5 Port Solenoid Valve Series SY3000/5000/7000/9000

SV SYJ SZ ARBY3000-05--2 (For odd number stations) ARBY3000-06--2 (For even number stations) ARBY3000-M1--2 ARBY5000-00--2 ARBY5000-M1--2 VP4 S0700 VQ VQ4 + + + VQ5 + + VQC VQZ SQ Series SY7000 VFS ARBY7000 00 P 2 VFR VQ7 Regulating port Pressure gauge connection port Pressure gauge (G15-10-01) Plug (M-5P) 00 M1 P port P A1 B1 A port (P controlled type, A port regulation) Note) ARBY

KA

(mm) Polyurethane Soft nylon D L M Part No. 4 3.2 KAH23-00 31.5 32.5 34.5 18.5 21 22 15.5 16 17 15.2 18.5 20.9 9.6 10.4 12.8 46.1 46.1 29.5 29.5 18.0 18.0 4 3 3 KAH04-00 KAH06-00 13.1 13.1 5.6 5.6 3.4 2.9 8 6 38.5 42.5 44.5 KAH08-00 6 11 12 10 KAH10-00 KAH12-00 14 Different diameter straight: KAH Tube O.D.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 40.9 40.3 27.6 27 15.5 15.2 1.5 1.6 13 17 23 22 KFH04-00 KFH06-00 KFH08U-00 KFH08N-00 KFH10U-00 KFH10N-00 KFH12U-00 KFH12N-00 2.5 4 5 6 6.5 7.5 8 9 4 6 8 10 10 12 6 11 17 21 30 35 45 3 4 5 5.5 6.5 7 8 8 16.2 41.3 28 12 14 36 10 18.8 17 17 44.6 30 42 41 12 19.3 17 19 45.5 32 Male elbow: KFL Applicable tube (mm) Thread R(PT) Part No. H1 (Hex.) H2 (Hex.)

Antistatic One-touch Fittings Series KA

(mm) Polyurethane Soft nylon Effective orifice (mm 2) Weight (g) L M D Part No. 4 3.2 KAH23-00 31.5 32.5 34.5 18.5 21 22 9.6 10.4 12.8 15.5 16 17 15.2 18.5 20.9 KAH04-00 KAH06-00 13.1 13.1 5.6 5.6 3.4 2.9 46.1 46.1 29.5 29.5 18.0 18.0 5 3 3 8 6 KAH08-00 38.5 42.5 44.5 7 11 12 10 KAH10-00 KAH12-00 14 Different Dia. Straight: KAH Applicable tube O.D.

VVXA21/22

5"5 VVXA211-stations VVXA212-stations VVXA221-stations VVXA222-stations 7 %1 % = > = > 3 1 VXA21 -00 . ; < Construction/ Principal Parts Material 3 1 VXA22 -00 ; Common SUP type Solenoid Valve for Manifold " 5 '* #5 5 # I ,+!J ! #5 " 0"8 1 E F 4 " 4 % " 4 4 4 4 7 %1 % 3 VXA212-00 VXA213-00 VXA223-00 VXA224-00 = < .G < < * 4.5 . >< * < * 6 < * $ /H"3 % .

LEC-OM02704CN

(RX(n+2)2~RX(n+2)9) 1 5 23 5 (1) DWELL [10STMm] [ms] [ms] [r/min] [ms] 1 5.00 3000 100 150 0 1 2 6.00 2000 0 1 3 3.00 1000 0 0(2) 1. 0 2. ,0 No.1 (100) No.1 (150) ( 3000 ) ( 2 000 ) ( 1 000 ) 0r/min 5.00 6 .00 3 .00 0 5.00 1 1 .00 1 4 .00 1 ON (RYn1) OFF 1 No. (RX(n+2)2~RX(n+2)9) .

