VZ100/300/500

(P , A, R port) VZ VS L plug connector (L) VZ54-LM plug connector (M) VZ54-M01 02 01 02 01 02 DIN terminal (D) VZ54-DVFN Applicable cable O.D.: 3.5 to 7 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-33 34 Series VZ500 Manifold Specifications Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) C [dm3/(sbar)] C [dm3/(sbar)]

0.01

Maximum Flow Rate 1000 SFD200-C12, -02 SFD200-C08 SFD200-C10 Flow rate (L/min(ANR)) SFD100-C08, -02 A 100 SFD100-04 SFD100-06 10 0 0.5 1 Pressure (MPa) 320 Clean Air Filter SFD Series RoHS HAA HAW How to Order AT IDF IDU 1 0 SFD 0 C08 IDF FS Clean air filter IDFA Size Max. flow rate 100 L/min (ANR) 500 L/min (ANR) Option Option None Bracket (SFD100 only) IDFB Symbol 1 2 Symbol Nil B IDH

Prevents Micro-Bubbles

Double acting LLA2A-03-02-C 1 set 1 set Manifold base part no. With flow rate adjustment LVA20A-02-C1 2 sets 2 sets Valve part no. (stations 1 & 2) LVA20A-02-C 1 set 1 set Valve part no. (station 3) P P N.C.

ZP

ZF Symbol S Pad dia. 02 to 16 L 20 to 50 ZP ZCU With buffer AMJ Misc.

HEC-OM-S008

sum CR (H) (L) Thermo-con STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) Host SOH UT ENQ COM Check sum CR (H) (L) Thermo-con SOH UT STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) COM indicates communication command.

5 Port Solenoid Valve SY Series

) (5.5) 1.2 (5.5) 47.6 12.5 (49.5) 16.1 (42.5) 47.6 31.5 [38.5] + 24.5 SY7120-02(-F2) G H 28 A, B port 1/4 39.4 20 (23.9) (P port) 1/4 0.9 31.5 [38.5] 2 18 40 EA P EB 24.5 28 For manifold gasket positioning 22.2 die-cast hole 36 (EA, EB port) 1/8 39.4 L plug connector (L) : SY7120-L(-F ) C8, N9 C10, N11 1 2 M plug connector (M): SY7120-M(-F ) C8, N9 C10, N11 1 2 DIN terminal (D): SY7120-D

VM

VH421-02 to 06 VH431-02 to 06 3 (Exhaust center) Rc 3/4: 58 2 position 3 position 3 4 2 1 Flow direction 4(B) 90 45 45 Flow direction 2 (A) Flow direction 4(B) Flow direction 2 (A) VH422-02 to 06 VH432-02 to 06 2 (Position) N Rc 3/4: 185 1 2 VH6 VH600-06/10 9.7 3 (Exhaust center) 3/4, 1 Rc 1: 194 3 4 5-8-7 2 Series VH How to Order VH 2 0 1 02 1(P) port location Hand valve R L 1(P) port 180

SZ3000

Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications (1) Double wiring specifications 10 02 11 02 10 stations 11 stations Mounting position Symbol D 2 stations 2 stations Specified layout (2) (Up to 21 solenoids possible) D side Specified layout (Up to 22 solenoids possible) 20 20 20 stations 20 stations PG: Flat ribbon cable

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M5 x 0.8 AS231FG-01 AS221FG-01 R 1/8 AS231FG-02 AS221FG-02 R 1/4 AS331FG-02 AS321FG-02 R 1/4 AS331FG-03 AS321FG-03 R 3/8 AS431FG-04 AS421FG-04 R 1/2 AS131FG-U10/32 AS121FG-U10/32 10-32 UNF AS231FG-N01 AS221FG-N01 NPT 1/8 AS231FG-N02 AS221FG-N02 NPT 1/4 AS331FG-N02

V

5 ~ 60C / 40 ~ 40F Temperature Rc(PT) 1/8, 1/4 Port Size 01: 25mm2 02: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01, 02 18, 14 50 25 22 NAK4000-N02, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Q CE-compliant Nil 02 2 stations Nil Rc P R Pilot valve is on the A port side.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

Booster Regulator/Air Tank

(P3 P2) x 9.9 V [L] = (Q Qb/2) x (Tc x K/60) Obtain the tank capacity V. (841 600/2) x (0.5 x 2/60) V = = 4.6 [L] (1.0 0.8) x 9.9 Applicable combination model Internal capacity Tank model VBAT05A(1) VBAT05S(1) VBAT10A(1) VBAT10S(1) VBAT20A(1) VBAT20S(1) VBAT38A(1) VBAT38S(1) 5L VBA10A/11A Select the tank capacity over V.

ASR

MIN. 1 2 Note 1) d Note 2) L3 Note 3) L4 ASR430F-02-06S,-F20 ASR430F-02-08S,-F20 ASR430F-02-10S,-F20 ASR530F-02-06S,-F20 ASR530F-02-08S,-F20 ASR530F-02-10S,-F20 ASR530F-02-12S,-F20 ASR530F-03-06S,-F20 ASR530F-03-08S,-F20 ASR530F-03-10S,-F20 ASR530F-03-12S,-F20 ASR630F-03-10S,-F20 ASR630F-03-12S,-F20 ASR630F-04-10S,-F20 ASR630F-04-12S,-F20 89 111 17 34.9 57.7 6 63.7 21.5 20 17 R1/4 93 114

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

P 1 3 R 1.5 A Rc 1/8 3(R) port Rc 1/4 1(P) port 2-3 die-cast hole For manifold gasket positioning DIN terminal (Y): VQZ32(R)-Y-C6/C8/C10/02 L plug connector (L): VQZ32(R)-L-C6/C8/C10/02 89 300 (Lead wire length) Indicator light 30.5 <35.5> 92.5 Max. 10 Pg.7 Applicable cable O.D. 3.5 to 7 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61 53.5 M plug connector (M): VQZ32(

Process Pump

Note 2) Note 1, 2) Note 1, 2) Note 1, 2) 1.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Valve Mounting VS After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque listed below.

3 Port Air Operated Valve Series SYJA300

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

Precision Regulator

Input signal pressure 0.01 to 0.8 MPa 0.01 to 0.8 MPa IRV (3) Sensitivity Repeatability Linearity Within 0.2% of full span Within 0.5% of full span (3) VEX (4) Within 1% of full span Air consumption (At supply pressure of 1.0 MPa) (5) SRH 11.5 L/min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 11.5 L/min (ANR) or less Rc 1/4, 3/8, 1/2 Rc 1/8 (2 locations