VFS 01 02 2 position double: VFS2200-F-01 02 3 position closed center: VFS2300-F-01 02 3 position exhaust center: VFS2400-F-01 02 3 position pressure center: VFS2500-F-01 02 2-5 mounting hole Manual override 150.5 (3 position: 158) (Non-locking) 2-5 mounting hole Manual override (Non-locking) With light/surge voltage suppressor 163.5 (3 position: 171) With light/surge voltage suppressor 1 8 (
25 or less 33 or less 53 or less VQZ3320 0.54 0.21 2.1 0.54 0.19 2.3 Metal seal Closed center VQZ3000 30 or less 39 or less 59 or less VQZ3321 0.62 0.33 2.4 0.66 0.30 2.7 Rubber seal 134 25 or less 33 or less 53 or less VQZ3420 0.54 0.19 2.4 0.54 0.19 2.3 Metal seal Exhaust center 3 position 30 or less 39 or less 59 or less VQZ3421 0.81 0.38 3.2 0.66 0.30 2.7 Rubber seal 25 or less 33 or
[mm] Note 1) Port size A B C D (g6) DD (h9) F H J K With auto switch Without auto switch U W BA BB BC CA CB Note 2) Key dimensions S SB SC SD SE S b L1 Size D50 Rc1/8 62 48 46 15 25 2.5 36 M8 1.25 depth 8 5 156 (189) 1.5 5 14.5 33 144 (177) 98 17 17 8.5 6 9.5 7.5 5 0 0.030 25 63 Rc1/8 76 60 57 17 30 2.5 41 M10 1.5 depth 12 5 175 (213.5) 1.5 5 21.5 33 163 (201.5) 117 19.5 20 10 7 11 8
With end lock (20): MXQ20-R Operating port 2-Rc 1/8 8 34 33 65 11.5 78.5 Other dimensions are the same as basic style.
Hs (mm) Symbol BX BY D F GA GB IA K L M N S W Wc Ws Z ZZ Hs Ht Bore size 40 56 54 16 44 77 10 47 14 65 M12 x 1.5 86 122.5 5 39 27.5 124 238 45 28 50 64 64 20 55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 49 28 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122 236 54.5 28 Unclamp side lock (F) 3-Rc 1/4 Unclamp side port 3-Rc 1/4 Clamp side port 52 N L + Stroke Rear
Hs (mm) Symbol BX BY D F GA GB IA K L M N S W Wc Ws Z ZZ Hs Ht Bore size 40 56 54 16 44 77 10 47 14 65 M12 x 1.5 86 122.5 5 39 27.5 124 238 45 28 50 64 64 20 55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 49 28 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122 236 54.5 28 Unclamp side lock (F) 3-Rc 1/4 Unclamp side port 3-Rc 1/4 Clamp side port 52 N L + Stroke Rear
Stroke (mm) 200st 1 300st 1 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 60 10 20 30 40 50 20 40 60 80 100 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGL 40Stroke 4 (Ball bushing type) 800st Deflection Y (mm) 3 700st 600st 2 500st 400st 1 300st st: Stroke (mm) 200st 100st 0 0 20 40 60 80 100 120 Allowable end load F (N) MGGL 50Stroke
A B C D E F H I G Model VHS20 VHS30 VHS40 VHS40-06 VHS50 59 78 107 110 134 20 29 39 42 53 40 53 70 75 90 34 46 63 67 78 22 21 26 45 55 58 65 76 28 30 36 44 54 45 55 63 69 81 33 42 44 50 61 How to Order 30 03 RZ F VHS Residual pressure relief 3 port valve Caution 1. Pleae consult with SMC when a pressure switch and T type spacer are installed on the outlet of pressure release valve. 2.
plate assembly u F kit L kit T kit S kit P (J) kit q !
C Rc(PT)P Rear cylinder port Width across flats Rc(PT)P Front cylinder port Width across flats B1 MM W GR GR E D C GL1 GL W T 16 Effective thread length MB 4-J 16 GF 4-J V Q VA H1 N K F GE BN A H S + Stroke ZZ + Stroke With rod boot e 9 l 13 h f ZZ + Stroke (mm) Effective thread length (mm) Width across flats Stroke range (mm) Bore size (mm) D F B A B1 H1 BP GL B2 BN GC GL1 C GA GB GD Ee11
an accessory for the thread symbol F.
-D ZS-33-F D NPN Analog 4 to 20 mA E PNP Analog 1 to 5 V Analog 0 to 10 V*3 + ZS-33-D F PNP Analog 4 to 20 mA *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.
I/F DICOM CN3-5 DC24V(DC24V10% 150mA) DC24V CN3-10 DC24V I/F DOCOM CN3-3 EM1LG DC24V DC24V LG CN3-1 MO1MO2 CN3-11 SD 3 22 3 3.6 OFFON CPU () ON ON OFF OFF ON ON OFF OFF ON ON ON () OFF () OFF 1s ON ON () OFF 50ms 60ms () OFF 50ms 60ms .
C C1 L L1 L2 L3 L Individual wiring V V V V F D-sub connector V V P Flat ribbon cable connector V V 8 (Common PV) 6 (Common PS) P Vacuum pump system PN 5/16"(Common PV) 1/4" (Common PS) 10 10 stations 1 Common wiring F/P is available only for solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors.
OUT2 [F 1]OUT1[F 2]OUT2// -25No.PS-OMU0002CN-D <> () () 13[SEt] [SEt]()[P_1][n_1]() () ( )(61) ( )(61 ) 2 (2OUT2) 1 2 2 3(31) ([SEt]) 4OUT2OUT2[P_2][n_2] -26No.PS-OMU0002CN-D 26 P1L()P1H() WH1()dt1() (n1L n1H) 33 OUT2 -27No.PS-OMU0002CN-D 35[F 0] [F] 2 3 5 F0 F1 F99 ()[-] [F 0] 30 ISE20A MPa M ZSE20A(F) kPa ISE20A P psi ZSE20A(F) [F 1] OUT1 31 ISE20A0.500 MPa ZSE20A-50.5 kPa
M5 x 0.8 F NN MM GA GB BA CB D LH LB LY With head cover port in axial position (R) LT BB NB A NA X Y LX LZ S + Stroke Z + Stroke H 2-LC Mounting hole (mm) Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8
Overall length: h + H + S + (2 x Stroke) [mm] h + Stroke S + Stroke f 10.2 10.2 10.2 l f 10.2 l + Stroke ZZ + (2 x Stroke) h Bore size A AL B B1 BH1 BH2 BH3 BN BP C D E F GA GB GC GD GE GF H H1 J 32 22 19.5 46 46 23 38.5 46.5 59 1/8 32.5 12 30 13 37.5 13 37.5 18.5 4 13 47 6 M6 x 1.0 40 30 27 57 52 28.5 42.5 48.5 73 1/8 38 16 35 13 59.5 14 44.5 19.5 4 51 8 M6 x 1.0 50 35 32 66 65 33 49 55.5
Contact SMC regarding the specifications for PSI unit and F .
Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Over flow port Rc1 (Symbol F: G1, Symbol N: NPT1) Wetted material Stainless, Cupper(Heat exchanger brazing), Brass, Bronze PTFE, PU, EPDM, PVC, NBR, PE, NR, PBT, POM, PP, Carbon, Ceramic Temperature range oC 5 to 40 Pressure range MPa 0.3 to 0.5 Required flow 50/60Hz 5 L/min 33 / 34 38 / 40 Facility water system Facility water