2 PORT SOLENOID VALVE FOR DUST COLLECTOR

(A,C) Note.5) VXF-26AA VXF-26AC 24.529.5 29.434.3 VXF(A)26A(B,D) Note.5) VXF-26AB VXF-26AD VXF(A)25B(A,B,C,D) VXF-25AA VXF-25AC 12.515 1517.5 VXF(A)26B(A,C) Note.5) VXF-26BA VXF-26BC VXF(A)26B(B,D) Note.5) VXF-26BB VXF-26BD VXF(A)26C(A,C) Note.5) VXF-26CA VXF-26CC VXF(A)26C(B,D) Note.5) VXF-26CB VXF-26CD 24.529.5 29.434.3 VXF(A)26D(A,C) Note.5,6) VXF-26CA VXF-26CC VXF(A)26D(B,D) Note.5,6)

3

C Stainless steel 1/4 D 3/8 3 10A N.C.

Rotary Cylinder Series MRQ

C + D = 3.5 + 24.3 = 27.8L/min Operating time (S) B C Rotary motion parts A D Linear motion parts 0 1 2 340 Rotary Cylinder Series MRQ Size: 32, 40 How to Order 32 MRQ B S 50 C A J79W Made to Order or port type Refer to page 343 for the Made to Order details. Nil XF Rc 1/8 G 1/8 NPT 1/8 XN The combination with Made to Order is not available.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2

NCRBIBwserbs

Auto Switch Circuit Retaining D-T791, T792, T991, T992 D-S791, 5792, 5991, 5992 iftr,:r llEekT-i-ili+:; ' 19 "fl riu* r i-fgl]_L-"",," NCDfl BlOW10.15 NCDRB1OW20.30 D-R801. R802. 90A D-R731, R732 D-90 l B u e D-93A I I !

HRX-OM-Z002

Fig. 8-1 Removal of the dust-proof filter HRLE Series 8.2 Inspection and Cleaning 8-3 HRX-OM-Z002 Chapter 8 Control, Inspection and Cleaning Cleaning the dust-proof filter Clean the dust-proof filters with a long bristled brush or by blowing air.

HRX-OM-R039

Fig. 8.4-5 Cooling capacity(HRSE024-A-20/23) Product Warranty HRSE Series 8-8 HRX-OM-R039 Chapter 8 Documents 8.5 Pump capacity 8.5.1 HRSE012/018-A-10 14 0.14 12 0.12 Circulating fluid pressure [MPa] Outlet : 60Hz 10 0.10 Pump head [m] 8 0.08 Outlet : 50Hz 0.06 6 4 0.04 Available area Return port 2 0.02 0.00 0 2 4 6 8 10 12 14 16 Circulating fluid flow [L/min] Fig. 8.5-1 Pump capacity (HRSE012

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

Auto Switch Circuit Retaining D-T791, T792, T991, T992 D-S791, 5792, 5991, 5992 iftr,:r llEekT-i-ili+:; ' 19 "fl riu* r i-fgl]_L-"",," NCDfl BlOW10.15 NCDRB1OW20.30 D-R801. R802. 90A D-R731, R732 D-90 l B u e D-93A I I !

LC-OM089xx

64 76 10 00 Spain (34) 945-18 41 00 Belgium (32) 3-355 14 64 Netherlands (31) 20-531 8 Germany (49) 6103 4020 Sweden (46) 8-603 12 00 (420) 5-414 24611 Norway (47) 67 12 90 20 Austria (43) 2262-62 280 Italy (39) 02-927 11 Fig.2-1 P-clip Fig.2-2 U-clip Fig.2-3 Soldering Country Telephone Country Telephone *Websites Kingdom Ireland (351) 1-403 9000 United SMC Corporation www.smcworld.com SMC

Parallel Seal Type Slit Valve

-11 Pam3/sec Operating temperature Gate Part5120(During bake-out150) Actuator part590 Except Auto switch Fluid Inert gas Operating Time 1 sec or less * Auto switch D-A93 Operating temperature2060 Seal material FKM Bellows AM350 Gate A6063 Body A5052 Bonnet A6061 Gate bolt SUS316 Others SUS304 Main material of vacuum part Mechanical parts Piping size Rc1/8 Exhaust direction Free End-Lock (

Bag Filter

T2 T1 I 8 x D FGD FGE H G FGG P.C.D B E F FGA C A (mm) Applicable model G H I Part No.

One-touch Fittings

[inch] Model D L M Weight [g] D Applicable tubing 5/32 KQ2C03-00A 8.2 14.5 13.3 0.8 1/4 KQ2C07-00A 11.1 14.8 13.3 1.3 5/16 KQ2C09-00A 13.2 15.7 14.2 2 3/8 KQ2C11-00A 15.4 17.3 15.6 2.8 M L Nipple: KQ2N Applicable fitting D Model L M d Min. port size 2 x Applicable fitting Weight [g] D d 1/8 KQ2N01-99 36 13.3 2.1 0.2 3/16 KQ2N05-99 38 13.3 3.4 0.4 1/4 KQ2N07-99 39 13.3 4.6 1 3/8 KQ2N11-99

Electric Actuator/Slider Type

Weight [g] Auto switch model D-M9N(V) D-M9P(V) D-M9B(V) 0.5 8 8 7 Precautions Caution 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

15

D-M9PA(V) D-M9BA(V) 7 13 38 63 D-M9NA(V) 8 14 41 68 Auto switch model 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-M9A Indicator light Slotted set screw (flat point) Mounting screw M2.5 x 4 L Stainless steel 2 24 2.8 500(1000)(3000)(5000) 0.2 3 4 6 Most sensitive position 2.6 D-M9NAV/D-M9PAV D-M9BAV 500(1000)(3000)(5000) Mounting screw M2.5 x 4 L Stainless steel

Moisture Control Tube

Correction Factor C1 for Supply Air Dew Point Kv: Volume ratio Vt : Piping volume (mm3) Vc: Actuator volume (mm3) Kv = q Vt Vc Correction factor C1 2 Supply air dew point (C) 10 Vt : Piping volume (mm3) [can be selected from piping volume chart in Fig. 2.] d : Tube I.D.

Battery-less

8 !7!9@0 q @2 @3 y@7 A A u i @1 !5 @1 !0 !4 A-A r t B C o @4 B C e @5 @6 D-D C-C B-B !1 !3 !6@8 D w D !2 Component Parts No. Description Material Note 19 End cover LEFS16 Aluminum alloy Anodized No.

Electric Actuator

Weight [g] Precautions Caution D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model 0.5 8 8 7 Fix the auto switch with the existing screw installed on the auto switch body.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

8 !4 !0 B A u !7 !6 y q w t !5 r e i u !2 !3 In-line motor type: LEY D 25 32 63 !2 #0 @9 When rod end male thread selected u u !0 @6 @7 @8 @7 @5 Component Parts No. Description Material Note No.

One-touch Fittings

23.6 28.6 40.5 20.6 13.4 8 4.2 100 58.9 13 29.8 Q Q 2 x O Oval type Round type 4, 6 8 to 16 2 x N M Q L1 L2 Q D D 1: D is maximum diameter.

Model Selection 1

Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-64 VDW10/20/30 Single unit N.C. M5, 1/8, 1/4 1, 1.6, 2.3, 3.2 2, 3, 4 0 to 0.9 (1) 17-2-68 VV2DW1/2/3 N.C. Manifold M5, 1/8, 1/4, (3/8) Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit 2, 3, 4.5, 6, 8, 10 1/8 to 1/2 0 to 3 (1) 17-3-25 VVX21/22/23 N.C./N.O.