100

40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series Flow Rate Characteristics (Representative value) ZL6M (04P) Supply pressure: 0.35 MPa/0.37 MPa (With valve) ZL6H (

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage Lead wire length 5 6 V S R 1 2 Electrical entry 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Nil 6 10 15 20 25 30 50 G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

A( ) A 24V 12V 100V SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 24V DC 12V DC 100V AC SOL SOL C(+) C ZNR Light DIN connector circuit with light AC circuit DC circuit 1 2 1 2 NL R R LED NL: Neon light R: Resistor LED: Emitting diode R: Resistor 4.3-2 Series VQ20/30 Manifold Caution Caution Valve Mounting How to Mount/Remove from DIN Rail After confirming the gasket is correctly placed under

Type: 2A (For 200 VAC)

Type: For 200 VAC, Lead Wire Length: -

Type: 2A (For 200 VAC), Lead Wire Length: 30 (3000mm)

Type: For 200 VAC, Lead Wire Length: 3000mm

Compact Cylinder with Solenoid Valve/

, 35 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 Surge voltage suppressor Diode (Non-polar: Varistor) 32 1 Indicator light LED Note) The S and Z types of surge voltage suppressor have an internal circuit allowing voltage drop, so use within the following allowable voltage range.

ZQ-OM01401

-30-4A-6 300mm 6 600mm (1) (1) 10 1000mm 15 1500mm Assy 20 2000mm A X T6 61 -13 A6 25 2500mm 30 3000mm (1) 50 5000mm N.C.N.O.

1

Valve size Valve size 50 50 DOWN DOWN Existing At 300 mm/s Possible to drive cylinders Up to 50 Valve size Valve size 63 63 DOWN DOWN (80 at 100 mm/s) Existing Possible to drive cylinders Up to 63 80 Page 30 (125 at 100 mm/s) Sub-plate newly added! Sub-plate newly added!

2

IDF37E-30 IDF55E-30 IDF75E-30 IDU22E-30 IDU37E-30 IDU55E-30 IDU75E-30 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E-30, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 30 mA 25 46 125 10 A 60 39 200 V type 60 81 148 50 36 73 133 IDF75E-30, IDU75E-30 IDF100F IDF125F IDF150F IDF190D IDF240D IDF370D 15 A 74 151 46 50 122 146 30 A 60 60 55 148 36 70 73 166 50 A IDF100F to 150F

Table of Contents

) 50(63) 50(63) 5 3 38(53) 5 3 38(53) 32(42) 23(30) 32(42) 23(30) 1 1 2-3/8, 1/2, 3/4 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 30(42) 30(42) P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-24 25 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Prewired Connector Type

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(V) 24, 6, 12, 48 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Allowable voltage fluctuation (%) Note) Power consumption (W) [Current mA] DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz

LEC-OM07605CN

.1 1-1 EDB 2A.2 1-2 EDB 2A.3 1-3 EDB 2A.4 1-4 EDB 2A 1 2A.5 1-5 EDB 2A.6 1-6 EDB 2A.7 1-7 EDB 2A.8 1-8 EDB 2B 2B.1 1 EDB 2B.2 2 EDB 30.1 DB (1) (1) (1) 30.2 DB 30 (1) (1) (1) (1) 30.3 DB (1) (1) (1) 31 31.1 / SD 8 3 8.

SX

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

C85

40 4.5 22 26 11 25 73 68 3.2 16 12.8 4.5 12.8 35 23.8 5 3.2 10 65.2(72.2) 30 40 4.5 22 26 11 25 73(80) 68(75) 3.2 16 12.8 4.5 12.8 35 23.8 5 3.2 12 76(80) 40 52 5.5 30 33 14 32 86(90) 78(82) 4 20 18 5.5 18 42 32 6 4 16 82(82) 40 52 5.5 30 33 14 32 92(92) 84(84) 4 20 18 5.5 18 42 32 6 4 20 91 50 66 6.6 40 42 17 40 103 96 5 25 19 6.6 19 54 36 8 5 25 98 50 66 6.6 40 42 17 40 110 99 5 25 23

Compact 5-Port Solenoid Valve

Refer to the cylinder catalog for details. 10 Optimum Actuation Size Chart of Air Cylinder For JSY3000, A, B port: 8 Horizontal Vertical (Upward) Average speed [mm/s] 0 100 200 300 400 500 600 700 800 32 CM2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 300 mm 40 50 63 CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 80 100 125 CS1 series Pressure: 0.5 MPa Load ratio: 50% Stroke

42

Seal Coil voltage 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC Series Enter in order starting from the first station on the D side.

VFS

Body (Pilot exhaust) 20: Individual EXH Electrical entry T: Conduit terminal D-Y: DIN terminal G: Grommet E: Grommet terminal 30: Common EXH Coil rated voltage 3 2 1 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) Manifold only 4 220 VAC (50/60 Hz) Pilot type 6 5 24 VDC 12 VDC Internal pilot Nil External pilot R 7 240 VAC (50/60 Hz) 9 Other Option.

SQ1000/2000

50 Note) Available in units of 10 pieces.