Passage: 20 (Top Ported Common EXH-Integrated), Stations: 10 Stations Top Ported/Valve

Stations: 10 Stations, Thread: -, Option: -

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

IR1000/2000/3000

(kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate (l/min (ANR)) 14-5-20 20 Series IRV1000/2000/3000 Made to Order Specifications: Please contact SMC regarding detailed dimensions, specifications, and delivery times. 1.

ZSE30A(F)/ISE30A

(Reduce power consumption by up to 20%.)

High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

XL-OMY0001

XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 XL1A63-2-101 XL1A80-2-101 XL1A50-10-1 XL1A80-10-1 112 2 1 FKM:No.1349-80 [] XL1A16-2-101-XN1 EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz

VCL

Dimensions (mm) Electrical entry Z J E H C G A B D Model Grommet Conduit DIN terminal Conduit terminal Y N X W V U T S R Q VV2CL2 56 34.5 4.5 17.3 24.5 38 49 20 28 77 66 99 41.5 58 46 43.5 44 45.5 22 VV2CL3 66 38.5 5.5 19.3 28.5 42 57 25.5 30 86.5 68 101 51 60 48 53 45.5 55 24 VV2CL4 74 41.5 5.5 20.8 28.5 42 57 25.5 30 94 70 103 58.5 62 50 60.5 47.5 62.5 26 17-2-37

PSxx-OMG0001CN

(A/D ) ( ) 6 2030 20 80 mA (Er1,2) () ( (Er4,6,7,8) ) DC1224 V DC1224 V Er1,2) Er4,6,7,8) 7 (HHH) "HHH" "LLL" Er3) (LLL) (Er3) 7F.S. -27No.PS-OMG0001CN-H No. DC1224 V DC1224 V 8 DC(+) DC(-) DC1224 V DC1224 V DC(+) 9 DC(-) / / 10 ( ) 11 / 5m / 12 2030 20 -28No.PS-OMG0001CN-H No.

Air-hydro Unit

CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 148.5 57 1/2 121.8 101 M5 x 0.8 5.4 to 7.5 CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 CCVL1-G-S 66 107

CC

35 18 35 36 25 72 17.5 1 88.2 148.5 103.9 45 CCVS02-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 2 98 148.5 121.8 57 CCVSl1-lG-S M5 X 0.8 5.4 to 7.5 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl2-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl3-lG-S 1/2 45 80 86 35 36 25 72 17.5 98 57 88.2 CCVSl0-S 3/4 66 107 116 135 50

VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

ZFC Series

Metric size Type (recommended flow rate) Symbol Tubing size Applicable model 04 ZFC100 ZFC100 ZFC200 ZFC200 4 Flow rate l/min (ANR) (SCFM) Symbol Tubing size 100 200 101 201 Max. 20 (0.70) Max. 50 (1.75) Max. 20 (0.70) Max. 50 (1.75) Metric size (release button: light gray) 06 6 08 8 Inch size (release button: orange) Inch size Symbol 03 Applicable model ZFC101 ZFC101 ZFC201 ZFC201 Tubing

VXA31/32

Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

Metric size Type (Recommended flow rate) Symbol Tubing size Applicable model 04 ZFC100 ZFC100 ZFC200 ZFC200 4 Flow rate (/min (ANR)) Symbol Tubing size 100 200 101 201 Max. 20 Max. 50 Max. 20 Max. 50 Metric size (Release bushing: Light gray) 06 6 08 8 Inch size (Release bushing: Light gray) JIS Symbol Inch size Symbol 03 Tubing size 5/32" Applicable model ZFC101 ZFC101 ZFC201 ZFC201 Element

Table of Contents

20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , Misc.

TABLE OF CONTENTS

Series 20, 30 2 W.N.C. & All 3 W. 2 W.N.O. 30, 50, 70 Series 20 Series 20, & All 3 W. & E20 & 30 50, 70 & E20 Series 20 Media S.S. Body Brass Body S. S.

CXS

400mm/s 2 20 50 CXSM CXSL CXSM CXSL 10 Weight m (kg) Weight m (kg) 10 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph V = up to 800mm/s 4 Graph V = up to 600mm/s 3 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph

MGG

25 32 40 50 20 25 32 40 50 20 25 32 40 50 Rc 1/8 100mm or more 88 250 to 400 157 80 30 40 12 26 48 12 21 14 82 Rc 1/8 125mm or more 88 350 to 500 175 80 37 13 46 57 31 12 21 14 100 Rc 1/8 150mm or more 90 350 to 600 201 82 37 52 16 38 65 12 21 14 114 Rc 1/8 200mm or more 101 350 to 800 238 92 44 62 20 47 84 12 25 15 138 Rc 1/4 250mm or more 116 350 to 1000 285 104 55 25 75 94 58 14 26 16