MXS Series Air Slide Table

port 2-M5 X 0.8 11 3 J 10 Max.13.5 (With stroke adjuster at retraction end) I 5.5 12 6 Basic type 12 9.5 10 10 5.5 5.5 NA-M5 X 0.8 thread 5.5 deep 21 K KA 21 Stroke adjuster at retraction end 37.5 (With stroke adjuster at extension end) 6 12 3.5 (With stroke adjuster at retraction end) Stroke adjuster at extension end N-M5 X 0.8 thread 6 deep (Helisert) 6 4-M5 X 0.8 thread 7 deep 1 18 (With

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

ZR

, 20 Individual exhaust style for nozzle size 18, 20 For vacuum switch and adapter A For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

8 1(IN), 2(OUT) port 17.5 17.5 2 x M5 x 6.5 15 15 2 x M5 x 6.5 CS: Conduit DS: DIN terminal DZ: DIN terminal with light Applicable cable 6 to 12 18 67 36 55.3 G1/2 48.9 500 18 36 NPT1/2 63 17.5 63 17.5 42.1 40.6 IN IN 8 8 28 30 30 28 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x M5 x 6.5 15 2 x M5 x 6.5 15 15 Direct Operated 2-Port Solenoid Valve JSX Series Dimensions

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

8 1200 LEFS40ll-1200l 1614.5 1644.5 1206 1378 18 8 1200 LC3F2 677 LEFS Series AC Servo Motor Dimensions: Motor Parallel LEFS25R With lock/LEFS25V6-B 3H9 ( ) depth 3 +0.025 0 W X (2.4) 4 x M5 x 0.8 thread depth 8.5 Encoder cable (7) Motor cable (7) 106 Z Body mounting Note 1) reference plane 50 38 3.5 3H9 ( ) depth 3 +0.025 0 45 64 (102) Stroke end of the motor side L A (Table traveling distance

LX

Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3. T-slots l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) LXP M5 x 0.8 7.4 8.5 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

248 237.5 212.5 18 13 248 237.5 223 12.5 14 260.5 250 233.5 13.5 15 273 262.5 244 14.5 16 285.5 275 254.5 15.5 17 298 287.5 265 16.5 18 310.5 300 275.5 17.5 19 310.5 300 286 12.5 20 323 312.5 296.5 13.5 L1 L2 L3 L4 16 Cassette Type Manifold Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60PD (26 pins) U1 2 Scale: 37% 2n1-M5 x 0.8 [With external pilot] (A, B ports) 24 13.3 (Pitch

REA/REB

x 0.8 8 71.5 106 44 M5 x 0.8 17 33.5 33.5 45 46 97 26.5 21 50 8 23.5 M5 x 0.8 48.5 75.5 108 53 16 M5 x 0.8 41.5 22 54 42.5 26.5 102.5 58.5 28 M6 x 1.0 10 86 138 56 M6 x 1.0 25 46 46 61.5 63 125 29 24 TW S XB Z ZZ W PA PB PP P Model N NL NT REAH15 REAH20 REAH25 161 65 17.5 194 21 88.5 62 8 M5 x 0.8 50 15 16.5 70 169 92.5 205 19.5 50 65 23 Rc 1/8 18 15 8 209 75 23.5 250 27 103 9.5 75 9 Rc

REA/REB

x 0.8 71.5 44 106 M5 x 0.8 17 45 33.5 33.5 46 21 26.5 97 50 8 23.5 M5 x 0.8 75.5 48.5 108 M5 x 0.8 16 53 41.5 42.5 54 22 26.5 102.5 58.5 10 28 M6 x 1.0 86 56 138 M6 x 1.0 25 61.5 46 46 63 24 29 125 W PP TW PB S PA ZZ P Z NT XB NL Model N REAH15 REAH20 REAH25 21 65 62 161 50 17.5 M5 x 0.8 194 8 88.5 15 16.5 23 70 65 169 50 19.5 Rc 1/8 205 8 92.5 15 18 27 75 75 209 65 23.5 Rc 1/8 250 9 103

