CNA

K 8 f l N C h + l B ZZ + l + 2 stroke S + Stroke H + Stroke ZZ + 2 strokes H TX TZ With rod boot on both sides ZZ + 2 l + 2 stroke Bore size (mm) Stroke range (mm) 40 50 63 80 100 MM N J K KA A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 P 1/4 3/8 3/8 1/2 1/2 M14 x 1.5 27 30 31 37 40 6 7 7 11 11 M8 x 1.25 14 18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96

ZP

N S U F E Model Pad unit part no. Adapter assembly part no.

CL

MNB CNA Maximum piston speed: 500 mm/s It can be used at 50 to 500 mm/s provided that it is within the allowable kinetic energy range. (The lock-up cylinder can operate at 50 to 200 mm/s.)

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

1.0 Communication speed [bps] 156 k/625 k/2.5 M /5 M/10 M 125 k/250 k/500 k 9.6 k/19.2 k/45.45 k/ 93.75 k/187.5 k/500 k/ 1.5 M/3 M/6 M/12 M 10 M/100 M Configuration file Note 2) EDS file GSD file EDS file Communication specifications Input 896 points 108 words 4 stations occupied (8 times setting) Input 200 bytes Output 200 bytes Input 57 words Output 57 words Input 256 bytes Output 256

energy saving effect

L Required facility water system 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s Model Heat radiation [kW] Facility water specifications HRSH100-Wl-l Approx. 20 Refer to "Facility water system" in the specifications on pages 167 and 169. 0.05 s HRSH150-Wl-l Approx. 27 HRSH200-Wl-l Approx. 34 HRSH250-Wl-l Approx. 40 0.02 s 0.01 s 100 135 200 300

TABLE OF CONTENTS

Body Brass Body S. S.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

PW Width across flats KA LZ PH GB Width across flats B1 MM E RY BF FY D e C B N BN H1 C B RT AL A K FT ZZ + l + Stroke h + l FX FZ S + Stroke M H ZZ + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BF BN BP BQ C D E GA GB GC GD GL GR H1 J K KA LZ Without rod boot With rod boot 40 Up to 800 20 to 800 30 27 60 22 71 96 1/4 1/4 44 16 32 85 15 26 54 10 10 8 M8 x 1.25 6 14 71 50 Up to

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-

Tie-rod Type Hydraulic Cylinder

TR d d W D E E D TY W TDe8 MA a MA a C NA F K A A K F NA B H S + Stroke H + Stroke TX 0 0.5 ZZ + 2 strokes TZ (mm) Bore size (mm) A B C TR a E D TDe8 d F G GA J K M MA MM NA P R S T H 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 0.032 0.059 0.032 0.059 0.032 0.059 0.040 0.073 0.050 0.089 0.050 0.089 0.050 0.089 40 17 45 R0.5

Modular Type Filter Regulator Series AW

(K) to 40(K) AW30(K), 40(K) AW20(K) AW30(K), 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K), 40(K) Symbol 1 Note 4) 2 6 8 C J Note 5) N R W Note 1) Drain guide is NPT1/4 (applicable to AW30 to 40), and the exhaust port for auto drain comes with 3/8" One-touch fitting (applicable to AW30 to 40).

MXQ

Ea = K E max Ea = 1x 0.11 = 0.11 Workpiece mounting coefficient K: Fig. (3) Can be used based on E = 0.088 Ea = 0.11 Max. allowable kinetic energy Emax: Table (1) Kinetic energy (E) Allowable kinetic energy (Ea) Load Factor 3 3-1 Load Factor of Load Weight Wa = K Wmax Workpiece mounting coefficient K: Fig. (3) Allowable load weight coefficient : Graph (1) Max. allowable load weight Wmax

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

Compact Manifold Regulator

K P P C C U U O O S S H H L L 11.5 8 3 5 L2 dimension DIN rail part no.

15

[mm/s] (Operating condition) a1: Acceleration [mm/s2] T1 = V/a1 [s] T3 = V/a2 [s] = = 0.57 [s] T2: Constant speed time can be found from the following equation.

CRQ2

(without keys on the long shaft) J Double round shaft K Shaft end form 11-8-12 to 11-8-24 Pattern Rotation range -X6 Shaft, parallel key stainless spec. 11-8-1 2 Compact Rotary Actuator Rack & Pinion Style Series CRQ2 Size: 10, 15, 20, 30, 40 How to Order Without auto switch With auto switch CRQ2B S 20 90 CDRQ2B S 20 90 F9BW S Shaft type Built-in magnet Courtesy of Steven Engineering, Inc

MGP

speed of 300mm/s.

MG

the speed of 200 mm/s.

CL

Rod side flange style Foot style Basic style S + Stroke With air cushion LS + Stroke S + Stroke ZZ + Stroke ZZ + Stroke ZZ + Stroke S + Stroke Without rod boot With rod boot Without rod boot With rod boot S Without rod boot With rod boot S Bore size (mm) Stroke range WB S Bore size (mm) Stroke range 201 to 350 301 to 400 301 to 450 301 to 800 LS Bore size (mm) Stroke range 201 to 350 301

JXCx-OMU0004

14 450 2500 320 2500 150 2500 15 500 3000 350 3000 175 3000 58 No.JXC-OMU0004-A 10.5 LER LER LER***K LER***J (CCW) (CCW) [/s] 20 30 2] 20 20 [/s [/s] 20 30 2] 1000 1000 [/s [] 1 1 LER 7 LED f 3 LER***K 20[/s]LER***J 30[/s] LER10 LER30 LER50 K J K J K J [Nm] 0.16 0.11 0.6 0.4 5.0 3.3 *LER10*30%F.S.LER30*25%F.S.LER50* 20%F.S. * LER***K LER***J [/s] [/s] 2] 2] [/s [/s 0 20 200

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

0For DeviceNetTM Plug (Male) K yFor CC-Link K !1For DeviceNetTM K !6For PROFIBUS DP K e For EtherNet/IPTM, PROFINET, EtherCAT, Ethernet POWERLINK K w and K e are used in combination with each other. K !4For PROFIBUS DP Terminating resistor Plug (Male) K tFor CC-Link K oFor DeviceNetTM Socket (Female) K uFor CC-Link K !