VVX31/32/33

VX3235-00 VX3335-00 3 1.1 0.25 0.27 AC DC 60 40 1 99 60 120 183 Maximun VX3245-00 40 1.6 0.20 0.38 4 20 VX3345-00 Minimum AC, DC Ambient temperature (C ) 40 10 Operating fluid temp.

Self-seal Fittings Series KC

M1 L M2 D 4 KCH04-00 KCH06-00 KCH08-00 KCH10-00 KCH12-00 42.1 45.8 52.8 59.8 63.5 10.4 12.8 15.2 18.5 20.9 2.6 6.8 16.2 25.6 35.4 18 19 21.5 24 25.5 16 17 18.5 21 22 2.6 6.8 13.1 20.4 30.4 5 8 11 18 24 6 8 10 12 Note) D: max. diameter Straight plug for frequent use: KCH Applicable tube O.D.

CV/MVGQ

REC Bore size Cushion 40 50 63 80 100 CX 40 mm 50 mm 63 mm 80 mm 100 mm Nil N F Lube type Non-lube type Steel tube Solenoid valve CY 2 position single (VS4124-00-X46) 2 position double (VS4224-00) 3 position closed center (VS4324-00) 3 position exhaust center (VS4424-00) Nil W Y Z Note) Auto switches are not available with steel tube.

CV/MVGQ

REC Bore size Cushion 40 50 63 80 100 CX 40 mm 50 mm 63 mm 80 mm 100 mm Nil N F Lube type Non-lube type Steel tube Solenoid valve CY 2 position single (VS4124-00-X46) 2 position double (VS4224-00) 3 position closed center (VS4324-00) 3 position exhaust center (VS4424-00) Nil W Y Z Note) Auto switches are not available with steel tube.

ZP

T01 P. 72 P. 73 ZP (20, 25, 32) U ZP (20, 25, 32) C ZP (20, 25, 32) B ZP25D ZP2-B25J ZP2-B30J ZP2-25UCL ZP2-32UCL ZPT3-A6, A8 ZPT3-B5, B6, B8 B01, N01 T01 P. 72 P. 73 ZP (40, 50) U ZP (40, 50) C ZP (40, 50) B ZP40D ZPT4-A6, A8 ZPT4-B6, B8 B01, N01 T01 ZP2-40UCL ZP2-50UCL P. 72 P. 73 Adapter Assembly Part No.

PSxx-OMG0005CN

X175X186X188X189) () NG NG -5No.PS-OMG0005CN-E * (Nm) RNPTRc1/8 79 RNPT1/4 1214 TSJ Crawford fitting (Swagelock )URJ Cajon (VCR ) FG (50N () () 6 33 ( ) () -6No.PS-OMG0005CN-E 30m DC(-)() () * ( ) () CE -1060 * 2030 10 1% * -7No.PS-OMG0005CN-E 0 01 28 C2 PSE56 0 (01MPa) (1) C2 1 (0-101kPa) 3 (-100100kPa) *PSE200 4 (0500KPa) (15V) 01 R1/8(M5) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01

IR10-OM00007

-X30 IR1010G33-4-01 G33-P4-N01-X30 IR1020G33-10-01 G33-P10-N01-X30 011/84 Rc NNPT FG 00.0050.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R101BG M AX.

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

IR30-OM00013

-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03:3/8 04:1/2 Rc FG NNPT 00.010.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R302BG No.

PSxx-OML0002CN

-4No.PS-OML0002CN-G () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL (100 10 ) JIS B 8392-1 11.1.21.6.2:2003 () -5No.PS-OML0002CN-G * / / ,FG (35N ) () () * () 6 33 () () 10 m DC(-)() () * -6No.PS-OML0002CN-G ( ) () CE 050(5), * ON , 1015 10 /1 2146 LCD * -7No.PS-OML0002CN-G 01 N ISE30A 3 ISE30A -0.11 MPa Y ZSE30A 0-101 kPa ZSE30AF -100100 kPa K T 2 01 R1/8(M5) N01

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)