Thermo-chiller/Rack Mount Type

min)/0.18 (at 7 L/min) For Option T: 0.42 (at 10 L/min)/0.4 (at 14 L/min) For Option MT: 0.32 (at 10 L/min)/0.32 (at 14 L/min) Circulating fluid system Rated flow (50/60 Hz)7 [L/min] 7/7 For Options T, MT: 10/14 Flow display range20 [L/min] 2 to 16 Electric conductivity display range [S/cm] 0.1 to 48 (Only for Option DM) Electric conductivity setting range [S/cm] 0.5 to 45 (Only for Option

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Terminal no.) (16.6) (23.7) Cable length (L) [m] Connector A (7.0) 1 3 2 4 (12.7) (5.6) 1 1.5 3 3 5 5 8 8 3 2 1 (13.5) 1 4 A 1 2 (6.7) B A 10 (18) B 15 (14.7) 15 16 (30.7) (1 1) L Connector B C 20 (10) Connector D Produced upon receipt of order Connector A terminal no. 1 2 3 Connector C terminal no. 1 2 3 Signal Cable color Red White Black U V W Weight Product no.

V

www.stevenengineering.com I 2.89 SOLENOID VALVES SERIES VQZ BODY PORTED TYPE M A N I F O L D O P T I O N S E R I E S V Q Z 1 0 0 0 / 2 0 0 0 / 3 0 0 0 B L A N K P L A T E A S S E M B L Y BLANK PLATE ASSEMBLY VVQZ1000-10A-2 VVQZ2000-10A-2 VVQZ3000-10A-2 USED TO RESERVE A VALVE MOUNTING SPACE ON THE MANIFOLD FOR FUTURE USE M A N I F O L D O P T I O N S E R I E S V Q Z 1 0 0 0 / 2 0 0 0 / 3

MGP

4-OA 4-OB counter bore depth OL XX section XX section L Through 4-NN WA Z X0.02 X0.02 DA DB VB VA R U X T H PW 2-P XAH7 6 depth XAH7 depth 6 GA PB Q 2-P (Plug) PA+Stroke GB J K S FB FA C+Stroke B+Stroke E A+Stroke G MGPM, MGPL/Common Dimensions Bore (mm) Standard stroke (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q 25, 50, 75,1 00 71 58 11 8 8.5 9 M5 X 0.8 12 13 15

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"t l: '-~ ~ o li , >-1 '" 2-95.5 .

VFR

1, Metal joint q, w End plate (D) !2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !2, Connection bracket q, w, Gasket e, t, O-ring y, u Non plug-in type Plug-in type VVF4000-3A-2 !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

9 q r !5 y i !8 o !6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2!6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Thermo-chiller

Total hardness [mg/L] 200 or less Ammonium ion (NH4+) [mg/L] 0.1 or less Calcium hardness (CaCO3) [mg/L] 150 or less Residual chlorine (Cl) [mg/L] 0.3 or less Ionic state silica (SiO2) [mg/L] 50 or less Free carbon (CO2) [mg/L] 4.0 or less Iron (Fe) [mg/L] 1.0 or less Reference item In the case of [Mcm], it will be 0.003 to 0.01.

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

ZP

Symbol Thread dia. 1 A8 Buffer connection thread Symbol Pad dia. 2 A10 2 10 to 16 B5 3 20 to 32 3 A14 4 40, 50 B8 T 2 ZP B5 [q Adaptor] Not used for 02 to 08 diameter.

Modular F.R.L. Unit

5000 10 Flow rate L/min (ANR) Flow rate L/min (ANR) Orange mark AR30 Rc 3/8 AR60 Rc 1 0.6 0.6 0.5 0.5 2.

Air Fittings & Tubing

D L M Q KJL01-00 KJL03-00 KJL07-00 1 8 5 32 1 4 12.7 12.7 13.6 8.4 9.3 12 1.6 2 3.3 15 15.8 17.4 2.5 3 4.6 5.8 6.3 7.6 Note1) D: max. diameter Kl Ml Plug-in elbow: KJL Tube O.D. (inch) Hl Min. hole dia. Weight (g) Fitting size d (inch) (1) Part No.

F

Note: The dimensions in brackets are for Soft Nylon. 1/2 1/2 KQH13-37S 22.23 30 22 22 9.6 44 P R O D U C T S E L E C T O R M A L E E L B O W : K Q L ( K Q 2 L ) Applicable Thread Model H D1 D2 L1 L2 A M Effective Weight Tube OD R(PT) (Hex) 0rifice (mm2) (g) (mm) Nylon/Urethane 3.2 M5x0.8 KQL23-M5 8 9.6 8 17.5 15 16 15.5 3/2.5 6 3.2 1/8 KQL23-01S 10 9.6 10 17.5 21.5 22.5 15.5 3/2.5 8 3.2 1

Booster Regulator/Air Tank

Model VBAT05A-SV-Q VBAT10A-SV-Q VBAT20A-RV-Q VBAT38A-RV-Q Accessory kit Safety valve Drain valve VBAT5A-Y-2 VBAT-S (Set pressure: 2 MPa) VBAT-V1 VBAT10A-Y-2 VBAT20A-Y-2 VBAT-R (Set pressure: 1 MPa) The Accessory Kit is a Set of Nos. q to t. VBAT20A-Y-2 VBAT10A-Y-2 Model Description No.

Auto Switch Guide

MK(2) Auto Switch Mounting Bracket Part No. (Including bracket, screw) RS Q G Auto switch mounting screw M2.5 x 10 l (D-E7A/E8A) M2.5 x 12 l (D-M5/M5W/M5T) Applicable bore size (mm) 6 BP-1 10 BP-1 15 BP-1 RS H A Cylinder series CDJP-D 1. Insert the auto switch mounting nut into the auto switch mounting groove and then set the switch at the mounting position by sliding. 2.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R 3 P 1 30 17 6.5 15 2 2 2 2 2 8 0.5 0.5 P = 11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 35 4 L2 38 L1 42 M plug connector (M) 1 2 3 4 5 n U side D side Stations Direct manual override (Non-locking) 24 15 43 L plug connector (L) Dimensions n: Stations n L 11 12 13 14 15 16 17 18 19 20 28 20 39 31

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Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

8 / 8 3: 16 / 16 / 2 / 2 4: 32 / 2 / 2 / 2 Process data mapping Port1/Port2/Port3/Port4 (Input and Output) 4 0..7 0 L+ control Port 1 0: L+ ON, 1: L+ OFF 1 L+ control Port 2 0: L+ ON, 1: L+ OFF 5 2 L+ control Port 3 0: L+ ON, 1: L+ OFF 3 L+ control Port 4 0: L+ ON, 1: L+ OFF 4..7 Reserved 0 -105No.EX-OMX1011 Configuration format (EX600-LAB1 / EX600-LBB1) Byte 6 to 45 EX600-LAB1 / EX600