MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

Modular Type Regulator Series AR

Metric thread (M5) Rc NPT G Nil N F Port size Accessories Body size Port size Symbol Nil B E Symbol Applicable model AR10 to 60 AR20 to 60 AR10 AR20 to 60 AR10 to 40 Description With bracket 10 20 25 30 40 50 60 M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 With square embedded type pressure gauge (with limit indicator) With round pressure gauge (without limit indicator) With round pressure

JA/JAH/JB/JS

-24-200 JAH80-30-200 JAH100-42-300 63 M24 x 2 2 28000 22000 22000 RS Q G 5 80 M30 x 2 2.5 54000 36000 36000 100 M42 x 3 3 71000 55000 55000 RS H A Series JAH How to Order RZQ JA H X11 40 F 16-150 MI W S CEP1 Heavy load type Series JAHL (Foot style) Option CE1 Mounting style X11 High temperature specifications 5 to 100C Nil F L Basic style Flange style Foot style Series JAHF (Flange style)

JA/JAH/JB/JS

M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1 M8 x 1.25 M10 x 1 M10 x 1.25 M10 x 1.5 M12 x 1.25 M12 x 1.5 M12 x 1.75 M14 x 1.5 M16 x 1.5 M16 x 2 M18 x 1.5 d: Thread nominal size M20 x 1.5 M20 x 2.5 M22 x 1.5 M24 x 1.5 M24 x 2 M24 x 3 M26 x 1.5 M27 x 1.5 M27 x 2 M30 x 1.5 M30 x 2 M33 x 2 M36 x 1.5 M39 x 1.5 M42 x 3 M48 x 1.5 D C B H B H C D CE1 29 29 31 34 34 34 39 39 39 44 44 48 53 57 62 72 34.6

Title not found

Sizes 10 to 25: MHZ 2 Sizes 32 & 40: MHZ 2 .,rr,"""^ J Number of fingers Action Bas c iype End boss side porled' End boss arialonelouch ftlin91 " End boss axal M5 porlr j S nsle-acling on y Throug F a t 'D S actori, basic and N type nnges only " basrcancr N lype iingers onry ' [ , l t o 2 c o n p " l b l p o l 0 l o o 2 5 n r b o r F n / ' o J I I a o a a a a a a a a a a a a a a a a a a a

Shock Absorbers and Rate Controls

* O . b 3 z o 1 0 0 6 o u o q ; N q * E 9 . " o . 5 " > 2 4 ' ;l l.:, . . o o o 2 4 6 8 1 0 1 2 1 4 1 6 1 8 2 0 TOTAL ENERGY ( nrbtc) (Tho!ends) Note: Minimum impact velocity tor PM nlodels it 4 itr/*c. 9k**k &"bs*rbers Non-Adjustable Hydraulic Series 49rc.

REC

24 21 22 41 14 32 16 12.5 50 8 10 56.2 7 26.5 51 1/4 181 247 Axial foot style: RECL G H Width across flats B2 F G K A NA 2-RcP F AL Standard port 2-NN Pluged (M5 x 0.8) H1 H2 Width across flats B1 I D C B 4-LD LH MM 2-4 3.2 N N X X Y S + Stroke Y LX Z LS + Stroke LZ ZZ + Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore (mm) Stroke range 20 M8 x 1.25 Up to 700 18 15.5

3

Through-hole/Both ends tapped common (Basic) 10 0.1 0.2 Q 12 (Rod size) G M5 x 0.8 (2 locations) (Port size) Auto switch Minimum bending radius of lead wire 10 R 4 3 E Yh9 S T 3 F M8 x 1.25 Effective thread depth 11 6.8 (The dimension on the opposite side is the same.) 5.5 (2 locations) 13.6 7 10 7 10 M6 x 1 (2 locations) Flat washer With 2 pcs. 9 (2 locations) (The dimension on the opposite

