TABLE OF CONTENTS

SERIES 15 FLOW CHARTS 400 400 1/32 1/32 3/64 3/64 1/16 1/16 3/32 3/32 1/8 1/8 ORIFICE-INCH ORIFICE-INCH 100 100 50 50 PRESSURE PRESSURE DROP ROP PSI PSI 10 10 5 01 01 02 02 05 05 1 2 5 WATER FLOW-GPM SERIES 50 FLOW CHARTS COAST PNEUMATICS 8055 E.

Mini Free Mount Cylinder

Mounting condition 2 With Magnet (With Auto Switch) Mounting condition 1 6, 8, 10 12, 16 20 Bore size (mm) M3 x 0.5 M5 x 0.8 Port size 5 or more 4 or more 5 or more Stroke (mm) AS121F-M3-02 AS121F-M5-02 AS121F-M3-23 AS121F-M5-23 AS121F-M3-04 AS121F-M5-04 AS121F-M5-06 AS131F-M3-23 Mounting condition 4 Mounting condition 3 AS131F-M3-04 AS131F-M5-23 AS131F-M5-04 AS131F-M5

5 Port Solenoid Valve, Series VQC

Note) Available for the rubber seal type only. 25 Manifold Specification Sheet Series VQC4000: Base-Mounted Type/Plug-in Unit How to order manifolds VV5QC 4 1 08 TD0 02 T Kit 1 2 3 7 VV5QC 4 1 16 SDQW 02 S Kit Series VQC4000 4 5 6 Base-Mounted plug-in Stations Electrical entry Options 01 1 station Nil None Special wiring specifications Note 1) (except for double wiring) D-side entry Kit

Air Cylinder

With air cushion With rubber bumper GA WA GA E 0 0.05 E 0 0.05 (E1) (E1) TA (F1) ZZ + Stroke S + Stroke F TA (F1) ZZ + Stroke S + Stroke F (mm) Bore size (E1) E(F1) F GA S TA WA ZZ Rc NPT G Male thread Female thread 32 17 18 2 2 18 16.5 77 (85) 17 22 119 (127) 93 (101) 40 21 25 2 2 19 19 84 (93) 18 23 136 (145) 101 (110) 50 26 30 2 2 21 21 97 (109) 20 25 157 (169) 115 (127) 63 26 32 2 2 21

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Description Stroke range Bore size Stroke range Bore size Stroke range 32 to 200 101 to 299 32 to 160 101 to 299 Part no.: CQ2A50-166DC CQ2A50-175DC with 9 mm width spacer. B dimension is 230.5 mm. Part no.: CQ2B50-166DC-XB10 Makes 166 stroke tube. B dimension is 221.5 mm.

4/5 Port Air Operated Valve Series SYJA3000 1

1.9 0.48 0.46 0.57 2.1 0.36 center Base mounted (With sub-plate) 1/8 Note 1) M5 x 0.8 SYJA740-01 0.36 0.86 3.4 Exhaust 1.2 200 (120) 3 position 0.35 0.48 [0.57] [0.41] [1.3] center 3.3 0.78 0.43 Pressure 0.45 0.56 2.1 [0.85] [0.25] [0.54] center 170 (90) Single 2.3 0.61 0.35 0.74 2.9 0.41 2 position 190 (110) Double Closed 1.9 0.50 0.44 0.60 2.2 0.46 center 1/4 Note 1) M5 x 0.8 SYJA740-02

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

For positive pressure 80 ISE 02 N M For vacuum/ compound pressure 80 ZSE 02 N M Option 3 Rated pressure range Operating Note) manual (Booklet) (CD-ROM) Operating Note) manual 80 80F Calibration certificate Calibration certificate 0 to 101 kPa 100 to 100 kPa Symbol Symbol (Booklet) (CD-ROM) K T R Nil Piping Y W R1/4 (M5 female threaded) Rear ported 02 Note) All texts in both English

AC Servo Motor Driver

OUTLINE DRAWINGS 101 to 105 10.1 Driver . 102 10.2 Connector . 104 11.

