231F-02-07(S)A 1/4" 11.2 19 33.8 (33.9) 21.4 43.9 21 (22) AS231F-02-09(S)A 5/16" 13.2 34.9 (35) 23.5 46 14.2 22 (22) AS231F-02-11(S)A 3/8" 15.9 20.9 38.1 (38.2) 24.7 47.3 15.6 23 (24) AS331F-02-07(S)A 1/4" 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 50 48.4 44.5 42.9 13.3 42 (42) AS331F-02-09(S)A 5/16" 13.2 37.1 23.5 59.9 14.2 43 (43) AS331F-02-11(S)A 3/8" 15.9 17.4

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Gasket DXT199-21-11 P P Dust cap SY3000-42-1 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 Applicable manifold base Type SS5YJ7-21P Manifold Gasket DXT199-21-11 Refer to page 92 prior to handling.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note) Refer to the Specific Product Precautions 2 on page 274. 242 D-sub Connector 10-SV Manifold Electrical Wiring 10F/16F D-sub connector type (25 pins) 13 Common Common 25 12 Station 11 SOL.b SOL.a 11 24 Station 2 SOL.b 15 SOL.a 2 Station 1 SOL.b 14 SOL.a 1 This circuit is for the double wiring specification with up to 11 stations.

Vacuum Unit

How to Order Valve Manifold Assembly t Option3 (For details on the Function/Application, refer to page 42.) Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

0.4

U side D side SUP block plate 1(P) 2(B) (A)4 2(B) (A)4 (A)42(B) (A)42(B) Description/Model Stations 1 2 3 4 5 6 7 Individual EXH spacer VVQ1000-R-1Individual EXH spacer C6 N7 Single Valve Option C6 (EXH port) C6: 6 One-touch fitting When valve exhaust affects other stations due to the circuit configuration, this spacer is used for individual valve exhaust.

MXS Series Air Slide Table

5.5 5.5 11 H (NN-1) X H G Cross section BB Cross section AA (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5 83.5 99.5 M 42 52 62 84 100 ZZ 48 58 68 90 106 MXS6L-10 MXS6L-20 MXS6L-30 MXS6L-40 MXS6L-50 67 MXSIL Series Air Slide Table (Symmetric

3 Port Air Operated Valve

303.5 288.5 331 316 358.5 343.5 386 371 413.5 398.5 441 426 468.5 453.5 496 481 523.5 508.5 551 536 578.5 563.5 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 VPA VPA VPA3 Type 42/Individual exhaust: VV3PA3-423-02 Stations (Pitch) P = 27.5 1/4 3(R) port 28 18.5 3R 3R 12 72.5 2 x 6.5 (For mounting) N.C.

Thermo-chiller/Rack Mount Type

For pipe thread type N, an NPT thread conversion fitting set is included. 20 Not included for Option Z (Removed parts) 21 Not included for Options Z and Z1 (Removed parts) 11 1 No condensation should be present.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

P 45.5 24 32 1.8 (Bleed port) With fiflter (80 mesh) R2 21 2 position double: SYJA5220-M5 2 position double: SYJA5240-01 2-4.3 44 2-M5 x 0.8 (Pilot port) 2-M5 x 0.8 (Pilot port) (For mounting) A B 1 11 1 5 A B 1 24 A B 1 2-2.6 10 R P (For manifold mounting) 19 4 2 37.5 47 42 15 54 54 Manual override 24.5 23 20 11.5 3 2-2.6 (For mounting) 11 Manual override 2-1.8 (Bleed port) 46.5 1/8 33.5

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

M10 x 1.5 Model A 40 ZPT40H-B8 B 42 ZY Model A 40 B 42 50 52 50 ZPT50H-B8 52 M8 x 1.25 ZPT40H-A14 ZPT50H-A14 ZF 50 ZPT50H-B10 52 M10 x 1.5 ZP ZPT H-A16 (Male thread) 63 80 ZPT H-B (Female thread) 63 80 SP ZCUK AMJ Width across flats 37 4 x M4 x 0.7 1/8 (Rc, NPT, NPTF) M16 x 1.5 AMV Hexagon width across flats 22 Width across flats 37 AEP 45 4 x M4 x 0.7 HEP Hexagon width across flats 24 Related

MQQ

Dimensions Foot type/MQMLL 6 25 14 33 42 18.5 6 9 2.3 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke 10, 16, 20, 25 LY LH X X Y Y 4-LC S + Stroke LS + Stroke ZZ + Stroke LX LZ Z LT (mm) Bore size (mm) LS LC LT LH LX LY S Z LZ ZZ Y X 5.5 83 2.3 14 33 25 65 19 42 108 9 6 10 5.5 92 2.3 18 42 30 74 21 54 119 9 6 16 6.8 137.5 3.2 25 40 40 97.5 20.5 55 166 20 8 20 6.8 142.5 3.2 28 40 47 102.5 24.5

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

127.5 160.5 11 2 4 105 to 400 15 to 35 24 32 50 32 20 to 100 80 120 14 120 160 14 2 4 105 to 500 M5 x 0.8 6.5 4 5 40 to 100 42 41 105 to 120 75 125 to 200 59 49.5 205 to 400 76 58 25 20 46 29 63 50 to 200 98.5 138.5 12.5 (13.5)* 138.5 178.5 12.5 (13.5)* 4 8 205 to 500 505 to 800 20 to 35 22 36 50 * L lead M6 x 1 8.5 5 6 40 to 100 36 43 105 to 120 80 125 to 200 53 51.5 205 to 500 70 60 32

JXCx-OMT0005CN

(P.23) 10.1 (P.33) 3.4 (P.16) 11.(P.42) (CN1: EMG 3.(P.12) ) INP ON 10.1 (P.33) (INP PLC ) 5 3.(P.12) PLC (PLC) 2 12.4 (P.50) 11.(P.42) 3.(P.12) 83 - 5.(P.23) 10.1 (P.33) 3.(P.12) PLC (PLC) 2 12.4 (P.50) () () (LED() 3.2 (P.13) ) 11.(P.42) 5 11.(P.42) 11.(P.42) 3.(P.12) (CN1: EMG 3.

Slider Type Ball Screw Drive/11-LEFS Series

11-LEFS40l-550l 906 955 556 728 10 4 600 11-LEFS40l-600l 956 1005 606 778 10 4 600 11-LEFS40l-650l 1006 1055 656 828 12 5 750 11-LEFS40l-700l 1056 1105 706 878 12 5 750 11-LEFS40l-750l 1106 1155 756 928 12 5 750 11-LEFS40l-800l 1156 1205 806 978 14 6 900 11-LEFS40l-850l 1206 1255 856 1028 14 6 900 11-LEFS40l-900l 1256 1305 906 1078 14 6 900 11-LEFS40l-950l 1306 1355 956 1128 16 7 1050 11

Table of Contents

Series VQ1000 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46