Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

0.16 [0.11] 0.11 82 (56) 92 (66) 3 position 0.42 [0.33] 0.16 [0.080] 36 53 41 63 37 55 2 position 5 port Body ported 0.9 M3 x 0.5 M3 x 0.5 3 position 56 66 58 36 53 41 63 37 55 Note 1) 4 port Base mounted 2 position M5 x 0.8 1/8 (For manifold 56 66 3 position 58 base only) Note 1) Dedicated for manifold base.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

18 18 13.5 SMC 9 (Rc(PT)1/4) (Rc(PT)1/4) 9 2-Rc(PT)1/4, 3/8 R1, R2 port M5 X 0.8 (Not applicable to standard.)

4/5 Port Air Operated Valve Series SYJA3000

double: SYJA7220-01 2 position double: SYJA72402-4.3 (For mounting) 63.6 34 8.5 2-M5 x 0.8 1 (Pilot port) 13 3 1 A B B A 2-M5 x 0.8 34 2-3.2 27 17 A B (Pilot port) (For manifold mounting) 1 35 R1 P R2 31.5 2-3.2 18 35 (For mounting) 63.6 Manual override 74.6 28 29 25 21 1.6 14 74.6 Manual override 55 1/8 2-1.8 (Bleed port) With fiflter (80 mesh) 40 25.5 (Piping port) 20 12 11.5 R1 R2 P 18

MHZ

0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

MHZ

0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts

REC

10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 32 M10 x 1.25 Up to 1000 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 40 M14 x 1.5 Up to 1000 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 NN P S X Y Z ZZ Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 146 20 8 21 215 25 M26 x 1.5 Up to 700 1/8 146 20 8 25 219 32 M26 x 1.5 Up to 1000 1/8 159

SX

S 5 VDC R 3 VDC 1-6-55 56 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x

Table of Contents

Applicable shaft type: K Applicable shaft types: J, K, T (mm) X L3 max W1 L1 max (mm) Shaft type Y W2 L2 max L4 max Size J K T J K T J K T J K T Size W1 = L3 = L1 = 10 10 0.5 to 2 4.5 to 14 0.5 to 2 Y 1 L2 1 6.5 to 14 L1-1 X 3 L4 = 15 15 0.5 to 2.5 Y = 5.5 to 18 0.5 to 2.5 Y 1.5 L2 1 8 to 18 L1-1 X 4 L2 = 20 20 6 to 20 0.5 to 3 0.5 to 3 Y 1.5 L2 1 9 to 20 L1-1 X 4.5 X = 8.5 to 22

OMR0032

Controller Specifications . 15 3.1 Basic specifications . 15 3.2 Parts description . 16 3.3 External dimensions . 17 (1) Direct mounting (LATCA-) . 17 (2) DIN rail mounting (LATCA-D). 17 3.4 Mounting . 18 (1) Mounting. 18 (2) Connection to ground . 18 (3) Mounting location. 19 4.

0.4

C10: 10 (SMC) N11: 3/8" (SMC) (C12: 12 (SMC) (In case of branch type)) (DIN rail clamp screw) R R R BUS 76.7 76.5 12 3 X 3 3 72 BUS IN B X 49.5 B B B B B B B P X P 12 P 12 PWR PWR 30 25 A 1 1 A 1 A A A A A A A 55 25 13 (7.5) 18 55 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.

Magnetically Coupled Rodless Cylinder

79 93 LD 4.3 5.6 5.6 7 7 WP 16 19 21.5 27 32 Z 94 107 117 130 148 M 5 5 6 7 8 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 N 6 7 6.5 8.5 11 PW 32 38 43 54 64 Q 84 95 105 116 134 QW 18 17 20 26 34 T 19 20.5 21.5 24 26 TC 17 20 22.5 28 33 P (Piping port) Model Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3R15 CY3R20 CY3R25 CY3R32

C95Series

II 18* Cylinder lube qaskel N SA Piston Aluminum alloy Cushion valve Steel wire Nickel plated 1 9 Snap ring Steer for spring ~40~ 1 00 ,.

Guide Cylinder Series MGG

37 55 182 M14 x 2 depth 25 For long strokes Bracket mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bracket mounting stroke Bore size (mm) O P Y Z Y X W V U T S R Q R 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100mm or more Rc 1/8 M6 x 1 depth 9 88 157 80 30 40 48 82 12 26 12 250 to 400 14 21 Rc 1/8 M6 x 1 depth 13 88 125mm or more 175 80 37 46 57 100 13 31 12 350 to 500

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

plating 14 O-ring FKM Fluoro coating 15 O-ring FKM Fluoro coating 18 PF2M7(-L) Series Dimensions PF2M7m-C4/C6/C8/N7(-L) A 48 A 48 18 18 OUT2 OUT1 OUT2 OUT1 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 38.5 (30.9) 38.5 (30.9) 13 3 13 3 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 18 2 x 3.4 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 18 2 x 3.4 28 [mm] 28 Model A

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

8, 1/4 42 40 77.6 36 17.5 18 15.5 30 1/4, 3/8 53 53 94.5 42 21.5 21 18 40 1/4, 3/8, 1/2 71 70 102.5 42 25.5 21 22.5 Size Port size Grommet Grommet with PCB Conduit J K J K J K 20 1/8, 1/4 47.9 28.5 53.6 38 55.2 48.9 30 1/4, 3/8 56.8 31.1 62.5 41 64.1 51.9 40 1/4, 3/8, 1/2 64.8 31.1 70.5 41 72.1 51.9 Glossary of Terms Specific Product Precautions 42 JSXM Series Dimensions DS: DIN terminal

MQQ

Rc 1/8 28.5 18 8 13 25 8.5 M20 x 1.5 M8 x 1.25 97.5 31.5 151 40.5 20.5 33 29 20 Rc 1/8 32 18 10 13 30 8.5 M26 x 1.5 M10 x 1.25 102.5 34.5 160 44.5 20.5 38 32 25 Refer to page 18 for details regarding the rod end nut and mounting nut. 14 Series MQM Refer to the standard type on page 14 for other dimensions.

CNS

110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) 1 110 15 D-Z7/Z80 D-Y59/Y7P D-Y7W 115 110 105 15 1, 2 125 to 160 D-Y69/Y7PV D-Y7WV 95 90 10 100 D-Y7BAL 125 120 115 20 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.