PFxx-OMO0004CN

7 A*8 201 2~200L/min 8 2 (11) S () C8 8(5/16") *6 02*1 Rc1/4 M SI*7 N02*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R S () () T V () () -11No.PF-OMO0004CN-E / ZS-33-D 2m ZS-33-F ZS-33-J (

Digital Flow Switch (Remote type sensor unit)

Description Remarks ZS-33-D Lead wire connector Length: 2 m Connector cover (silicone rubber) ZS-33-F ZS-33-J Panel mount adapter (without flow adjustment valve) ZS-33-JS Panel mount adapter (with flow adjustment valve) ZS-33-M Bracket (without flow adjustment valve) Mounting screw 2 pcs. ZS-33-MS Bracket (with flow adjustment valve) Mounting screw 3 pcs.

HRX-OM-X010

HRZ Series 5.3 Operation Screen 5-33 5-33 HRX-OM-X010 Chapter 5 System Operation 5.3.31 Maintenance screen 7 POWER ON 1 2 3 Figure 5-34 Maintenance screen 7 When MSG is READY, Start/Stop of circulating fluid automatic collection is available. Table 5-31 Maintenance screen 7 No. Item Descriptions Indicates the status of circulating fluid automatic collection. READY : Ready to collect.

70pvpump

Option Body material Nil N Body only With silencer 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) For AIR EXH: AN200-02 Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Diaphragm material 02 03 1/4 (8A) 3/8 (10A) 1 PTFE (Fluoro resin) JIS Symbol Type Thread

Sine Cylinder Series REC

-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Vacuum Unit

How to Order Manifold w r q e ZZK2 A P 2 L 04 If the manifold parts (set of end plates for both ends and tension bolts) are shipped unassembled, please refer to page 33. q Stations w System/Port e Supply valve and release valve wiring1 Symbol System Port Symbol Stations 01 1 station 02 2 stations Symbol Wiring Selectable wiring for manifold r (Refer to page 16.)

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

mountable number 3 port valve mountable number 00 02 04 00 02 04 No 2 port valves used 2 pcs.

Speed Controller with

Note) The applicable cylinder bore sizes (mm) for AS1002F-02 are 2.5, 4, 6.

3 Port Solenoid Valve Series SYJ300/500/700

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Option 1 W Nil DIN Rail Mounting Bracket (Order Separately) With lead wire with connector (2 m) With lead wire with connector (2 m) Connector cover (Silicone rubber) ZS 33 R ZS-33-F S Stations ZS-33-D S 1 2 3 4 5 ZS-33-D 1 station 2 stations 3 stations 4 stations 5 stations IN IN N Note) If an accessory is required, order separately using ZS part numbers.

Air Pilot Operated

OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .

Air Pilot Operated Series NVSA

OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .

30

(mm) Connection thread Rc T (M) Width across flat M Weight (g) Mounting hole L1 L2 Model H1 H2 KQB2E23-02 KQB2E04-01 KQB2E04-02 KQB2E06-01 KQB2E06-02 KQB2E06-03 KQB2E08-01 KQB2E08-02 KQB2E08-03 KQB2E10-02 KQB2E10-03 KQB2E12-03 KQB2E12-04 KQB2E16-03 KQB2E16-04 3.2 3.4 1/4 1/8 1/4 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8 3/8 1/2 3/8 1/2 17 14 17 11 12 31 25.8 30.9 24.2 31.6 33 26.3 32.4 34 31.6 33.6

Thermo-chiller/Rack Mount Type

Option 1 (pp. 32, 33) Nil None DM With electric conductivity control function, Applicable to DI water piping M Applicable to DI water piping T1 Inverter pump mounted Power supply 20 Single-phase 200 to 230 VAC (50/60 Hz) When multiple options are combined, indicate symbols in alphabetical order.

HRX-OM-M090

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking. 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-49 5.17 Data reset function . 5-51 5.17.1 Data reset function . 5-51 5.17.2

HRX-OM-W058

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking . 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-47 5.17 Data reset function . 5-49 5.17.1 Data reset function . 5-49 5.17.2

HRX-OM-X027

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking . 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-47 5.17 Data reset function . 5-49 5.17.1 Data reset function . 5-49 5.17.2

HRX-OM-R016

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking. 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-48 5.17 Data reset function . 5-50 5.17.1 Data reset function . 5-50 5.17.2