Speed Controller with

AS2052F-A AS1002F-A AS2002F-A 500 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 01, 23, 03, 04, 06, 07 100 08, 09 06, 07 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 400 200 06, 07 03, 04 300 50 200 100 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002F-A AS4002F-A 1500

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

LL LW M N 55 06.0 18 2 09.5 27 05.0 M4 x 0.7 05.0 065 03.5 22.5 041 06 13.5 M5 x 0.8 75 09.5 25 2 14.0 37 07.4 M5 x 0.8 07.5 095 05.5 27.5 061 08 20.0 M6 x 1 120 14.0 38 2 18.0 54 12.0 M6 x 1 12.0 160 08.6 40.0 090 12 27.0 M8 x 1.25 160 17.0 60 3 20.5 84 16.5 M8 x 1.25 22.0 220 11.0 50.0 134 16 31.0 NE NG NH NW PA PB PC PD PG Q QW T TT UU YW Z P Model MY3A16 MY3A25 MY3A40 MY3A63 4.0 110 42

VXZ

PA 02 200 VAC 50/60 Hz 01 100 VAC 50/60 Hz 08 48 VAC 50/60 Hz 01 02 03 04 07 08 05 06 002 Applicable valve model No. 13 24 VAC 50/60 Hz VXZ22 VXZ23 03 110 VAC 50/60 Hz 23 440 VAC 50/60 Hz PAX 003 AC 04 220 VAC 50/60 Hz 51 6 VDC Coil combination code 05 24 VDC 53 48 VDC PB 06 12 VDC 55 100 VDC 56 110 VDC (Refer to the table below.) 07 240 VAC 50/60 Hz DC Note) The voltage codes

Speed Controller with One-touch Fittings

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tubing O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

Quick Exhaust Valve Series AQ 1

-00 AQ240F-07-07 13.7 13.7 15.4 6.2 13.7 27.3 40.7 8 10.0 15.1 6.2 1/4" 12 6 1/4" 12 40.7 AQ340F-07-00 AQ340F-07-07 16.8 20.3 13.7 16.8 7.1 52.2 33.1 20.0 13 11.8 1/4" 13.2 11 1/4" 13.2 7.1 22.2 15-12-4

F

18.1 18.5 15.2 25.3 5/16 32.4 NAS221F-U02-09 19 17 8.9 23.3 14.5 1/4 5/32 18.5 17.2 32.5 NAS221F-U02-03 31.1 32 26.6 39.4 34.4 11.4 24.9 16.5 3/16 34.2 NAS221F-U02-05 32.4 17 13.2 25.2 1/4 34.5 NAS221F-U02-07 32.9 15.2 27.2 18.5 5/16 36.4 NAS221F-U02-09 33.6 19 17.9 33.9 21 3/8 3/8 23 19 43.2 NAS321F-U02-11 35.3 13.2 27.8 17 1/4 19.4 39.3 NAS321F-U03-07 53.9 37.6 32.6 45 40 15.2 29.5 18.5

Plug-in Unit

mA), 0.5 W DC (21 mA) 24 VDC 12 VDC Power consumption (Current) 1 W DC (83 mA), 0.5 W DC (42 mA) Note 1) Use dry air to prevent condensation at low temperatures.

VQ7-6/7-8

) 23(30) 32(42) 23(30) 1 1 2-3/8, 1/2, 3/4 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 30(42) 30(42) P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-24 25 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Prewired Connector Type 2 position single : VQ7-8-FG-S-SC single (Reverse

44

Width across flat Effective area (mm2) Weight (g) L M d Model 2 x Applicable tubing H1 H2 I.D. 2.5 3 4 6 7.5 8 9 10 13 H1 H2 H2 4 4 6 8 10 10 12 12 16 KFG2H0425-00 KFG2H0403-00 KFG2H0604-00 KFG2H0806-00 KFG2H1075-00 KFG2H1008-00 KFG2H1209-00 KFG2H1210-00 KFG2H1613-00 1.8 2.3 3.3 5.3 6.8 7.3 8 9 12 7 11 25 43 42 44 42 71 1.6 2.6 6 17 30 35 45 57 101 8 8 21.8 5 d 10 14 10 14 24.8 28.6 5.8 6.6

Piping: Base Mounted Common SUP Individual EXH, Stations: 12 Stations, A B Port Size: ø6 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 2 Stations, A B Port Size: ø6 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 3 Stations, A B Port Size: ø6 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 4 Stations, A B Port Size: ø6 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 5 Stations, A B Port Size: ø6 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 6 Stations, A B Port Size: ø6 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 8 Stations, A B Port Size: ø6 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 9 Stations, A B Port Size: ø6 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 11 Stations, A B Port Size: ø6 One-touch Fitting

Piping: 42 (Base Mounted Common SUP Individual EXH), Stations: 2 Stations, A B Port Size: C6 (ø6 One-touch Fitting)