Air Cylinder

Y-G02 20 34 8.5 16 25 M8 x 1.25 10.3 11.5 8 8 +0.4 +0.2 16 21 IY-G02 Y-G03 25, 32 41 10.5 20 30 M10 x 1.25 12.8 14 10 10 +0.4 +0.2 20 25.6 IY-G03 Y-G04 40 42 16 22 30 M14 x 1.5 12 14 10 18 +0.5 +0.3 36 41.6 IY-G04 Y-G05 50, 63 56 20 28 40 M18 x 1.5 16 20 14 22 +0.5 +0.3 44 50.6 IY-G05 Y-G08 80 71 23 38 50 M22 x 1.5 21 27 18 28 +0.5 +0.3 56 64 IY-G08 Y-G10 100 79 24 44 55 M26 x 1.5 24 31 22

CV/MVGQ

ML2B 0.030 0.060 + 0.048 0 Y-J010B 3.2 8 10 3.3 3.3 0.030 0.060 + 0.048 0 Y-J016B 6.5 12 10 5 5 C J G5-S CV MVGQ CC RB J D-X 20Data 10-15-9 10 Valve Mounted Cylinder Single Acting, Single Rod, Spring Return/Extend Series CVJ3 10, 16 How to Order Stroke (mm) Electrical entry G L M Grommet L plug connector M plug connector 10 16 15, 30, 45, 60 15, 30, 45, 60 Bore size 10 16 10 mm 16 mm Light

CV/MVGQ

ML2B 0.030 0.060 + 0.048 0 Y-J010B 3.2 8 10 3.3 3.3 0.030 0.060 + 0.048 0 Y-J016B 6.5 12 10 5 5 C J G5-S CV MVGQ CC RB J D-X 20Data 10-15-9 10 Valve Mounted Cylinder Single Acting, Single Rod, Spring Return/Extend Series CVJ3 10, 16 How to Order Stroke (mm) Electrical entry G L M Grommet L plug connector M plug connector 10 16 15, 30, 45, 60 15, 30, 45, 60 Bore size 10 16 10 mm 16 mm Light

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

2/3 Port Valve

Description 10 5 1 AC Standard Brass VX22 Body Core assembly Stainless steel q DC Note 1) Dew point 10C or less. Note 2) 50 cSt or less. Note 3) Valve on option "V", "M", "Y" (Non-leak, vacuum).

CJ2

B H B H d C C d 10 8 21 M4 X 0.7 16.2 Y-J010B SNJ-006B 16 11 21 M5 X 0.8 16.6 Y-J016B M6 X 1.0 4 8 9.2 6 NTJ-006A 2.4 M3 X 0.5 6.4 5.5 6 SNJ-010B M8 X 1.0 4 11 12.7 10 NTJ-010A 3.2 M4 X 0.7 8.1 7 10 Part No.

42

(Including r, t and y) No. Part no. Description Material Qty VVQ4000 1 VFS r VVQ4000-80A-1 Gasket HNBR 10 Type Port thread type t VVQ4000-80A-2 Gasket HNBR 10 VFR Nil Rc N NPT T NPTF F G y VVQ4000-80A-4 Clip Stainless steel 10 A For 1 station C For 2 stations Note 3) Note) Spare parts consist of sets containing 10 pcs. each.

High Purity Fluoropolymer

M H L2 L1 Y E 1/8 3 4 Class 1 LQ1L12-F LQ1L11-F 11.5 18.5 10 Rc (NPT) Port size 17 18 1/8" Y 4 6 4 6 LQ1L43-F LQ1L42-F LQ1L41-F LQ1L36-F LQ1L35-F LQ1L34-F LQ1L33-F LQ1L32-F LQ1L31-F LQ1L24-F LQ1L23-F LQ1L22-F LQ1L21-F 18.5 19.5 1/8" 16.5 14 15 27 (L2) 21.5 22.5 M 1/4" 10 1/4 21.5 6 8 1/4" 23 23 (E) 17 20 H 35 10 (L1) 25 6 8 Class 2 to 5 3/8" 25 12 10 12 25 3/8" 29 H 28 21 24 45 29.5 1/2"

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

4 r t y u i !5 !6 No.