51

18 22 26 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 28 32 38 46 58 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 6 7 7.5 7.5 12 12 16 16 26 31 38 47 58 72 89 110 M4 x 0.7 M8 x 1.25 24 29 35.5 44 55 69 80 100 M5 x 0.8 57 60 62 62 84 84 104 105 Width across flats 6 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 M5 x 0.8 Width across flats 8 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 Rc1/8 Width

Electric Actuator with Integrated Guide

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 M Model 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Controller Connectors

Tamper Proof and Flat Head Screw

(mm) 1in=25.4mm L4 D3 H (width across flats) T2 A L2 D1 L3 D2 T1 L1 Dimensions A Model T2 H D1 T1 D2 D3 L3 L1 L4 L2 AS12 0-M5-T M5 x 0.8 8 9 M5 x 0.8 9 4.5 10 31 10.3 0.7 28.4 AS12 0-U10/32-T 10-32UNF 10-32UNF AS22 0-01-ST Rc 1/8 12 14.3 R 1/8 AS22 0-F01-ST PF 1/8 14.6 7 18 35.6 14.1 1.5 32 AS22 0-N01-ST NPT 1/8 12.7 NPT 1/8 AS22 0-02-ST Rc 1/4 17 18 R 1/4 AS22 0-F02-ST PF 1/4 19.5 7 27.2

Stainless Steel One-touch Fittings Series KG

(mm) M5 Weight (g) D A Nylon Urethane M5 0.8 KGS04-M5 KGS04-01 KGS06-M5 KGS06-01 KGS06-02 KGS08-01 KGS08-02 KGS08-03 KGS10-01 KGS10-02 2.7 2.6 8 3.6 2.7 2.7 4.1 2.7 15.5 13 16 19 16.5 9.5 9.8 11.5 11.8 13.8 2.5 19 23 20 4 1 8 3 2.5 M5 0.8 14 3.2 9 15 12 11 24 18 12 10.0 10.0 9.9 1 8 1 4 1 8 1 4 3 8 1 8 1 4 6 4 20 17 24 10.7 17.2 5 24 19.5 21 26 21.5 28 25.5 27.5 30 14 8 18.5 16.2 23.3 6 17

5 Port Solenoid Valve, Series VQC

C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread (7.5) 20.5 2-C8 1(P) port 34 P = 10.5 (mm) Formulas: L1 = 10.5n + 45, L2 = 10.5n + 167.5 (for 1 input block.

CQS

M5 X 40 l M5 X 45 l M5 X 50 l M5 X 55 l M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M5 X 85 l 40 45 50 55 60 65 70 75 80 85 M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 30 35 40 45 50 55 6.5 8.5 Note 1) The appropriate plain washer must be used for through-hole mounting.

CXS

Refer to page 18.

CNG

K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB 141 (149) 88 5.5 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 151 (159) M6 x 0.75 98 6 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M5 x 0.8 depth 7.5 154 (162) 99 6 M8 x 1.0 5.5 10 M10 x 1.25 35.5 Rc(PT) 1/8 26.5 2.5 73 11 10 (11) 15 (16) 28.5 25 3 12 M5 x 0.8 depth 8 169 (178

Cylinder with Lock Series CNG

K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB M5 x 0.8 141 (149) 88 5.5 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 M6 x 0.75 151 (159) 98 6 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M8 x 1.0 154 (162) 99 6 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc(PT) 1/8 26.5 2.5 73 11 10 (11) 15 (16) 28.5 25 3 12 M10 x 1.25

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(A) 2 Port size {2(A) port} 1 1 (P) 3 (R) One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 M5 thread C3 C4 C6 M5 Note) Refer to p.2.10-18 for inch-size One-touch fitting.

Modular F.R.L. Unit

New Old Model Reduction (mm) Old New AC1000 AC10 4 Improved visibility for lubricant drip with graduation for lubricant control AC2000 AC20 14 AC2500 AC25 14 AC3000 AC30 14 Graduation AC4000 AC40 18 AC4000-06 AC40-06 18 AC5000 AC50 18 AC5500 AC55 18 5 4 6 7 3 SMC 8 2 Spacer with bracket AC6000 AC60 18 9 1 Embedded pressure gauge is a standard feature.