MGP

Note) Set ua so that the cushion approach speed u does not exceed 0.5m/s (or 0.4m/s in the case of the 80 or 100) 3.17-18 Compact Guide Cylinder Series MGP Operating Conditions F(N) Bore size (mm) Stroke (mm) Allowable lateral load (Air cushion) Model 200 175 150 125 100 75 50 25 MGPM 32 37 46 29 16 F MGPL 28 35 47 69 49 54 59 66 MGPM 75 87 103 46 20 43 48 54 62 MGPL 73 70 90 123 CL 65 71

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

But, F mark is indicated on the inside of the pad when the plate is removed. 260

3

C 1 B A Basic (mm) (mm) T 9 10.5 MKB20-Z MKB25-Z Model Yh9 18 23 A B C E F G 36 40 47 52 36 40 35.5 40.5 18 21 17.9 22.5 S 28 27.5 Clamp stroke Model Rod state 0 0.043 0 0.052 20 mm Q R 112.5 142 113.5 143 30 mm Q R 132.5 172 133.5 173 10 mm Q R 92.5 112 93.5 113 Retracted Extended Retracted Extended MKB20-Z 72 82 92 MKB25-Z 73 83 93 Note) The above figure is with the auto switch (D-M9) mounted

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

ZPT/ZPX

Silicon rubber Urethane rubber Fluoro rubber EPR 178 144 143 141 139 350 301 299 414 365 363 Add or deduct the weight shown in the table on the left for other materials. 71 38 37 83 50 49 149 115 114 112 110 40 50 63 80 100 125 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 How to Order A14 H N 40 ZPT Vacuum entry/Mounting thread diameter (Vacuum entry port) Pad diameter (mm) 40, 50

2–4

-RA Both ends tapped (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33 7.5 10.5 45 43 34.4 Rc1/8 NPT1/8 NPT1/8 G1/8 7.5 10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 56.5 39.5 8 11 52 50 41.4 Rc1/8 NPT1

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Mass (g) CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Model (size) Vane type 180 270 90 180 270 90 180 270 180 270 180 270 90 Rotating angle Single vane Double vane D469 47.1 47.5 47 73 72 72 143 142 263 258 491 480 140 255 Body of rotary actuator Auto switch unit + 2 switches 30 30 50 60 46.5 Angle adjuster 30 47 90 150 203 90 100 90 100 90 100 90 100 90 100 Rotating angle 158 308

RZQ

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

End Lock Cylinder Series CBG1

TA DL2 TF TG A S + Stroke H NA F ZZ + Stroke Section TA With non-locking type manual override (suffix N) With locking type manual override (suffix L) HN HR MO RF WL WL KA 0.1 C 8-J NA (mm) Stroke range Bore size (mm) A AL B1 C D DL2 E F GA GB H H1 HR HN (max.)

3 Position Cylinder Series RZQ

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

IDX-OM-W011

O N 3 ( ) 5 /1 ( ) I D F Seri es 141 14 1 I D XO M W 011 14 T 144 PE 1 2 3 LN PE PE: L N: LN PE M 3 6. 5m m 1. 25m m 2 ( ) ( ) I D F Seri es 144 14 2 I D XO M W 011 14 T 145 I D F4E8E10T I D F4E8E20T I D F11E20T AC100/100,110V (50/60Hz) PE N L 1 2 AC200/200,220V (50/60Hz) PE N L 1 2 TB 3 TB 3 TDR MC TDR MC TDR ILS TDR ILS MC MC OLR OLR MC MC CM MC CM MC PTC PTC C11 PRS

XLAQ/XLDQ

U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143 153 474 XLAQ/XLDQ Series Glossary of Terms 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing

CQM

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (KB) D-A7/A8 Auto switch KA A + Stroke B + Stroke W L S EA EB EC M J 2 x 2-OA 2 x 2-RA Both ends tapped style (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33

MU

Mounting style Without auto switch (Built-in magnet) Auto switch Basic style Foot style Flange style B L F Nil For the applicable auto switch model, refer to the table below. Auto switches are shipped together, (but not assembled).

Thermo-chiller

Description Size 090 050 Note 1 Filter Rc1 (5 F) V The value in ( ) shows the nominal filtration accuracy. Rc1/2 (5 F) V The value in ( ) shows the nominal filtration accuracy. 2 Filter Rc1/2 (5 F) V V 8 Y-strainer Rc1/2 #40 V V Install either the strainer or filter. If foreign matter with a size of 20 m or more are likely to enter, select the particle filter, and then prepare it.

MU

Mounting style Without auto switch (Built-in magnet) Auto switch Basic style Foot style Flange style B L F Nil For the applicable auto switch model, refer to the table below. Auto switches are shipped together, (but not assembled).

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Air Cylinder/End Lock Series MBB 32, 40, 50, 63, 80, 100 How to Order MBB L 32 50 H N Standard H N L 32 50 A53 MDBB With auto switch Number of auto switches Built-in magnet S 3 n 2 1 3 n Mounting Manual release Basic/Without bracket Axial foot Front flange Rear flange Single clevis Double clevis Center trunnion B L F G C D T Bore size N L Non-locking Locking 32 40 50 63 80 100 Without auto

Compact

(s P. 11 ) (2) Pressing force F and overhang L1 should be within the range as shown in the graphs. MXZ16 160 OUT side IN side 140 0.7/ Supply pressure [MPa] 120 Pressing force [N] F 0.5/0.67 100 80 L1 60 0.3/0.4 40 20 0 18 0 10 20 30 40 Allowable overhang L [mm] Allowable supply pressure on OUT side and IN side is the theoretical output of cylinder when pressing force is required.

This is a legacy product, and replaced byVFN2120N-5DB-02N VFS2000 SOL VALVE 4/5 PORT. VALVE, NAMUR INTERFACE, S/SOL. VALVE. VFS2000 BODY PT 1/4NPT (F). 0.61729 lb. EA.

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 7 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: 02N (NPT1/4)