REA/REB

-2-10.)

REA/REB

-2-10.)

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

3 r y e @6 @5 @3 $1 10 Component Parts No. Description Slide block No.

CJ2

B H C C d d 10 Y-J010B 15.2 8 21 M4 x 0.7 CP95 SNJ-006B 16 Y-J016B 6 NTJ-006A 16.6 11 21 M5 x 0.8 M6 x 1.0 4 8 9.2 6 M3 x 0.5 2.4 5.5 6.4 SNJ-010B 10 NTJ-010A M8 x 1.0 4 11 12.7 10 M4 x 0.7 3.2 7 8.1 NDd9 NDH10 NX R1 U1 Part no.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

D20Y= L4= L2= W2= (mm) Size 30 50 63 80 100 L2 max Y 2 Y Y Y Y Y W2 8.5 to 25 10 to 36 11 to 41 13.5 to 50 17 to 60 L4 max 1 to 2 1 to 5.5 1 to 6.5 1 to 8 1.5 to 10.5 L2 2 L2 2 L2 2 L2 3 L2 4 11-7-39 40 Series CRA1 Made to Order Specifications: -XC7 to -XC64 How to Order B P D C S 50 RA1 F59 C 90 X C59 C62 -X10 -X16 Built in magnet Nil D None Built-in magnet Simple specials, Made-to-order

I

V DC Available as an Option Control Signal Power Requirement Less than 1mW Power Supply Voltage 24 V DC 10% Power Consumption 1.8 W maximum Electrical Connection DIN Plug Cable Gland Size Suits 4 ~ 6.5 mm Cable Bleed Air Consumption (at 9 Kgf/cmSupply Pressure) Maximum 10 nl/min Mounting Any Orientation S Y M B O L S H O W T O O R D E R S E R I E S V Y D I M E N S I O N S S E E N E X T

modular-press-e

AF10P-260S AF20P-260S AF30P-260S AF40P-260S Round type Note 2) Standard G27-10-R1 G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L G27-10-R1 Note 3) G27-10-R1 Note 3) 0.02 to 0.2 MPa setting Standard G27-10-R1 y IN OUT Round type Note 2) Pressure gauge u r t i (with color zone) 0.02 to 0.2 MPa setting Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only

Modular F.R.L. Pressure Control Equipment

AF10P-260S AF20P-260S AF30P-260S AF40P-260S Round type Note 2) Standard G27-10-R1 G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L G27-10-R1 Note 3) G27-10-R1 Note 3) 0.02 to 0.2 MPa setting Standard G27-10-R1 y IN OUT Round type Note 2) Pressure gauge u r t i (with color zone) 0.02 to 0.2 MPa setting Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

D20Y= L4= L2= W2= (mm) Size 30 50 63 80 100 L2 max Y 2 Y Y Y Y Y W2 8.5 to 25 10 to 36 11 to 41 13.5 to 50 17 to 60 L4 max 1 to 2 1 to 5.5 1 to 6.5 1 to 8 1.5 to 10.5 L2 2 L2 2 L2 2 L2 3 L2 4 11-7-39 40 Series CRA1 Made to Order Specifications: -XC7 to -XC64 How to Order B P D C S 50 RA1 F59 C 90 X C59 C62 -X10 -X16 Built in magnet Nil D None Built-in magnet Simple specials, Made-to-order

Electric Actuator Triple Axis P&P Unit

G J Y axis/Z axis Axis type Ball screw specifications Rolled ball screw (mm) 15, lead 5 15, lead 10 15, lead 20 16, lead 32 Symbol H A C J Y axis motor in-line mount Z axis motor in-line mount Z axis motor side mount Y ZB ZC 1 2 Stroke(mm) 1) Used for X axis in double and triple axis P&P. 2) Used for Y axis in double and triple axis P&P. 100 150 10 15 Motor specifications 950 1000 95 A0 Brake

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 6 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer