Membrane Air Dryer

connection $ $ $ 1/2 30 50 60 75 100 H L H L L S L S L S Nil Nil Symbol Contents Thread type Symbol Type M, V Nil Rc 3 $ $ $ $ Modular connection N F NPT G 15 RoHS Membrane Air Dryer/Unit Type Series IDG Single Unit Type Model Selection Made to Order Specific Product Precautions Unit Type How to Order M 3 IDG 02 10 Made to Order Refer to page 33 to 44 for details.

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

PFxx-OMO0004CN

7 A*8 201 2~200L/min 8 2 (11) S () C8 8(5/16") *6 02*1 Rc1/4 M SI*7 N02*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R S () () T V () () -11No.PF-OMO0004CN-E / ZS-33-D 2m ZS-33-F ZS-33-J (

Digital Flow Switch (Remote type sensor unit)

Description Remarks ZS-33-D Lead wire connector Length: 2 m Connector cover (silicone rubber) ZS-33-F ZS-33-J Panel mount adapter (without flow adjustment valve) ZS-33-JS Panel mount adapter (with flow adjustment valve) ZS-33-M Bracket (without flow adjustment valve) Mounting screw 2 pcs. ZS-33-MS Bracket (with flow adjustment valve) Mounting screw 3 pcs.

HRX-OM-X010

HRZ Series 5.3 Operation Screen 5-33 5-33 HRX-OM-X010 Chapter 5 System Operation 5.3.31 Maintenance screen 7 POWER ON 1 2 3 Figure 5-34 Maintenance screen 7 When MSG is READY, Start/Stop of circulating fluid automatic collection is available. Table 5-31 Maintenance screen 7 No. Item Descriptions Indicates the status of circulating fluid automatic collection. READY : Ready to collect.

70pvpump

Option Body material Nil N Body only With silencer 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) For AIR EXH: AN200-02 Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Diaphragm material 02 03 1/4 (8A) 3/8 (10A) 1 PTFE (Fluoro resin) JIS Symbol Type Thread

Sine Cylinder Series REC

-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Vacuum Unit

How to Order Manifold w r q e ZZK2 A P 2 L 04 If the manifold parts (set of end plates for both ends and tension bolts) are shipped unassembled, please refer to page 33. q Stations w System/Port e Supply valve and release valve wiring1 Symbol System Port Symbol Stations 01 1 station 02 2 stations Symbol Wiring Selectable wiring for manifold r (Refer to page 16.)

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

mountable number 3 port valve mountable number 00 02 04 00 02 04 No 2 port valves used 2 pcs.

Speed Controller with

Note) The applicable cylinder bore sizes (mm) for AS1002F-02 are 2.5, 4, 6.

3 Port Solenoid Valve Series SYJ300/500/700

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Option 1 W Nil DIN Rail Mounting Bracket (Order Separately) With lead wire with connector (2 m) With lead wire with connector (2 m) Connector cover (Silicone rubber) ZS 33 R ZS-33-F S Stations ZS-33-D S 1 2 3 4 5 ZS-33-D 1 station 2 stations 3 stations 4 stations 5 stations IN IN N Note) If an accessory is required, order separately using ZS part numbers.

Air Pilot Operated

OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .

Air Pilot Operated Series NVSA

OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .

30

(mm) Connection thread Rc T (M) Width across flat M Weight (g) Mounting hole L1 L2 Model H1 H2 KQB2E23-02 KQB2E04-01 KQB2E04-02 KQB2E06-01 KQB2E06-02 KQB2E06-03 KQB2E08-01 KQB2E08-02 KQB2E08-03 KQB2E10-02 KQB2E10-03 KQB2E12-03 KQB2E12-04 KQB2E16-03 KQB2E16-04 3.2 3.4 1/4 1/8 1/4 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8 3/8 1/2 3/8 1/2 17 14 17 11 12 31 25.8 30.9 24.2 31.6 33 26.3 32.4 34 31.6 33.6

Thermo-chiller/Rack Mount Type

Option 1 (pp. 32, 33) Nil None DM With electric conductivity control function, Applicable to DI water piping M Applicable to DI water piping T1 Inverter pump mounted Power supply 20 Single-phase 200 to 230 VAC (50/60 Hz) When multiple options are combined, indicate symbols in alphabetical order.

HRX-OM-M090

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking. 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-49 5.17 Data reset function . 5-51 5.17.1 Data reset function . 5-51 5.17.2

HRX-OM-W058

5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking . 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-47 5.17 Data reset function . 5-49 5.17.1 Data reset function . 5-49 5.17.2