E-P HYREG ® Series VY1 1

G Description 04 06 10 02 03 04 02 03 04 VY110 0 1VY120 0 1VY130 0 1VY140 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 VY1D00-M5 VY1A0 0 1-M5 VY150 0 1VY1B0 0 1M 0 5 1 01 02 01 02 PPA B VEX9-32A VEX5-32A VEX7-32A VEX3-32A VEXA-18-2A VEX1-18-1A Bracket (With bolt, washer) AL F VEX1-18-2A VEXA-18-3A G27-10-R1-X207 G G46-10-01 G36-10-01 G27-10-01 Pressure gauge AN120-M5 AN120-M5 Pilot EXH port silencer

ZX

unit (F) E P F Model ZX100 K6 Circuit diagram (Circuits other than those with vacuum switch are shown as below.)

PF2A/PF2W

.S. or less 3% F .S. or less Repeatability Note 1) 2% F .S. or less 1% F .S. or less Temperature characteristics 2% F.S. or less (15 to 35C based on 25C), 3% F .S. or less (0 to 50C based on 25C) Pulse output, N channel, open drain, output for display unit PF2W3.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-06 AS121FG-U10/32-07 18.3 23.1 11.7 13.5 18.1 22.9 11.6 12 6 1/4" 13.5 AS221FG-01-04 AS221FG-N01-01 12.7 20.4 27.5 9.3 4 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 14.3 13.5 20.4 27.5 11.6 6 5/32" 14.2 31.1 36.1 12 32.1 27.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 12.7 14.3 23.1 30.2 19 18.5 25.3 32.4 15.2 11.4 8 3/16" 36.1 31.1 32.1 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01

ARJ1020F

5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

Direct Solenoid

D ENSIONS A B c D E F 2.66 (67.5) 2.42 (61.5) (14) 0.28 17', 0.16 (4) 1.42 (36) ,ltrF-l rD C Solsnoid DIN "Electricrl Connector" 'AC" Vottage only ml--l l "*---l-l I .f;T.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

Lubrication Equipment

Description Material Aluminum die cast Aluminum die cast Top cover Bottom cover q w No.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

cock 10 With auto drain With auto drain 01 11 How to Select Max.

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

AS-FPQ/AS-FPG

P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

AS-FPQ/AS-FPG

P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

-ASD330F-01-08 10-ASD230F-M5-06 2.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

w e r t q w e r t i i o o !

Series IDG

(E) (352) 10.5 Purge air for dehumidification M5 female threads Drain (Maintenance space 100mm or more) Drain discharge With float type auto drain With drain guide Q P N.O.: Black Thread size: 1/4 (without valve mechanism) Width across flats 19 Applicable tube O.D.: 10 (NPT threads: 3/8 inch) With float type auto drain With drain guide Port size A B C D E F G H K L M N Model P 255 276 Q

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q Rc(PT)1/8 Width across flats 13 Width across flats 8 M5 x 0.8 M14 x 1 6.2 Width across flats 19 M10 x 1 5 5 D C Width across flats 14 3 I I K 3 D C J J H F M5 x 0.8 Width across flats 8 Width across flats 12 M8 x 1.25 H F Width across flats 10 Width across flats 2 Y 2 A Y B 2.5 A B With a stroke of 10mm Dimensions/10mm stroke (mm) Model A B C D F Y H I J K K Q:4 Q:6 ZPT10F10-0-A10 88.5

MGG

(mm) Q R X Y + Stroke Y Q R X Bore size (mm) 32 86 (94) 25 13 39 40 96 (105) 29 14 46 50 109 (121) 31 15 57 Dimensions inside ( ) are for long strokes.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(N) 10 Allowable end load F (N) Allowable end load F (N) MGGM40Stroke 6 (Slide bearing type) 5 800 st 700 st 4 600 st 3 500 st 2 300 st 400 st st: Stroke (mm) 1 200 st 100 st 0 0 20 40 60 80 100 120 140 160 Allowable end load F (N) MGGM50Stroke 8 (Slide bearing type) 7 Deflection Y (mm) 6 1000 st 5 900 st 4 800 st 700 st 3 600 st 2 400 st 500 st st: Stroke (mm) 100 st 200 st 300 st 0 1 0

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 40 119 137.5 141 6 19.5 13.5 25 28 50 53