REC

Screw-in Piping M5 X 0.8 Relieving port size 50 to 500mm/s Piston speed Mounting Basic, Axial foot, Front flange, Rear flange *Auto switch attachable Dimensions REC B/Basic H2 2-Rc(PT)P Width across flats B2 2-NN G G H1 Width across flats B1 Relieving port M5 X 0.8 Standard port I Relieving port 2-Eh8 D MM AL K A N N F lNA S+Stroke H F ZZ+Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA

Magnetically Coupled Rodless Cylinder

B Counter bore depth C T Y HT 2-P (Piping port) L 0 -0.1 22 HP 8 TC X F WP 12.5 19.5 D GW 7 GP QW PW 4-LD Plug 2 x 4-MM Thread depth M Switch rail HS W K Plug CY3RG15 CR HR G G Q + Stroke Z + Stroke CY3RG25, 32, 40 CY3RG20 (mm) Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 B 8 9.5 9.5 11 11 HP 11 14.5 20 25 HR 30 36 41

240

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

ZX

port M5 (or M6) (PV port) Vacuum supply pressure port M5 (or M6) (V port) Vacuum pad connection port Note) Dimensions : For mounting bracket B : For mounting spacer 13-2-44 44 Vacuum Module: Vacuum Pump System Series ZX Suction Filter Unit: ZX1-F Refer to page 13-2-12 for details.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

) (Z) U N (G) NN (mm) A B C D E F G H I J L Y M N NN P Q QQ R U V X Model 2-3.4 through 2-6.5 counterbore depth 3.3 2-M4 x 0.7 4-M3 x 0.5 2-M3 x 0.5 thread depth 5 M3 x 0.5 x 10l CXS10 7.5 8 46 17 44 15 2-M4 x 0.7 35 20 4 20 6 33.6 8.5 7 M5 x 0.8 x 5l 30 thread depth 7 thread depth 4.5 2-4.3 through 2-8 counterbore depth 4.4 2-M5 x 0.8 4-M4 x 0.7 2-M4 x 0.7 thread depth 6 M5 x 0.8 x 10l CXS15

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G RE A B Width across flats B1 I REC 2-Eh8 D CX MM AL A F F NA 1.5 1.5 CY N N K H S + Stroke ZZ + Stroke MQQ M RHC Boss-cut MK(2) RS Q G RS H A RZQ ZZ + Stroke MI W S CEP1 CE1 (mm) CE2 AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ A Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

depth C U 4-N through 8-O counterbore Q F 2-P (Port size) (Rc, NPT, G) MK(2) I RS Q G RS H A 22 D M E Z 11 Lead wire min. bending radius 10 RZQ Auto switch D-A7, A8 MI W S K M E CEP1 S J L B + Stroke A + Stroke CE1 CE2 Rod end male thread ML2B H1 C J G5-S Auto switch D-A9, F9 CV MVGQ Rod end nut C1 X L1 CC RB Rod End Male Thread (mm) Bore size (mm) C1 X H1 L1 J 32 20.5 23.5 28.5 M14 x 1.5

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

-www.stevenengineering.com I CX D D-X 2 x 4-J 20MC NA NB MA MB KA C B Data K H S + Stroke ZZ + Stroke (mm) Stroke range Bore size (mm) B MM I K M MA MB MC NA NB P S Y ZZ H J D C KA GA GB 20 25 32 40 50 63 80 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 11 12 22 25 25 25 25 17 17 22 30 35 35 38 11 11 16 16 16 16 20 4 4 4 4 5 5 6 10 10 12 12 15 15 23 M8 x 1.25

Stroke Reading Cylinder and Counter

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

10

force at least 10 to 20 times the workpiece weight The 10 to 20 times or more of the workpiece weight recommended by SMC is calculated with a margin of a = 4, which allows for impacts that occur during normal transportation, etc. 2 x F > mg Number of fingers and therefore, When = 0.2 When = 0.1 mg F > 2 x mg F = x 4 2 x 0.2 mg F = x 4 2 x 0.1 With a representing the margin, F is determined

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

CLQ

: 32 to 100 Type A Mounting Bracket 2-D T1 T2 M W V CL U CL1 MLGC F B E CNG Joint and Mounting Bracket (Type A, Type B) Part No.