LEC-OM069xx

OFFSET Device Type/Name DEVICE_ CODE 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 Model 00H S G D 1 1 2 2 2 3 4 4 5 6 6 6 6 6 6 00 DRIVER Ver. 02H Software version Model 20H S G M 7 7 8 8 9 10 11 12 13 00 Servomotor Ver. Encoder software version 12H Model 30H External Encoder Software version 32H Ver.

Table of Contents

For details, refer to page 8-11-101.

CL

Bore e f 1 to 50 68 72 72 77 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 185 185 190 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 301 to 400 100 100 100 100 401 to 500 125 125 125 1 to 50 12.5 12.5 12.5 12.5 20 25 32 40 68 72 72 77 35 35 35

Vacuum Module Series ZX

ZH Operation Solenoid valve/Air operated valve ZU Power supply voltage 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60 Hz) ZL Vacuum pressure switch unit Series ZS Adsorption confirmation switch Vacuum switch Adsorption confirmation switch Vacuum switch Series ZY Set pressure range 0 to 101 kPa 20 kPa to 101 kPa 0 to 101 kPa 20 kPa to 101 kPa ZF 3% or less 0.5 kPa Hysteresis 2 to 25 0.3 to 1.2 2

ZX

Function ZL Solenoid valve/Air operated valve Operation ZY 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60 Hz) Power supply voltage Vacuum pressure switch unit Series ZS ZQ Vacuum switch Adsorption confirmation switch Adsorption confirmation switch Series Vacuum switch ZF Set pressure range 0 to 101 kPa 20 kPa to 101 kPa 0 to 101 kPa 20 kPa to 101 kPa 3% or less 0.5 kPa Hysteresis ZP 2 to 25 0.3

7ND9071en

SPOOL VALVE PNEUMATIC CONNECTIONS (S, C1, C2) INMETRO certifications: Ex ia IIC T4/T5/T6 Ga Ex ia IIC T4/T5/T6 Ex ia IIC T4/T5/T6 Gb Temperature range: T4: -40 to +80 C; T5: < +65 C; T6: < +50 C. 02 Low capacity. Stroke volume of actuator < 1 dm3. G 1/4 (ND91 series), 1/4 NPT (ND92,ND93 and ND94 series). 03 Medium capacity. Stroke volume of actuator 13 dm3.

Model Selection 1

Manifold Direct operated Air operated VXA31/32 17-3-101 C.O. Single unit 3 port 17-3-105 VVXA31/32 C.O. Manifold Pilot operated Diaphragm opeation with zero differential pressure 17-3-61 VXZ22/23 N.C./N.O. Single unit Pilot operated (High pressure control) 17-3-69 VXH22 N.C.

ZCUK

ZPT U N 02 B4 ZP U N 04 X11 Dia. (mm) Vacuum entry (Mounting thread diameter) Dia. (mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

ZQ-OM01301

ZQ-OM01301-A 9.4 Vacuum Switch Specification ZSE10 Pressure switch Pressure switch for Product Number Vacuum vacuum with for compound pressure switch pressure energy saving function Rated pressure range [kP] 0 to -101 -100 to 100 Set / display pressure range [kPa] 10 to -101 -105 to 105 Proof pressure [kPa] 500 Lowest configurable increment [kPa] 0.1 Applicable fluid Air, non-corrosive gas

Combination Cylinder

Bore e f 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 185 185 190 1 to 50 12.5 12.5 12.5 12.5 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 301 to 400 100 100 100 100 401 to 500 125 125 125 1 to 50 68 72 72 77 20 25 32 40 68 72 72 77 35 35 35

90

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2013 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing RQ printing RQ 8150SZ Printed in Japan. D-G

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM01301 (5) Pressure Sensor/Pressure Switch for Vacuum Symbol Type Pressure range [kPa] Specifications P Pressure sensor Note 10) 0 to -101 Analog output 1 to 5V T -100 to 100 Analog output 1 to 5V A Unit selection function Note 12) NPN 2 outputs B SI unit only Note 13) 0 to -101 C PNP Unit selection function Note 12) 2 outputs D SI unit only Note 13) Pressure switch for vacuum E Unit